• 한국수소및신에너지학회논문집
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• 제21권4호
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• pp.271-277
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• 2010

$(Ba(Zr_{0.85}Y_{0.15})O_{3-\delta})$ oxide, showing high protonic conductivity at high temperatures and good chemical stability with $CO_2$ are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BZY-Ni layer has to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and may be applicable to the fabrication process of AD integration ceramic layer effectively. XRD, SEM, X-ray mapping measurements were conducted in order to analyze the characteristics of BZY-Ni membrane fabricated by AD process. it is observed that it is homogeneous distribution for BZY-Ni. The result of $H_2$ permeation rate suggests that BZY-Ni composite is higher than BZY.

• 한국세라믹학회지
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• 제40권8호
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• pp.715-719
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• 2003

The Aerosol Deposition (AD) process will be proposed as a new fabrication technology for the integrated RF modules. $\alpha$-A1$_2$O$_3$ thick films were successfully grown on glass and Al substrates at room temperature by the AD process. Relative dielectric permittivity and loss tangent of the $Al_2$O$_3$ thick films on Al showed 9.5 and 0.005, respectively. To form microstrip lines on aerosol-deposited A1903 thick films, copper electroplating and lithography processes were employed, and the square-type cross section with sharp edges could be obtained. Low-pass LC filters with 10 GHz cutoff frequency were simulated by an electromagnetic analysis, exhibiting the validity of the AD process as a fabrication technology f3r integrated RF modules.

• 한국입자에어로졸학회지
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• 제9권1호
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• pp.1-6
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• 2013

New evaluation method for the particle size and morphology via change of ground particle during a grinding process was investigated. The grinding experiments were carried by a planetary ball mill. The relationship between the particle outline of the scanning electron microscopy photograph and measurement line, the measurement contact number was evaluated. The value of contact number decreased with the increase in the particle size of the ground sample, and varied with the experimental conditions. The value of contact number, which is related to the particle size of the raw sample, changed at the various experimental conditions.

• 드라이브 ㆍ 컨트롤
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• 제21권1호
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• pp.8-15
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• 2024

This thesis investigates the jetting characteristics of an aerosol jet printing (AJP) process as a function of design and operating conditions. The governing equations of the AJP system are derived for experimentation and analysis. To understand the characteristics of the AJP system, it analyzes the jetting characteristics as a function of the flow rate of the carrier gas and the sheath gas, and the variation of the linewidth with the nozzle exit size based on particle tracking. The thesis focuses on computational fluid dynamics (CFD), which is a computer simulation. The particle tracking results obtained by CFD were analyzed using MATLAB. CFD analytical models can be analyzed in environments with different conditions and consider more specific situations than mathematical computational models. The validity of the CFD analysis is shown by comparing the experimental results with the CFD analysis.

• 드라이브 ㆍ 컨트롤
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• 제21권2호
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• pp.8-14
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• 2024

This paper investigates the jetting characteristics of an aerosol jet printing (AJP) process as a function of design and operating conditions. The governing equations of the AJP system are derived for experimentation and analysis. To understand the characteristics of the AJP system, this thesis analyzes the jetting characteristics as a function of the flow rate of the carrier gas and the sheath gas, and the variation of the linewidth with the nozzle exit size based on particle tracking. This thesis focuses on computational fluid dynamics (CFD), which is a computer simulation. The particle tracking results obtained by CFD were analyzed using MATLAB. CFD analytical models can be analyzed in environments with different conditions and consider more specific situations than mathematical computational models. The validity of the CFD analysis is shown by comparing the experimental results with the CFD analysis.

• 한국결정성장학회지
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• 제25권6호
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• pp.239-244
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• 2015

에어로졸 증착법에 의해 실리콘 기판위에 $10{\sim}20{\mu}m$의 두께를 가진 PZT 후막을 제조한 후 $700^{\circ}C$에서 어닐링처리하였다. PZT 분말에 의해 제조된 막은 임피던스 분석기(impedance analyzer)와 쇼여-타워 서킷(Sawyer-Tower circuit)으로 분석하였다. PZT 분말은 통상적인 고상반응법 및 솔-젤 법으로 준비되었다. 고상반응법으로 만들어진 분말을 사용한 $10{\mu}m$ 두께 PZT 막의 잔류분극, 항전계 및 유전상수는 각각 $20{\mu}C/cm^2$, 30 kV/cm 그리고 1320이었다. 한편 솔-젤 법으로 제조된 분말을 사용한 경우의 유전상수는 635로 비교적 낮은 값을 나타낸다. 이는 어닐링시 생기는 발생하는 유기물에 의한 기공의 존재 때문이다.

• 한국세라믹학회지
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• 제43권2호
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• pp.106-113
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• 2006

PMN-PZT films with thickness of $5\;{\mu}m$ were deposited on $Pt/Ti/SiO_2/Si$ substrate at room temperature using aerosol deposition process. The films showed fairly dense microstructure without any crack. XRD and TEM analysis revealed that the films consisted of randomly oriented nanocrystalline and amorphous phases. Post-annealing process was employed to induce crystallization and grain growth of the as-deposited films and to improve the electrical properties. The annealed film showed markedly improved electrical properties in comparison with as-deposited film. The film after annealing at $700^{\circ}C$ for 1h exhibited the best electrical properties. Dielectric constant $(\varepsilon_r)$, remanent polarization $(P_r)$ and piezoelectric constant $(d_{33})$ were 1050, $13\;{\mu}C/cm^2$ and 120 pC/N, respectively.

• 한국정밀공학회지
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• 제20권2호
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• pp.50-57
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• 2003

This paper presents the experimental results to verify the atomization characteristics and environmental impact of cutting fluid. Even though cutting fluid improves the productivity through the cooling, Lubricating effects, environmental impact due to cutting fluid usage is also increased on factory shop floor Cutting fluid's aerosol via atomization process can be affected human health risk such as lung cancer and skin diseases. Experimental results show that the generated fine aerosol which particle size less than 10 micron appears near working tone under typical operational conditions. The aerosol concentration also exceeds NIOSH regulations. This research can be provided a basis of environmental impact analysis fur environmental consciousness.

• 한국분무공학회지
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• 제3권4호
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• pp.25-34
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• 1998

Hygroscopic aerosols can rapidly grow in size by steam condensation even under subsaturated steam conditions. Much efforts have been made to handle this process, but there have been computational difficulties in handling the condensational growth of hygroscopic aerosols by contentional methods. A recently released computer code, CONTAIN 2.0, employs a new technique called Moving Sectional Method(MSM) to handle the growth of hygroscopic aerosols. As a part of the model verification efforts, we have used the code to simulate the VANAM M3U hygroscopic aerosol experiment. We assess the accuracies of the new MSM and the conventional Fixed Sectional Method(ESM) based on the simulation results. Also presented are discussions about the robustness of the MSM.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2006년도 하계학술발표대회 논문집
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• pp.442-447
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• 2006

In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.