• 제목/요약/키워드: 표면 거칠 기

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초음파 테이블을 이용한 단결정 사파이어 웨이퍼의 ELID 연삭가공 특성 연구 (A Study on the ELID Grinding Properties of Single Crystal Sapphire Wafer using Ultrasonic Table)

  • 황진하;곽태수;이득우;정명원;이상민
    • 한국기계가공학회지
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    • 제12권4호
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    • pp.75-80
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    • 2013
  • Single crystal sapphire being used in high technology industry is a brittle material with a high hardness and excellent physical properties. ELID(Electrolytic In-Process Dressing) grinding technology was applied to material removal machining process of single crystal sapphire wafer. Ultrasonic vibration which added to material using ultrasonic table was adopted to efficient ELID grinding of sapphire materials. The evaluation of the ground surface of single crystal sapphire wafer was carried out by means of surface measuring by using AFM(Atomic Force Microscope), surface roughness tester and optical microscope device. As the results of experiment, it was shown that more efficient grinding was conducted when using ultrasonic table. In case of using #170 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was superior to ELID ground specimen without ultrasonic table. However, In case of using #2000 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was inferior to ELID ground specimen without ultrasonic table.

RF 마그네트론 스퍼트링법에 의해 제조된 ATO 박막의 전기적 및 광학적 특성 (The Electrical and Optical Characteristics of ATO Films Prepared by RF Magnetron Sputtering Method)

  • 강성수;이성호;장윤석;박상철
    • 한국안광학회지
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    • 제15권4호
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    • pp.299-305
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    • 2010
  • 목적: 본 연구에서는 투명 전도막으로 사용할 안티몬주석산화물 박막의 특성변수인 RF 전력, T-S간 거리 등의 변화에 따른 박막의 광학적, 전기적, 구조적 특성을 알아보았다. 방법: 안티몬주석산화물 박막을 마그네트론 스퍼트링 방법으로 실온에서 $SnO_2:Sb_2O_5$= 95:5 wt%의 비율로 제작하였다. 결과: 안티몬주석산화물 박막은 RF 입력전력에 가장 민감한 특성변화를 보였는데, 30W의 RF 입력전력에서 광투과율이 78%, 표면거칠기가 0.56 nm, 면저항이 1007 $\Omega{\cdot}cm^{-2}$이었다. 결론: 안티몬주석산화물 박막은 T-S간 거리와 RF 전력에 따라 구조적, 광학적 및 전기적 특성이 크게 달라지는 것을 확인하였다.

전기화학적 방법에 의한 내열강의 열화도측정 제2보 : 열화도측정치에 미치는 측정조건들의 영향과 기계적성질 변화에 대해서 (Degradation Degree Evaluation of Heat Resisting Steel by Electrochemical Technique Part 2 : Effect of Testing Conditions on Evaluation Value of Degradation Degree and Changes of Mechaical Properties)

  • 정희돈;권영각;장래웅
    • 대한기계학회논문집
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    • 제17권2호
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    • pp.300-312
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    • 1993
  • The material deterioration of service-exposed boiler tube steels in fossil power plant was evaluated by using the electrochemical technique namely, modified electrochemical potentiokinetic reactivation(EPR). It was focused that the passivation of Mo$_{6}$C carbide which governs the mechanical properties of Mo alloyed steels did not occur even in the passivity region of steel in sodium molybdate solution and the reactivation peak current (Ip) observed as the result of non-passivation indicating the precipitation of Mo$_{6}$C carbides. To obtain the optimal test conditions for the field test by using the specially designed electrochemical cell, the effects of scan rate, the surface roughness and the pH of electrolyte on Ip value were also investigated. Furthermore, the change of mechanical properties occurred during the long time exposure at high temperature was evlauated quantitatively by small punch(SP) tests and micro hardness test taking account of the metallurgical changes. It is known that reactivation peak current (Ip) has a good relationship with Larson-Miller Parameter(LMP) which represents the information about material deterioration occurred at high temperature environment. In addition it was possible to estimate the ductile-brittle transition temperature (DBTT) by means of the SP test. The Sp test could be, therefore, suggested as a reliable test method for evaluating the material degradation of boiler tube steels. From the good correaltion between the SP DBTT and Ip values shown in this study, it was knows that the change of mechanical properties could be evaluated non-destructively by measurring only Ip values.ues.

