Browse > Article

The Electrical and Optical Characteristics of ATO Films Prepared by RF Magnetron Sputtering Method  

Kang, Sung Soo (Dept. of Ophthalmic Optics, Daegu Polytechnic College University)
Lee, Sung Ho (Nano Convergence Practical Application Center, Daegu Technopark)
Jang, Yoon Seok (Department of Ophthalmic Optics, Taegu Science College)
Park, Sang Chul (Dept. of Ophthalmic Optics, Busan College of Information Technology)
Publication Information
Journal of Korean Ophthalmic Optics Society / v.15, no.4, 2010 , pp. 299-305 More about this Journal
Abstract
Purposes: The purposes of this study were to investigate the optical, structural and electrical properties of the antimony doped tin oxide(ATO) thin films according to certain variable deposition conditions, such as RF input power and T-S (target-substrate) distance change, using transparent conducting oxide (TCO). Methods: ATO thin films of Sb concentration ratio with $SnO_2:Sb_2O_5$ = 95:5 wt% were deposited at room temperature by RF magnetron sputtering method. Results: ATO thin films were most sensitive to the RF input power: light transmittance was 78% at RF input power of 30W, and 0.56 nm for the surface roughness and 1007 $\Omega{\cdot}cm^{-2}$ for the sheet resistance as well. Conclusions: It was found that ATO thin films were showed the large change in its characteristics of structural, optical and electrical properties which were affected by T-S distance and RF input power.
Keywords
Antimony doped tin oxide (ATO); RF magnetron sputtering; sheet resistance; deposition rate; transmittance; roughness;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 이환수, 이혜용, 윤천, "DC Magnetron Sputtering 법에 의해 ATO 박막 제조시 스퍼터전력 및 산소유랑이 전기적 성질에 미치는 영향" Kor. J. Mat. Res., 9(5):533-537(1999).
2 Kim K. H. and Lee S. W., "Effect of Antimony Addition on Electrical and Optical Properties of Tin Oxide Film", J. Am. Ceram. Soc., 77(4):915-921(1994).   DOI   ScienceOn
3 Chopra K. L., Major S., and Pandya D. K., "Transparent conductors-A status review" Thin Solid Films, 102(1):1-46(1983).   DOI   ScienceOn
4 Fang Y. K. and Lee J. J., "A tin oxide thin film sensor with high ethanol sensitivity" Thin Solid Films, 169(1):51-56(1989).   DOI   ScienceOn
5 Angelis L. D. and Minnaja N., "SenSitivity and selectivity of a thin film tin oxide gas sensor", Sensors and Actuators B, 3(3):197-204(1991).   DOI   ScienceOn
6 Ansari S. G., Gosavi S. W., Gangal S. A., Karekar R. N., and Aiyer R. C., "Characterization of $SnO_{2}$-based $H_{2}$ gas sensors fabricated by different deposition techniques", J. Materials, Sci. Mater. Electron., 8(1):23-27(1997).   DOI
7 Lim Y.-J. and Wu C.-J., ''The Properties of Antimonydoped Tin Oxide Thin Films from Sol-gel Process" Surface and Coatings Technology, 88(1-3):239-247(1997).   DOI
8 Reddy S., Malik A. K., and Jawaleker S. R., "UV absorption studies of undoped and fluorine-doped tin oxide films", Thin Solid Films, 143(2):113-118(1986).   DOI   ScienceOn
9 Wan C. F., McGrath R. D., Keenan W. F., and Frank S. N., "LPCVD of Tin Oxide from Tetramethyltin and Oxygen", J. Electrochem. Soc., 136(5):1459-1463(1989).   DOI   ScienceOn
10 Fraser D. B. and Cook H. D., " Highly Conductive, Transparent Films of Sputtered $In_{2-x}Sn_{x}O_{3-y}$", J. Electrochem. Soc., 119(10):1368-1374(1972).   DOI   ScienceOn
11 Carlson D. E., ''The Deposition of Tin Oxide Films from a D-C Glow Discharge", J. Electrochem. Soc., 122(10):1334-1337(1975).   DOI   ScienceOn
12 Naghavi N., Marcel C., Dupont L., Leriche J-B., and Tarascon J-M., "On the electrochromic properties of antimony-tin oxide thin films deposited by pulsed laser deposition", Solid State lonics, 156(3):463-474(2003).   DOI   ScienceOn
13 Hung Jow-Lay, Pan Yi, Chang Jia Yuan, and Yau Bao-Shun, "Annealing effects on properties of antimony tin oxide thin films deposited by RF reactive magnetron sputtering", Surface and coating Technology, 184(2-3):188-193(2004).   DOI
14 정재인, 양지훈, "마그네트론 스퍼터링에 의한 ITO 코팅 조건도출과 상온 증착", RIST 연구논문, 22(3):222-226(2008).
