• Korean Chemical Engineering Research
• /
• 제60권2호
• /
• pp.300-307
• /
• 2022

매우 짧은 펄스 폭의 X선 자유전자 레이저(XFEL)를 이용한 시간 분해능 연속 펨토초 결정학(time-resolved serial femtosecond crystallography, TR-SFX)기법에서 반응 물질과 생체분자 결정 샘플간의 혼합률(mixing rate)과 결정 샘플과 X선 레이저 간의 충돌률(hit rate)은 생체분자의 시분해 구조 변화에 대한 정확한 이미지 획득 및 효율적인 샘플소비와 같은 TR-SFX의 분석 성능을 결정짓는 핵심인자이다. 본 연구에서는 극초단 내 일어나는 생체분자의 시분해 구조 변화 해석을 위해 초고속 믹싱 기능을 가짐과 동시에 공압 기반의 주문형 액적 젯팅이 가능한 두 가지 다른 방식의 샘플 전달시스템을 고안하였다. 한 방식은 이중 노즐을 통해 토출된 액적의 고속 충돌에 유발된 관성 믹싱을 기반으로 하고 있으며, 다른 방식은 마이크로믹서가 내장된 공압 젯팅을 기반으로 하고 있다. 먼저, 이중 노즐을 통해 토출된 액적의 충돌에 대한 동적 거동 및 액적 내부 관성 유동에 대한 믹싱에 대한 실험 및 수치해석적 연구를 수행하였다. 다음으로 마이크로믹서가 내장된 공압 젯팅 시스템의 성능을 유사한 방법을 통해 평가하였다. 본 연구에서 개발한 샘플 전달시스템은 질환을 유발하는 특정 단백질들의 기작을 규명하거나, 항체 의약품과 신약 후보 물질 탐색하는 데 있어 필수적인 3차원 생체 분자 구조분석 연구에 매우 유용하게 활용될 수 있을 것이다.

• 폴리머
• /
• 제28권4호
• /
• pp.305-313
• /
• 2004

본 연구는 나노 복화공정을 이용하여 마이크로 혹은 나노공정에 응용이 가능한 형상모형 제작공정 개발과 폴리디메틸실록산 (polydimethylsiloxane)를 이용하여 만들어진 형상모형의 몰드로 나노급 정밀도의 폴리디메틸실록산 형상을 복제하는 공정에 관한 것이다. 본 연구에서 제안한 나노 복화공정은 복잡한 형상모형 (pattern)이나 2차원 형상을 CAD 파일 없이 비트맵 그림파일을 이용하여 직접적으로 200nm 정밀도를 가지는 형상으로 만들 수 있다. 형상모형은 펨토초 레이저를 이용하여 이광자 흡수 중합법으로 제작하기 때문에 형상의 정밀도는 레이저 범의 회절한계 이하로 얻을 수 있다. 이렇게 제작된 마스터 형상모형은 본 연구에서 제안한 진공압력차이법으로 폴리디메틸실록산 몰드를 제작하여 기존의 제작방법에 비하여 정밀한 제작이 가능함을 보였으며 또한 제작된 몰드를 이용하여 양각의 플리디메틸실록산 스탬프를 제작하였다.

• 한국정밀공학회지
• /
• 제21권2호
• /
• pp.210-217
• /
• 2004

In this study, a new process, named as nano replication printing(nRP) process, is developed for printing any figure in the range of several micrometers by using voxel matrix scanning scheme. In this newly developed process, a femto-second laser is scanned on a photosensitive monomer resin in order to induce polymerization of the liquid resin according to a voxel matrix which is transformed from bitmap format file. After the polymerization, a droplet of ethanol is dropt to remove the unnecessary remaining liquid resin and then the polymerized figures with nano-scaled precision are only remaining on the glass plate. By the nRP process, any figure file of bitmap format could be reproduced as nano-scaled precision replication in the range of several micrometers. Also, nano/micro-scaled patterns for an extremely wide range of applications would become a technologically feasible reality. Some of figures with nano-scaled precision were printed in scaled replication as examples to prove the usefulness of this study.

• 대한기계학회논문집A
• /
• 제28권7호
• /
• pp.999-1005
• /
• 2004

A new stamp fabrication technique for the soft lithography has been developed in the range of several microns by means of a nano-replication printing (nRP) process. In the nRP process, a figure or a pattern can be replicated directly from a two-tone bitmap figure with nano-scale details. A photopolymerizable resin was polymerized by the two-photon absorption which was induced by a femtosecond laser. After the polymerization of master patterns, a gold metal layer (about 30 ㎚ thickness) was deposited on the fabricated master patterns for the purpose of preventing a join between the patterns and the PDMS, then the master patterns were transferred in order to fabricate a stamp by using the PDMS (poly-dimethylsiloxane). In the transferring process, a few of gold particles, which were isolated from the master patterns, remained on the PDMS stamp. A gold selective etchant, the potassium iodine (KI) was employed to remove the needless gold particles without any damage to the PDMS stamp. Through this work, the effectiveness of the nRP process with the PDMS molding was evaluated to make the PDMS stamp with the resolution of around 200 ㎚.