BS/Channeling을 이용한 Pt(111)/$Al_2O_3$(0001) 적층 생장 연구 (BS/channeling studies on the epitaxially grown Pt(111) films on $Al_2O_3$(0001))

  • 이종철;김신철;김효배;정광호;김긍호;최원국;송종환
    • 한국진공학회지
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    • 제7권4호
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    • pp.300-305
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    • 1998
  • rf magnetron sputtering 증착법으로 Al2O3(0001)기판위에 적층생장시킨 Pt박막의 결정성 및 이의 구조적 특성을 backscattering spectrometry(BS)/channeling, transmission electron microscopy(TEM)등을 이용해 분석하였다. $MeV^4$He ion channeling 결과, 증착시 기판의 온도가 $600^{\circ}C$, 증착된 Pt층의 두께가 3500$\AA$이었을 때 최소산란수율(channeling minimum yield)이 4%인 결정성이 우수한 Pt박막이 생장되었음을 확인하였으며, 동일한 증 착조건하에서 증착된 Pt층은 $Al_2O_3$(0001)기판위에 6중 대칭구조를 지닌(111)면방향으로 적층 생장되었으며, (111)면방향을 중심으로 대칭적인 원자배열 구조를 갖고 있는 쌍정구조를 형 성하고 있었다. 단면 TEM 분석결과에서도 격자부정합에 의한 strain을 감소시키기 위하여 형성된 쌍정을 관찰할 수 있었으며 strain이 집중되는 쌍정경계면에서 표면거칠기의 증가 또는 관찰되었다.

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Negative ion beam sputter 법으로 증착한 DLC 박막의 특성 (I) (Properties of Diamond-like Carbon(DLC) Thin Films deposited by Negative Ion Beam Sputter (I))

  • 김대연;강계원;최병호
    • 한국재료학회지
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    • 제10권7호
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    • pp.459-463
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    • 2000
  • 순수한 동적 결합반응이고 전하 누적이 없는 이온 임플란테이션, 새로운 재료 개발 등에 음이온을 직접 사용하는 새로운 연구가 진행되고 있으며, 이러한 관점에서 새로운 고체상의 Cs이온 법이 실험실 규모로 연구되고 있다. 본 논문에서는 음이온 Cs gun으로 DLC 박막을 실리콘 위에 제조하였다. 이 시스템은 가스가 필요없으므로, 고 진공에서 증착이 일어난다. C(sup)-빔 에너지는 80~150eV 사이에서 조절이 우수하였다. Raman 분석결과 박막의 DLC 지수, 즉$sp^3$비율은 이온 에너지 증가에 따라 증가하였으며, 미소 경도값 또한 7에서 14GPa로 증가하였다. DLC박막의 표면 평균거칠기(Ra)는 ~1$\AA$정도로 아주 매끈하였으며, 불순물이 내재되지 않는 박막을 얻을 수 있었다.

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Abrasive Film Polishing을 이용한 SUS-304의 표면거칠기·잔류응력 분석 (An analysis on the surface roughness and residual stress of SUS-304 using abrasive film polishing)

  • 신봉철;김병찬;임동욱;민경호
    • Design & Manufacturing
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    • 제12권2호
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    • pp.16-21
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    • 2018
  • Recently, as the demand for high-precision parts increases due to industrial development, a machine tool system for ultra-precision machining and polishing has been actively developed. As a result, there is an increasing demand for ultra-precision surface roughness along with dimensional processing. However, due to the increase in processing time due to the demand for ultra-precise surfaces and enormous facility investment, it is difficult to secure competitiveness. The polishing process using the abrasive film in super precision machining has been applied to machines, electronic devices, aerospace, and medical fields. Super finishing using the abrasive film which is applied in the industrial field recently can achieve high surface roughness in a short time. Super finishing using the abrasive film which is applied in the industrial field recently can achieve high surface roughness in a short time. Also, application of industrial field is increasing due to advantages such as low noise and low dust. Recently, researches on stainless steel having strong resistance to corrosion, heat resistance, heat resistance, toughness and weldability have been actively conducted with respect to the nuclear energy industry or marine development. Therefore, in this study, surface roughness and residual stress were measured after SUS304 polishing using dynamic analysis of film polishing apparatus and polishing film.

폴리아세탈의 입자유동베드 가공에서 회전속도와 공기 유량이 재료제거 특성에 미치는 영향 (Effect of Rotating Speed and Air Flow Rate on Material Removal Characteristics in Abrasive Fluidized Bed Machining of Polyacetal)

  • 장양제;김태경;황현덕;서준영;이다솔;이현섭
    • Tribology and Lubricants
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    • 제33권5호
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    • pp.214-219
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    • 2017
  • Abrasive fluidized bed machining (AFBM) is similar to general abrasive fluidized machining (AFM) in that it can perform polishing of the outer and inner surfaces of a 3-dimensional shape by the flow of particles. However, in the case of AFM, the shear force generated by the flow of the particles causes material removal, while in AFBM, the abrasive particles are suspended in the chamber to form a bed. AFBM can be used for deburring, polishing, edge contouring, shot peening, and cleaning of mechanical parts. Most studies on AFBM are limited to metals, and research on application of AFBM to plastic materials has not been performed yet. Therefore, in this study, we investigate the effect of rotating speed of the specimen and the air flow rate on the material removal characteristics during AFBM of polyacetal with a horizontal AFBM machine. The material removal rate (MRR) increases linearly with increase of the rotating speed of the main shaft because of the shear force between the particles of the fluidized bed and the rotation of the workpiece. The reduction in surface roughness tends to increase as the rotating speed of the main shaft increases. As the air flow rate increases, the MRR tends to decrease. At a flow rate of 70 L/min or more, the MRR remains almost constant. The reduction of the surface roughness of the specimen is found to decrease with increasing air flow rate.

