• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.672-676
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• 2004

In this paper, measuring system of 5 DOF motion errors are proposed using two capacitive type sensor, a straight edge and a laser interfoerometer. Yawing error and pitching error are measured using the laser interferometer, and rolling error is measured by the reversal method using a capacitive type sensor. Linear motion errors of horizontal and vertical direction are measured using the sequential two point method. In this case, influence of angular motion errors is compensated using the previously measured angular motion errors. In the horizontal direction, measuring accuracy is within 0.05 $\mu$m and 0.27 arcsec, and in the vertical direction, it is within 0.15 $\mu$m and 0.5 arcsec. From these results, it is confirmed that the proposed measureing system is very effective to the measurement of 5 DOF motion errors in the ultra precision feed tables.

• 한국정밀공학회지
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• 제22권11호
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• pp.135-141
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• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

• 한국생산제조학회지
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• 제18권6호
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• pp.576-584
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• 2009

Up to now, it has been said that no satisfactory computer solution has been found for synthesizing four-bar linkage based on the prescribed coupler link curve. In our study, an algorithm has been developed to improve the design synthesis of four bar linkage based on the 5 precision points method. The suggested algorithm generates the desired coupler curve by using NURBS, and then the generated curve approximates as closely as possible to the desired curve representing coupler link trajectory. Also, when comparing each generated curve by constructing the control polygon, rapid comparison is easily achieved by applying convex hull of the control polygon. Finally, an optimization process using ADS is incorporated into the algorithm based on the 5 precision point method to reduce the total optimization process time. As for examples, two four bar linkages were tested and the result well demonstrated the effectiveness of the algorithm.

• 한국정밀공학회지
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• 제16권10호
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• pp.126-131
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• 1999

Up until now, it is said that no satisfactory computer solutions have been found for synthesizing four-bar linkage based on the prescribed coupler link curve. In our study, an algorithm has been developed to improve the design synthesis of four-bar linkage automatically generating prescribed path by using B-spline interpolation. The suggested algorithm generates the desired coupler curve by using B-spline interpolation, and hence the generated curve approximates as closely as to the desired curve representing coupler link trajectory. Also, when comparing each generated polygon with the control polygon, rapid comparison by applying convex hull concept. finally, optimization process using ADS is incorporated into the algorithm based on the 5 precision point method to reduce the total optimization process time. As for examples, three different four-bar linkages were tested and the results showed the effectiveness of the algorithm.

• 한국정밀공학회지
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• 제13권6호
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• pp.161-167
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• 1996

In five-axis milling, optimal CL-data (cutter location data) should be generated to have advantages over three-axis milling in terms of accuracy and efficiency. This paper presents an algorithm for generating collision-free CL-data for five-axis milling using potential energy method. By virtually charging the cutter and part surfaces with static electricity, global collision as wells as local interference is eliminated. Additionally, machining efficiency is improved by minimizing the curvature difference between the part surface and tool swept surface at a CC-point (cutter contact point) simultaneously.

• 한국정밀공학회지
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• 제16권5호통권98호
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• pp.160-168
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• 1999

This paper describes one method of reverse engineering that machines a free form shape without descriptive model. A portable five-axes 3D CMM was used to digitize point data from physical model. After approximation by rational B-spline curve from digitized point data of a geometric shape, a surface was constructed by the skinning method of the cross-sectional design technique. Since a surface patch was segmented by fifteen part, surface merging was also implemented to assure the surface boundary continuity. Finally, composite surface was transferred to commercial CAD/CAM system through IFES translation in order to machine the modeled geometric shape.

• 한국정밀공학회지
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• 제15권5호
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• pp.34-42
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• 1998

This paper describes an analysis of measuring error of on the machine measuring(OMM) system which directly measures machined surface dimensions using scanning probe on a CNC milling machine. 21 inch TV shadow mask mould clamped to a pallet was measured using PTP(point to point) measuring algorithm in OMM system and the results were compared with those using coordinate measuring machine(CMM). The OMM error was evaluated by probe error, stylus contact error, center shift error, repeatability, work-piece clamping error and etc. The results show that elastic deformation of the pallet is most affecting factor on the measuring error, thus pallet design and clamping method need very careful cosiderations.

• 반도체디스플레이기술학회지
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• 제5권4호
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• pp.1-4
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• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• Journal of Mechanical Science and Technology
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• 제20권5호
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• pp.602-611
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• 2006

This paper proposes a locomotion pattern and a control method for biped robots with curved soles. First, since the contact point of a supporting leg may arbitrarily move back and forth on the ground, we derived the desired trajectory from a model called the Moving. Inverted Pendulum Model (MIPM) where the Zero Moment Point (ZMP) exists at the supporting point and can be moved intentionally. Secondly, a biped robot with curved soles is an under-actuated system since the supporting point contacting with a point on the ground has no actuator during the single supporting phase. Therefore, this paper proposes a computed-torque control for this under-actuated system using decoupled dynamic equations. A series of computer simulations with a 7-DOF biped robot with curved soles shows that the proposed walking pattern and control method are effective and allow the biped robot to walk fast and stably, and move more like human beings. Also, it is shown that the curved sole shape has superior energy consumption compared to flat soles, and greater efficiency in ascending and descending the stairs.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.199-204
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• 1994

A method for determining the collision-free tool orientation for 5-axis milling is presented. In 5-axis milling, the proper tool orientation as well as the optimal CC-data has to be selected to machine the workpiece efficiently and accurately and accurately. Essentially, the tool orientation should be determined to avoid collisions between the tool and workpiece and to enable efficient machining. In this work, the tool orientation is determined at every CC-point which is assumed to be given. The procedure uses the potential energy method that assumes the tool and the part surfaces are charged with static electricity. This approach can detect can deteat both global and local collisions (gouging) irrespective of the tool shape. Further, in order to increase the machining efficiency, the material removal rate is maximized simultaneously.