Solid Phase Crystallization of LPCVD Amorphous Silicon Thin Films by Alternating Magnetic Flux (교번자속인가에 의한 비정질 실리콘 박막의 결정화거동에 대한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2000.11a
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- pp.459-462
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- 2000