• Title/Summary/Keyword: Advanced techniques

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Application of Pulsed Plasmas for Nanoscale Etching of Semiconductor Devices : A Review (나노 반도체 소자를 위한 펄스 플라즈마 식각 기술)

  • Yang, Kyung Chae;Park, Sung Woo;Shin, Tae Ho;Yeom, Geun Young
    • Journal of the Korean institute of surface engineering
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    • v.48 no.6
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    • pp.360-370
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    • 2015
  • As the size of the semiconductor devices shrinks to nanometer scale, the importance of plasma etching process to the fabrication of nanometer scale semiconductor devices is increasing further and further. But for the nanoscale devices, conventional plasma etching technique is extremely difficult to meet the requirement of the device fabrication, therefore, other etching techniques such as use of multi frequency plasma, source/bias/gas pulsing, etc. are investigated to meet the etching target. Until today, various pulsing techniques including pulsed plasma source and/or pulse-biased plasma etching have been tested on various materials. In this review, the experimental/theoretical studies of pulsed plasmas during the nanoscale plasma etching on etch profile, etch selectivity, uniformity, etc. have been summarized. Especially, the researches of pulsed plasma on the etching of silicon, $SiO_2$, and magnetic materials in the semiconductor industry for further device scaling have been discussed. Those results demonstrated the importance of pulse plasma on the pattern control for achieving the best performance. Although some of the pulsing mechanism is not well established, it is believed that this review will give a certain understanding on the pulsed plasma techniques.

An Advanced Method of Simulation and Analysis for Electromagnetic Environment on the Mobile Receiver in a Shielded Anechoic Chamber

  • Kim, Jung-Hoon;Rhee, Joong-Geun
    • Journal of electromagnetic engineering and science
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    • v.6 no.4
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    • pp.229-234
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    • 2006
  • This paper presents an advanced method of simulation for EM(electromagnetic) environment that affects on mobile receivers. A new calibration algorithm in the process of simulation is introduced. With a proposed calibration method, the time required for simulation is reduced and this makes it possible to simulate a near-real time EM environment in a shielded anechoic chamber. EM environment data acquisition and logging techniques with GPS for simulation were developed.

Neural and Genetic Basis of Evasion, Approach and Predation

  • Park, Seahyung;Ryoo, Jia;Kim, Daesoo
    • Molecules and Cells
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    • v.45 no.2
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    • pp.93-97
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    • 2022
  • Evasion, approach and predation are examples of innate behaviour that are fundamental for the survival of animals. Uniting these behaviours is the assessment of threat, which is required to select between these options. Far from being comprehensive, we give a broad review over recent studies utilising optic techniques that have identified neural circuits and genetic identities underlying these behaviours.

A Study on the Development of Measurement Techniques for Thermal Flows in MEMS

  • Ko Han-Seo;Yang Sang-Sik;Yoo Jai-Suk;Kim Hyun-Jung
    • Journal of Electrical Engineering and Technology
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    • v.1 no.3
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    • pp.387-395
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    • 2006
  • A review on advanced flow visualization techniques is presented particularly for applications to micro scale heat and mass transport measurements. Challenges, development and applications of micro scale visualization techniques are discussed for the study of heating/evaporating thin films, a heated micro channel, and a thermopneumatic micro pump. The developed methods are (1) Molecular Tagging Fluorescence Velocimetry (MTFV) using 10-nm caged seeding molecules (2) Micro Particle Velocimetry (MPIV) and (3) Ratiometric Laser Induced Fluorescence (LIF) for micro-resolution thermometry. These three methods are totally non-intrusive techniques and would be useful to investigate the temperature and flow characteristics in MEMS. Each of these techniques is discussed in three-fold: (1) its operating principle and operation, (2) its application and measurement results, and (3) its future challenges.

Visualization Techniques for Marine Engineering Research (조선해양공학 분야의 가시화기법)

  • Hyun Beom-Soo;Doh Deog-Hee
    • Journal of the Korean Society of Visualization
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    • v.1 no.2
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    • pp.3-12
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    • 2003
  • This paper describes the general aspects of various visualization techniques employed for marine engineering research including classical naval architecture, ocean engineering and other related topics. Visualization techniques performed mostly by authors' were introduced here, which range from old fashioned methods such as paint and tuft tests to the newly emerging PIV technique and Sonar in broad sense. Brief explanation of each technique was made for the instruction purposes. It is strongly recommended that the interdisciplinary project with experts in other research areas is necessary in order to develop more advanced and profitable techniques.

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A Study on Fashion Design by Application of Fashion Painting (패션페인팅(Fashion Painting)을 이용한 의상디자인 연구)

  • Jung, Kyung-Bock;Rhee, Jung-Hi
    • The Research Journal of the Costume Culture
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    • v.18 no.1
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    • pp.205-215
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    • 2010
  • In modern society as people adapt to social and cultural changes, people prefer high-scarcity designed products rather than standardized ones. Consequently, this adaptation lays a foundation in art and cultural domains to express uniqueness and individuality. The purpose of this study is to develop fashion designs by fusing fashion painting and handicraft techniques through creative and various artistic expressions. The researchers studied the sociocultural background of modern handicraft fashion using document-based research methods. Based on the characteristics of modern handicraft, we produced six garments that applied fashion painting techniques. In this study, the origin of fashion painting was found in ornaments such as tattoo or body-painting. We determined that modern designers were using various fashion painting techniques and motives as unique and advanced ornamentary skills. Harmonizing various handicraft techniques(dyeing, embroidery, quilt, patchwork, beads, fashion painting, etc.) centered on fashion painting enabled creation of unique fashion design through varieties of artistic expressions.

Advanced Methodologies for Manipulating Nanoscale Features in Focused Ion Beam

  • Kim, Yang-Hee;Seo, Jong-Hyun;Lee, Ji Yeong;Ahn, Jae-Pyoung
    • Applied Microscopy
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    • v.45 no.4
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    • pp.208-213
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    • 2015
  • Nanomanipulators installed in focused ion beam (FIB), which is used in the lift-out of lamella when preparing transmission electron microscopy specimens, have recently been employed for electrical resistance measurements, tensile and compression tests, and in situ reactions. During the pick-up process of a single nanowire (NW), there are crucial problems such as Pt, C and Ga contaminations, damage by ion beam, and adhesion force by electrostatic attraction and residual solvent. On the other hand, many empirical techniques should be considered for successful pick-up process, because NWs have the diverse size, shape, and angle on the growth substrate. The most important one in the in-situ precedence, therefore, is to select the optimum pick-up process of a single NW. Here we provide the advanced methodologies when manipulating NWs for in-situ mechanical and electrical measurements in FIB.