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  • Title/Summary/Keyword: 플라즈마코팅

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Optical and mechanical properties of Diamond-like Carbon film with variation of carbon ratio (탄소비율에 따른 Diamond-like Carbon film의 광학적 및 기계적 특성)

  • Suh, Young-Kyo;Yun, Deok-Yong;Park, Yong-Seob;Cho, Hyung-Jun;Choi, Won-Seok;Hong, Byung-You
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.333-334
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    • 2007
  • Diamond-like carbon (DLC)박막은 높은 경도, 화학적 안정성, 높은 광 투과성을 가지고 있어, 공구강, 광학렌즈 및 플라스틱의 보호 코팅을 위해 응용되어진다. 본 연구에는 DLC 박막은 Silicon을 기반으로 하는 태양전지 반사 반지막으로 응용을 위해, 13.56 MHz RF 플라즈마 화학기상 증착 (RF-PECVD)법을 통해 합성되었다. DLC 합성 시 RF power는 150 W, 메탄 (CH4)가스의 유량은 6%~10% 조절되었다. 합성되어진 DLC 박막의 광학적 특성은 UV spectrometry, Ellipsometry를 사용하여 분석되었고, 경도는 Nano-indenter를 사용하여 측정되었다. 측정 결과 투과도와 굴절률 등의 광학적 특성은 탄소 조성비가 6%정도에서 가장 좋은 결과 값을 얻었으나, 물리적 특성인 경도는 탄소 조성비가 높을수록 증가하는 경향을 보였으며, Si기판과의 접착력은 32N 이상의 높은 값을 나타내었다. 결과로써, DLC 박막은 합성시 적절한 탄소 조성비를 통해 silicon을 기반으로 하는 태양전지 반사방지막으로 응용할 수 있다.

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PECVD를 이용하여 질소분위기에서 증착된 SiNx 박막의 특성 분석

  • Gong, Dae-Yeong;Park, Seung-Man;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.147-147
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    • 2010
  • 태양전지의 효율 향상을 위해 웨이퍼 표면에 반사방지막 코팅을 위한 패시베이션 물질들에 대한 연구가 활발히 진행 되고 있다. 이 과정에서 널리 사용하는 ARC 물질로 SiNx 박막이 있다. SiNx 박막은 PECVD 법으로 저온에서 실리콘 기판 위에 증착 가능한 장점이 있다. 플라즈마 분위기 가스로 아르곤 또는 질소 사용하며 SiNx 박막의 광학적, 전기적인 특성은 화학적 조성비에 의해 결정되며 증착온도 가변에 박막의 특성이 변화하며 이를 이용하여 태양전지의 효율을 향상 시킬 수 있다. 본 연구에서는 SiNx 박막을 형성하는데 질소 가스 분위기에서 PECVD를 이용하여 증착하고 그 특성을 분석하였다. 박막은 0.8 Torr의 압력에서 150C450C의 기판온도로 증착되었으며 이때의 RF power은 100W ~ 300W로 가변 되었다. 증착된 박막은 1.94 에서 2.23의 폭넓은 굴절률 값을 가지고 있었다. SiH4/NH3 가스 비의 증가에 따라 박막 두께와 굴절률이 감소함을 확인할 수 있었다.증착된 SiNx 박막의 소수반송자 수명 측정 결과 굴절률 2.23인 박막의 경우 약 87 us의 수명을 나타냈으며, 굴절률이 1.94로 줄어듦에 따라 소수 반송자 수명 역시 79 us로 감소하였다. SiNx 박막은 n-rich 보다 Si-rich 인 경우 effective 반송자 수명을 증가시켜 표면 재결합 속도를 줄이는데 유용함을 확인하였다. 또한 증착온도가 증가할수록, RF power가 증가 할수록 소수 반송자 수명 역시 증가하였다. 반사도의 경우 SiH4의 비율이 증가할수록 반사도가 감소함을 확인 하였으며, 증착온도 증가에 따라, RF power 증가에 따라 반사도가 감소하였다. 결과적으로 450C의 기판온도와 300W의 RF power에서 증착된 SiNx 박막의 경우 가장 우수한 전기적, 광학적 특성을 보여주었다.