15 이승훈, 김영도, 김원목, "마그네트론 스퍼터링으로 증착된 ATO 박막으로 보호된 ITO 박막의 열적 안정성", 대한금속.재료학회지, 45(4):251-257(2007).
16 Stjerna B. and Granqvist C. G., "Optical and Electrical Properties of $SnO_{x}$ Thin Films made by Reactive R.F. Magnetron Sputtering", Thin Solid Films, 193-194:704-711(1990).   DOI   ScienceOn
17 Suzuki K. and Mizuhashi M., "Structural, electrical and optical properties of r.f.-magnetron-sputtered $SnO_{2}$:Sb film", Thin Solid Films, 97(2):119-127(1982).   DOI   ScienceOn
18 Lee Jaehyeong, "Effects of oxygen concentration on the properties of sputtered $SnO_{2}$:Sb films deposited at low temperature", Thin Solid Films, 516(7):1386-1390(2008).   DOI   ScienceOn
19 Giraldi T. R., Escote M. T., Maciel A. P., Longo E., Leite E. R., and Varela J. A., ''Transport and sensors properties of nanostructured antimony-doped tin oxide films", Thin Solid Films, 515(4):2678-2685(2006).   DOI   ScienceOn
20 Lee Seung-Yup and Park Byung-Ok, "Structural, electrical and optical characteristics of $SnO_{2}$:Sb thin films by ultrasonic spray pyrolysis", Thin Solid Films, 510(1-2):154-158(2006).   DOI
21 이도영, 정지원, "플레시블 염료 감응형 솔라셀의 효율에 미치는 Indium Zinc Oxide 투명전극의 영향", Korean Chem. Eng Res., 47(1):105-110(2009).
22 윤천, 이혜용, 정윤중, 이경희, "DC Magnetron Sputtering에 의한 ATO 박막의 제조(II) 전기적 특성", J. Kor. Ceram. Soc., 33(5):514-518(1996).
23 윤천, 이혜용, 정윤중, "DC Magnetron Sputtering에 의한 ATO 박막의 제도(I) 증착 특성", J. Kor. Ceram. Soc., 33(4):441-447(1996).
24 Yusta F. J., Michael L. Hitchman, and Shamlian H., "CVD preparation and Characterization of Tin Dioxide Films for Electrochemical Applications", J. Mater. Chem., 7(8):1421-1427(1997).   DOI   ScienceOn
25 Shanthi E., Dutta V., Banerjee A., and Chopra K. L., "Electrical and optical Properties of undoped and Antimony-doped Tin Oxide Films", J. Appl. Phys., 51(12):6243-6251(1980).   DOI   ScienceOn
26 Vincent C. A., "The Nature of Semiconductivity in Polycrystalline Tin Oxide", J. Electrochem. Soc., 119(4):515-518(1972).   DOI   ScienceOn
27 김충완, 김광호, 이환수, 이혜용, "Sputtering 방법에 의해 제조된 Sb가 도핑된 주석산화물 박막의 특성에 관한 연구", 요업학회지, 33(7):735-742(1996).
28 Sung Uk and Byungyou Hong, "Effects of Annealing on the characteristics of ATO films prepared by using the RF magnetron sputtering method for transparent electrodes", J. Kor. Phys. Soc., 55(5):1915-1919(2009).   DOI   ScienceOn
29 Selva Kumar P. S., "Ophthalmic lens", Vision 2020 E-Resource Centre, 2(3):35-39(2002).