Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2006.06a
- /
- Pages.442-447
- /
- 2006
An Experiment on Performance Evaluation of a Vapor Condensation Type Air Washer System for Semiconductor Clean Rooms
반도체 클린룸용 수증기 응축식 에어와셔 시스템의 성능평가
-
Yeo, Kuk-Hyun
(Aerosol and Filtration Technology Laboratory, KITECH)
;
- Park, Sang-Tae (Aerosol and Filtration Technology Laboratory, KITECH) ;
-
Yoo, Kyung-Hoon
(Aerosol and Filtration Technology Laboratory, KITECH)
;
- Son, Seung-Woo (Research & Department Center, Sunglim PS Seoul-Si)
-
여국현
(한국생산기술연구원 에어로졸.오염제어연구실)
;
- 박상태 (한국생산기술연구원 에어로졸.오염제어연구실) ;
-
유경훈
(한국생산기술연구원 에어로졸.오염제어연구실)
;
- 손승우 ((주)성림피에스)
- Published : 2006.06.21
Abstract
In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.
Keywords