BTA드릴가공의 절삭성능에 관한 연구 (A Study on Cutting Performance of the BTA Drilling)

  • 장성규;김순경;전언찬
    • 한국정밀공학회지
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    • 제15권10호
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    • pp.65-72
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    • 1998
  • The BTA drilling chip is better for deep hole drilling than other self-piloting with pad drilling chips because the large length to diameter ratio allows a unique cutting force dispersion and better supplies the high pressure fluid. Therefore the BTA is useful for many tasks, such as coolant hole drilling of large scale dies, as well as tube seat drilling, which is essential for the heat exchanger, and variable component drilling for automobiles. Deep hole drilling has several significant problems, such as hole deviation, hole over-size, circularity, straightness, and surface roughness. The reasons for these problems, which often result in quality short comings, are an alignment of the BTA drilling system and the unbalance of cutting force by work piece and tool shape. This paper analyzes the properties through an experiment which com¬pared single-edge BTA drills with multiple-edge BTA drills, as well as the shapes of the tools to cause an unbalance of cutting force, and its effect on the precision of the worked hole. Conclusions are as follows. 1) In SMSSC drilling, 60m/min of BTA with single and multi-edged tools proved the best cutting condition and the lowest wear character. 2) The roundness got a little worse as cutting speed was increased, but surface roughness was hot affected. 3) It was proved that the burnishing torque of both drills approached 26%. which is almost the same as the 24% insisted on by Griffiths, and the dispersion characteristic of the multi-edged BTA drill proved better than the single-edge BTA drill.

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곡률 커플링 접촉각에 따른 접촉 강성 및 굽힘 강성해석 (Analysis of Contact Stiffness and Bending Stiffness according to Contact Angle of Curvic Coupling)

  • 유용훈;조용주;이동현;김영철
    • Tribology and Lubricants
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    • 제34권1호
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    • pp.23-32
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    • 2018
  • Coupling is a mechanical component that transmits rotational force by connecting two shafts. Curvic coupling is widely used in high-performance systems because of its excellent power transmission efficiency and easy machining. However, coupling applications change dynamic behavior by reducing the stiffness of an entire system. Contact surface stiffness is an important parameter that determines the dynamic behavior of a system. In addition, the roughness profile of a contact surface is the most important parameter for obtaining contact stiffness. In this study, we theoretically establish the process of contact and bending stiffness analysis by considering the rough surface contact at Curvic coupling. Surface roughness parameters are obtained from Nayak's random process, and the normal contact stiffness of a contact surface is calculated using the Greenwood and Williamson model in the elastic region and the Jackson and Green model in the elastic-plastic region. The shape of the Curvic coupling contact surface is obtained by modeling a machined shape through an actual machining tool. Based on this modeling, we find the maximum number of gear teeth that can be machined according to the contact angle. Curvic coupling stiffness is calculated by considering the contact angle, and the calculation process is divided into stick and slip conditions. Based on this process, we investigate the stiffness characteristics according to the contact angle.

염화제이철 수용액에 의한 스테인레스 강판의 식각에 관한 연구 (Wet Etching of Stainless Steel Foil by Aqueous Ferric Chloride Solution)

  • 이형민;박무룡;박광호;박진호
    • Korean Chemical Engineering Research
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    • 제50권2호
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    • pp.211-216
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    • 2012
  • 염화제이철 수용액에 의한 스테인레스 강판의 식각반응에 관한 연구를 수행하였다. 식각액 교반속도, 식각온도, $Fe^{3+}$ 이온 농도, 식각액의 유리산도 및 비중 등 여러 공정변수가 식각속도에 미치는 영향에 대해 조사하였고, 그 결과, AK(aluminum-killed) 철, 크롬(chlomium) 강, 그리고 스테인레스 강(STS430J1L 합금)의 식각반응이 1차 반응식을 잘 따름을 알 수 있었다. 또한 식각액의 피로도(fatigue ratio)가 16% 이하로 유지되면 식각액 내에 슬러지가 발생하지 않으며, 식각된 강판의 표면거칠기 또한 좋아짐을 알 수 있었다. 본 연구에서 조사한 범위 내에서는, 식각액의 보메(Baume)가 증가하면 식각속도는 감소하나 유리산도가 식각속도에 미치는 영향은 미비함을 알 수 있었다. 한편 본 연구의 실험결과는 공정모델링을 통해 유도된 식각속도식의 계산결과와 잘 일치함을 알 수 있었다.