• 대한기계학회논문집A
• /
• 제32권9호
• /
• pp.754-760
• /
• 2008

A two-photon induced photoreduction process suggests a possibility for fabricating complicated metallic microstructures which can be applied to 3-D micro-circuits and optical devices, etc. The process employs the photoreduction of silver ions in a metallic solution which is composed of metallic salt ($AgNO_3$) and watersoluble polymer ((poly(4-styrenesulfonique acid) 18wt. % in $H_2O$, $(C_8H_8O_3S)_n$)). In this process, the improvement of the resolution and the uniformity of fabricated metallic structures are important issues. To address these problems, continuous forming window (CFW) is obtained from a parametric study on the conditions of laser power and scanning velocity and the direct seed generation (DSG) method is proposed. Silver nano particles are uniformly generated in a metallic solution through the DSG method, which enables the decrease of a laser power to trigger the photoreduction of silver ions as well as the increase of metal contents in a metallic solution. So the two-photon induced photoreduction property of a metallic solution is improved. Through this work, precise silver patterns are fabricated with a minimum line width of 400 nm.

• 한국정밀공학회지
• /
• 제27권10호
• /
• pp.93-99
• /
• 2010

A nano-stereolithography is the direct patterning process with a nanoscale resolution using twophoton absorption induced by a femtosecond laser. However, in the majority of the works, the fabrication of 3D microstructures have been done only onto transparent glass due to the use of an oil immersion objective lens for achieving a high resolution. In this work, the coaxial illumination and the auto-focusing system are proposed for the direct patterning of nano-precision patterns on an opaque substrate such as a silicon wafer and a metal substrate. Through this work, 3D polymer structures and metallic patterns are fabricated on a silicon wafer using the developed process.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.209-210
• /
• 2006

We have successfully termed brown colored patterns inside of a transparent borosilicate glass generally known as BK7, laying the focus of near infrared Ti: sapphire femtosecond laser beam in the bulk BK7 glass. It is important to keep the laser power well below the damage threshold of BK7 in forming the color center. Thanks to the low laser power, there was no laser induced mechanical damage such as cracks or threads in the color formed area. From the absorbance spectrum and its gaussian fitting, we found the band gap of BK7, 4.21eV, and three absorption edges.

• 한국전기전자재료학회논문지
• /
• 제31권1호
• /
• pp.50-54
• /
• 2018

In this study, a femtosecond laser pre-annealing technology based on indium zinc oxide (IZO) thin-film transistors (TFTs) was investigated. We demonstrated a stable pre-annealing process to analyze the change in the surface structures of thin-films, and we improved the electrical performance. Furthermore, static and dynamic electrical characteristics of IZO TFTs with n-channel inverters were observed. To investigate the static and dynamic responses of our solution-processed IZO TFTs, simple resistor-load-type inverters were fabricated by connecting a $1-M{\Omega}$ resistor. The femtosecond laser pre-annealing process based on IZO TFTs showed good performance: a field-effect mobility of $3.75cm_2/Vs$, an $I_{on}/I_{off}$ ratio of $1.8{\times}10^5$, a threshold voltage of 1.13 V, and a subthreshold swing of 1.21 V/dec. Our IZO-TFT-based N-MOS inverter performed well at operating voltage, and therefore, is a good candidate for advanced logic circuits and display backplane.

• 한국정밀공학회지
• /
• 제21권6호
• /
• pp.153-159
• /
• 2004

In this study, a new process to pattern directly on a thin metal layer using improved nano replication printing (nRP) process is suggested to evaluate the possibilities of fabricating a stamp for nano-imprinting. In the nRP process, any figure can be replicated from a bitmap figure file in the range of several micrometers with nano-scaled details. In the process, liquid-state resins are polymerized by two-photon absorption which is induced by femto-second laser. A thin gold layer was sputtered on a glass plate and then, designed patterns or figures were developed on the gold layer by newly developed top-down building approach. Generally, stamps fur nano-imprinting have been fabricated by using the costly electron-beam lithography process combined with a reactive ion-etching process. Through this study, the effectiveness of the improved nRP process is evaluated to make a stamp with the resolution of around 200nm with reduced cost.

• 한국표면공학회지
• /
• 제57권4호
• /
• pp.306-316
• /
• 2024

We conducted experiments to control the hydrophilic/hydrophobic properties by adjusting line and grid patterns on the surface of medical bone fixation plates using a femtosecond laser. Basic experiments were conducted using pure titanium and titanium alloy (6% alumina, 4% vanadium). The spacing of the line and grid patterns was adjusted, and surface properties were confirmed using contact angle measurement equipment. We demonstrated the feasibility of controlling hydrophilic/hydrophobic properties through the patterns of lines and grids. Based on the results of the basic experiments, surface treatment was applied to medical bone fixation plates currently used in clinical practice. Through laser processing, we confirmed a contact angle of approximately 9.18° for hydrophilicity and approximately 101.07° for hydrophobicity. We confirmed that easy control of hydrophilic/hydrophobic properties is achievable using laser processing technology and anticipate its application in various medical component fields.