Measurement of Five DOF Motion Errors in the Ultra Precision Feed Tables

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

초정밀 이송테이블의 5 자유도 운동오차 측정