A Study on the ELID Grinding Properties of Single Crystal Sapphire Wafer using Ultrasonic Table
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Hwang, JinHa
(Graduate School of Pusan National University, Dept. of Nano Fusion Technology)
Kwak, Tae-Soo (Gyeongnam National Univ. of Sci. and Tech., Dept. of Mechanical Engineering) Lee, Deug-Woo (Pusan National Univ., Dept. of Nanomechatronics Engineering) Jung, Myung-Won (Graduate School of Gyeongnam National Univ. of Sci. and Tech., Dept. of Mechanical Engineering) Lee, Sang-Min (Graduate School of Pusan National University, Dept. of Nano Fusion Technology) |
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