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Structure and Thermal Conductivity of Thermal Barrier Coatings in Lanthanum/Gadolinium Zirconate System Fabricated via Suspension Plasma Spray (서스펜션 플라즈마 용사로 제조된 란타눔/가돌리늄 지르코네이트 열차폐코팅의 구조와 열전도도 특성)

  • Kwon, Chang-Sup;Lee, Sung-Min;Oh, Yoon-Suk;Kim, Hyung-Tae;Jang, Byung-Koog;Kim, Seongwon
    • Journal of Surface Science and Engineering
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    • v.47 no.6
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    • pp.316-322
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    • 2014
  • With increase in demand for higher operating temperatures of gas turbines, extensive research efforts have been carried out to enhance the performance of thermal barrier coatings (TBCs) in the field of coating processing as well as materials. In this study, thermal barrier coatings in lanthanum/gadolinium zirconate system, which is one of the most promising candidates for replacing yttira-stabilized zirconia (YSZ) in thermal barrier coating applications, are fabricated via suspension plasma spray. Dense, 300400μm thick coatings of fluoritephase zirconate with modest amount of segmented microstructures are obtained by using suspension plasma spray with suspensions of planetary-milled mixture between lanthanum and/or gadolinium oxide and nano zirconia. These coatings exhibit thermal conductivities of 1.6 ~ 1.7 W/mK at 1000C, which is relatively lower than that of YSZ.

Anti-Corrosion Properties of TiN-Coated Bolt for Application to Nuclear Power Plants Located Near Coastal Areas (해안에 인접한 원자력발전소에 적용하기 위한 체결볼트의 TiN박막 코팅처리를 한 체결볼트의 방식특성)

  • Lee, Su-Been;Lee, Jin-Woo;Park, Soo-Jeong;Kim, Yun-Hae
    • Journal of Ocean Engineering and Technology
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    • v.30 no.5
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    • pp.356-360
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    • 2016
  • Recently, the lifetime extension of nuclear power plants has been considered. Thus, it is necessary to consider facility safety management and economic management. However, when the bolts in nuclear power plants are replaced and the turbines of nuclear power plant are disassembled, numerous problems are found in relation to stuck bolts in clamping parts. In order to solve these problems, a hybrid vacuum chamber was first designed and manufactured. It can perform arc ion plating and sputtering, which were used to deposit Ti/TiN on an A913 B7 bolt. X-ray diffraction (XRD) and scanning electron microscopy (SEM) analyses were conducted to determine the composition and characteristics of the bolt, and tests were conducted to determine how long the bolt could endure under various conditions in a nuclear power plant. The SEM and XRD results clearly showed a continual and even coating layer. When this TiN-coated bolt is used in a nuclear power plant, the lifetime can be extended compared to a conventional bolt, but it is necessary to determine what additional properties are required.

Influence of Plasma Corrosion Resistance of Y2O3 Coated Parts by Cleaning Process (세정공정에 따른 Y2O3 코팅부품의 내플라즈마성 영향)

  • Kim, Minjoong;Shin, Jae-Soo;Yun, Ju-Young
    • Journal of Surface Science and Engineering
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    • v.54 no.6
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    • pp.365-370
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    • 2021
  • In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y2O3 coated parts used for semiconductor and display plasma process equipment. CF4, O2, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y2O3 was exposed to CF4 plasma, the surface changed from Y2O3 to YF3 and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF3 layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

Hot Corrosion Behavior of Plasma-Sprayed Partially Stabilized Zirconia Coatings in a Lithium Molten Salt (리튬용융염에서 플라즈마 용사된 부분안정화 지르코니아 코팅층의 고온부식 거동)

