Effect of discharge power on the electrical properties of ZnO:Al transparent conducting films by RF magnetron sputtering (RF 마그네트론 스퍼터법에 의한 ZnO:Al 투명전도막 특성에 미치는 방전전력의 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2004.07b
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- pp.939-942
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- 2004