Journal of Electrical Engineering and Technology

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Development of Measurement Techniques for Thermal Flows in MEMS

  • Ko Han-Seo (School of Mechanical Engineering, Sungkyunkwan University) ;
  • Yang Sang-Sik (Division of Electronics Engineering, Ajou University) ;
  • Yoo Jai-Suk (Division of Mechanical Engineering, Ajou University) ;
  • Kim Hyun-Jung (Division of Mechanical Engineering, Ajou University)
  • Published : 2006.09.01
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Abstract

A review on advanced flow visualization techniques is presented particularly for applications to micro scale heat and mass transport measurements. Challenges, development and applications of micro scale visualization techniques are discussed for the study of heating/evaporating thin films, a heated micro channel, and a thermopneumatic micro pump. The developed methods are (1) Molecular Tagging Fluorescence Velocimetry (MTFV) using 10-nm caged seeding molecules (2) Micro Particle Velocimetry (MPIV) and (3) Ratiometric Laser Induced Fluorescence (LIF) for micro-resolution thermometry. These three methods are totally non-intrusive techniques and would be useful to investigate the temperature and flow characteristics in MEMS. Each of these techniques is discussed in three-fold: (1) its operating principle and operation, (2) its application and measurement results, and (3) its future challenges.

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References

  1. Personal communications, Dr. D. M. Pratt, Wright- Patterson AFB, Ohio, 2002
  2. D. M. Pratt, W. S. Chang, and K. P. Hallinan, 'Effects of Thermocapillary Stresses on the Capillary Limit of Capillary-Driven Heat Transfer Devices,' Proc. 11th Int. Heat Tran. Conf. (Kyongju), pp. 201-211, August 1998
  3. H. B. Ma, D. M. Pratt, and G. P. Peterson, 'Disjoining Pressure Effect on the Wetting Characteristics in a Capillary Pore,' Microscale Thermophysics Engineering, vol. 2, no. 4, pp. 283-297, 1998 https://doi.org/10.1080/108939598199928
  4. D. M. Pratt, and K. P. Hallinan, 'Thermocapillary Effects on the Wetting Characteristics of a Heated Curved Meniscus,' Journal of Thermophysics and Heat Transfer, vol. 11, no. 4, pp. 519-525, 1997 https://doi.org/10.2514/2.6293
  5. P. Ehrhard and S. H. Davis, 'Non-Isothermal Spreading of Liquid Drops on Horizontal Plates,'­ Journal of Fluid Mechanics, vol. 229, pp. 365-388, 1991 https://doi.org/10.1017/S0022112091003063
  6. L. M. Hocking, 'On Contact Angles in Evaporating Liquids,' Physics of Fluids, vol. 7, no. 12, pp. 2950- 2955, 1995 https://doi.org/10.1063/1.868672
  7. A. K. Sen, and S. H. Davis, 'Steady Thermocapillary Flows in Two-Dimensional Slots,' Journal of Fluid Mechanics, vol. 121, pp. 163-186, 1982 https://doi.org/10.1017/S0022112082001840
  8. D. M. Anderson, and S. H. Davis, 'Local Fluid and Heat Flow Near Contact Lines,' Journal of Fluid Mechanics, vol. 268, pp. 231-265, 1994 https://doi.org/10.1017/S0022112094001333
  9. J. S. Park, C. McCarty, K. D. Kihm, and D. M. Pratt, 'Lagrangian Flow Mapping of Heated Capillary Pore and Thin Film Using Molecular Fluorescence Velocimetry (MFV),' Journal of Heat Transfer, vol. 122, pp. 421-423, 2000 https://doi.org/10.1115/1.1289628
  10. J. S. Park, K. D. Kihm, and D. M. Pratt, 'Molecular Tagging Fluorescence Velocimetry (MTFV) Technique to Measure Micro-Scale Thermal Flow Field,' Proc. IMECE (Orlando), HTD-vol. 366-1, pp. 229-235, November 2000
  11. W. R. Lempert, K. Magee, P. Ronney, K. R. Gee, and R. P. Haugland, 'Flow Tagging Velocimetry in Incompressible Flow Using Photo-Activated Nonintrusive Tracking of Molecular Motion (PHANTOMN),' Experiments in Fluids, vol. 18, pp. 249-257, 1995 https://doi.org/10.1007/BF00195095
  12. R. F. Chen, G. G. Burek, and N. Alexander, 'Fluorescence Decay Times: Proteins, Coenzymes, and Other Compounds in Water,' Nature, vol. 156, pp. 949-951, 1967
  13. J. G Santiago, S. T. Wereley, C. D. Meinhart, D. J. Beebe, and R. J. Adrian, 'A Particle Image Velocimetry System Microfluidics,' Experiments in Fluids, Vol. 25, No. 4, pp. 316-319, 1988
  14. C. D. Meinhart, S. T. Wereley, and J. G. Santiago, 'PIV Measurement of Microchannel Flow,'­ Experiments in Fluids, Vol. 27, No. 5, pp. 414-419, 1999 https://doi.org/10.1007/s003480050366
  15. F. M. White, Fluid Mechanics, fourth edition, Mcgraw-Hill, New York, 1999
  16. W. M. Kays and M. E. Crawford, Third Edition, Mcgraw-Hill International Editions, 1993
  17. B. R. Muson, D. F. Young and T. H. Okiishi, Fundamentals of Fluid Mechanics, John Wiley & Sons, New York, 1998
  18. P. W. Runstadler, Diffuser Data Book, Technical Note 186, Creare, Inc., Hanover, NH, 1975
  19. J. Bardina et al, 'A Prediction Method for Planar Diffuser Flows,' Journal of Fluid Engineering, Vol. 103, pp. 315-321, 1981 https://doi.org/10.1115/1.3241739
  20. J. Coppeta, C. Rogers, 'Dual emission laser induced fluorescence for direct planar scalar behavior measurements,' Experiments in Fluids, vol. 25 pp. 1- 15, 1998 https://doi.org/10.1007/s003480050202
  21. J. Sakakibara, R. J. Adrian, 'Measurement of whole field temperature using two-color LIF,' Journal of Visualization Society of Japan, vol. 17, 333-336, 1997 https://doi.org/10.3154/jvs.17.Supplement1_333
  22. D. L. Andrews, Lasers in chemistry, Springer-Verlag, Berlin, 1986
  23. H. J. Kim, K. D. Kihm, and J. S. Allen, 'Examination of a Ratiometric Laser Induced Fluorescence Thermometry for Microscale Spatial Measurement Resolution,' International Journal of Heat and Mass Transfer, vol. 46, issue 21, pp. 3967-3974, 2003 https://doi.org/10.1016/S0017-9310(03)00243-6
  24. J. R. Salor, 'Photobleaching of Disodium Fluorescein in Water,' Experiments in Fluids, vol. 18, pp. 445-447, 1995 https://doi.org/10.1007/BF00208467

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