  • Cho, Soo-Haeng;Hong, Sun-Seok;Kang, Dae-Seong;Park, Byung-Heong;Hur, Jin-Mok;Lee, Han-Soo
    • Korean Journal of Metals and Materials
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    • v.46 no.10
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    • pp.646-651
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    • 2008
  • The electrolytic reduction of spent oxide fuel involves the liberation of oxygen in a molten LiCl electrolyte, which results in a chemically aggressive environment that is too corrosive for typical structural materials. It is essential to choose the optimum material for the process equipment handling molten salt. IN713LC is one of the candidate materials proposed for application in electrolytic reduction process. In this study, yttria-stabilized zirconia (YSZ) top coat was applied to a surface of IN713LC with an aluminized metallic bond coat by an optimized plasma spray process, and were investigated the corrosion behavior at 675C for 216 hours in the molten salt LiClLi2O under an oxidizing atmosphere. The as-coated and tested specimens were examined by OM, SEM/EDS and XRD, respectively. The bare superalloy reveals obvious weight loss, and the corrosion layer formed on the surface of the bare superalloy was spalled due to the rapid scale growth and thermal stress. The top coatings showed a much better hot-corrosion resistance in the presence of LiClLi2O molten salt when compared to those of the uncoated superalloy and the aluminized bond coatings. These coatings have been found to be beneficial for increasing to the hot-corrosion resistance of the structural materials for handling high temperature lithium molten salts.

Location Service Modeling of Distributed GIS for Replication Geospatial Information Object Management (중복 지리정보 객체 관리를 위한 분산 지리정보 시스템의 위치 서비스 모델링)

  • Jeong, Chang-Won;Lee, Won-Jung;Lee, Jae-Wan;Joo, Su-Chong
    • The KIPS Transactions:PartD
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    • v.13D no.7 s.110
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    • pp.985-996
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    • 2006
  • As the internet technologies develop, the geographic information system environment is changing to the web-based service. Since geospatial information of the existing Web-GIS services were developed independently, there is no interoperability to support diverse map formats. In spite of the same geospatial information object it can be used for various proposes that is duplicated in GIS separately. It needs intelligent strategies for optimal replica selection, which is identification of replication geospatial information objects. And for management of replication objects, OMG, GLOBE and GRID computing suggested related frameworks. But these researches are not thorough going enough in case of geospatial information object. This paper presents a model of location service, which is supported for optimal selection among replication and management of replication objects. It is consist of tree main services. The first is binding service which can save names and properties of object defined by users according to service offers and enable clients to search them on the service of offers. The second is location service which can manage location information with contact records. And obtains performance information by the Load Sharing Facility on system independently with contact address. The third is intelligent selection service which can obtain basic/performance information from the binding service/location service and provide both faster access and better performance characteristics by rules as intelligent model based on rough sets. For the validity of location service model, this research presents the processes of location service execution with Graphic User Interface.

Study on the Behavior of Colloidal Hematite: Effects of Ionic Composition and Strength and Natural Organic Matter in Aqueous Environments (교질상 적철석의 거동 특성: 수환경 내 이온 조성 및 세기, 자연 유기물이 미치는 영향)

  • Lee, Woo-Chun;Lee, Sang-Woo;Kim, Soon-Oh
    • Economic and Environmental Geology
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    • v.53 no.4
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    • pp.347-362
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    • 2020
  • Iron (hydro)oxides in aqueous environments are primarily formed due to mining activities, and they are known to be typical colloidal particles disturbing surrounding environments. Among them, hematites are widespread in surface environments, and their behavior is controlled by diverse factors in aqueous environments. This study was conducted to elucidate the effect of environmental factors, such as ionic composition and strength, pH, and natural organic matter (NOM) on the behavior of colloidal hematite particles. In particular, two analytical methods, such as dynamic light scattering (DLS) and single-particle ICP-MS (spICP-MS), were compared to quantify and characterize the behavior of colloidal hematites. According to the variation of ionic composition and strength, the aggregation/dispersion characteristics of the hematite particles were affected as a result of the change in the thickness of the diffuse double layer as well as the total force of electrostatic repulsion and van der Walls attraction. Besides, the more dispersed the particles were, the farther away the aqueous pH was from their point of zero charge (PZC). The results indicate that the electrostatic and steric (structural) stabilization of the particles was enhanced by the functional groups of the natural organic matter, such as carboxyl and phenolic, as the NOM coated the surface of colloidal hematite particles in aqueous environments. Furthermore, such coating effects seemed to increase with decreasing molar mass of NOM. On the contrary, these stabilization (dispersion) effects of NOM were much more diminished by divalent cations such as Ca2+ than monovalent ones (Na+), and it could be attributed to the fact that the former acted as bridges much more strongly between the NOM-coated hematite particles than the latter because of the relatively larger ionic potential of the former. Consequently, it was quantitatively confirmed that the behavior of colloidal hematites in aqueous environments was significantly affected by diverse factors, such as ionic composition and strength, pH, and NOM. Among them, the NOM seemed to be the primary and dominant one controlling the behavior of hematite colloids. Meanwhile, the results of the comparative study on DLS and spICPMS suggest that the analyses combining both methods are likely to improve the effectiveness on the quantitative characterization of colloidal behavior in aqueous environments because they showed different strengths: the main advantage of the DLS method is the speed and ease of the operation, while the outstanding merit of the spICP-MS are to consider the shape of particles and the type of aggregation.

New Drug Delivery System Based on a Laser-Induced Shockwave (레이저 유도 충격파를 이용한 첨단 약물전달시스템 개발)

  • Han, Tae-Hee;Lee, Hyun-Hee;Gojani, Ardian B.;Yoh, Jai-Ick
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.34 no.1
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    • pp.67-71
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    • 2010
  • Impingement of a high power laser pulse (above 1 GW/cm2) on a metal foil causes its ablation, which is characterized by a rapid expulsion of matter and the initiation of a strong shock wave inside the solid metal. The shock propagates through the foil and reverberates on the rear side, causing its deformation and microparticle ejection, which were deposited on the foil prior to ablation. Based on this principle, we are developing a new drug delivery system - Biolistic gun. Current study is focused on the controllability, stability, efficiency of the system, and characterization of the penetration shapes in various conditions. We have tested the system by applying direct and confined ablation. Several different media combinations were used for confinement-BK7 glass, water, BK7 glass with water, and succulent jelly(ultrasono jelly, RHAPAPHRM). Biological tissue was replicated by a 3% gelatin solution. Present data shows that the confinement results in enhancement of penetration shape reached by 5 um cobalt microparticles. Based on the analysis of the experimental results we observe that the penetration shape of microparticles can be controlled by adjusting the thickness of confinement media.

Current Research Trends on Surface Modification of Pressure-driven Membranes for Fouling Mitigation (압력 구동 기반 분리막의 막 오염 저감을 위한 표면 개질 방법 최신 연구 동향)

  • Jun, Byung-Moon;Lee, Hyung Kae;Kim, Woo Jeong;Park, Jihun;Kim, Jong Hyeok;Kwon, Young-Nam
    • Membrane Journal
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    • v.28 no.1
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    • pp.1-20
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    • 2018
  • Fresh water is an important resource for humans, and pressure-driven membrane technology has been widely known as an energy-efficient method to obtain water resource. However, membrane fouling phenomenon, which is one of the major issue during operation, deteriorates membrane permeability. These fouling is usually affected by interaction between surface of membrane and various foulants, therefore, modification of membrane's surface is one of the methods to improve fouling-resistance. This review focuses on the method to modify surface of pressure-driven membranes such as microfiltration (MF), ultrafiltration (UF), nanofiltration (NF), and reverse osmosis (RO). Specifically, there are two different surface modification methods: (1) adsorption and coating as the physical modification methods, (2) cross-linker, free radical polymerization (FRP), atom transfer radical polymerization (ATRP), plasma/UV-induced polymerization as the chemical modification methods. This review introduces the physico - chemical surface modification methods reported in recent papers and suggests research directions for membrane separation which can increase membrane fouling resistance.