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http://dx.doi.org/10.3795/KSME-A.2004.28.7.999

Fabrication of a PDMS (Poly-Dimethylsiloxane) Stamp Using Nano-Replication Printing Process  

Park, Sang-Hu (한국과학기술원 대학원 기계공학과)
Lim, Tae-Woo (한국과학기술원 대학원 기계공학)
Yang, Dong-Yol (한국과학기술원 기계공학과)
Kong, Hong-Jin (한국과학기술원 물리학)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.28, no.7, 2004 , pp. 999-1005 More about this Journal
Abstract
A new stamp fabrication technique for the soft lithography has been developed in the range of several microns by means of a nano-replication printing (nRP) process. In the nRP process, a figure or a pattern can be replicated directly from a two-tone bitmap figure with nano-scale details. A photopolymerizable resin was polymerized by the two-photon absorption which was induced by a femtosecond laser. After the polymerization of master patterns, a gold metal layer (about 30 ㎚ thickness) was deposited on the fabricated master patterns for the purpose of preventing a join between the patterns and the PDMS, then the master patterns were transferred in order to fabricate a stamp by using the PDMS (poly-dimethylsiloxane). In the transferring process, a few of gold particles, which were isolated from the master patterns, remained on the PDMS stamp. A gold selective etchant, the potassium iodine (KI) was employed to remove the needless gold particles without any damage to the PDMS stamp. Through this work, the effectiveness of the nRP process with the PDMS molding was evaluated to make the PDMS stamp with the resolution of around 200 ㎚.
Keywords
Nano-Replication Printing Process(nRP); Two-Photon Polymerization; Stamp; Femtosecond Laser;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
연도 인용수 순위
1 Xia, Y. and Whitesides, G.M., 1998, 'Soft Lithography,' Angew. Chern. Int. Ed, vol.37, pp.550-575   DOI   ScienceOn
2 Loo, Y.L., Lang, D.Y., Rogers, J.A. and Hsu, J.W.P., 2003, 'Electrical Contacts to Molecular Layers by Nanotransfer Printing,' Nano Letters, vol.3, no.7, pp.913-917   DOI   ScienceOn
3 Kim, C.S., Shtein, M. and Forrest, S.R., 2002, 'Nanolithography Based on Patterned Metal Transfer and Its Application to Organic Electronic Devices,' Appl. Phy. Letters, vol.80, no.21, pp.4051-4053   DOI   ScienceOn
4 Schmid, H., Wolf, H., Allenspach, R., Riel, H., Karg, S., Michel, B. and Delamarche, E., 2003, 'Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing,' Adv. Funct. Mater., vol.13, no.2, pp.145-153   DOI   ScienceOn
5 Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W. and Kong, H.J., 2003, 'Development of a Nano Replication Printing(nRP) Process Using a Voxel matrix scanning scheme,' The KSPE Autumn Meeting, pp.424-427   과학기술학회마을
6 Chou,S.Y., Keimel. C. and Gu, J., 2002, 'Ultrafast and Direct Imprint of Nanostructures in Silicon,' Nature, vol.417, no.20, pp.835-837   DOI   ScienceOn
7 Maruo, S. and Kawata, S., 1998, 'Two-Photon-Absorbed near-Infrared Photopolymerization for Three-Dimensional Microfabrication,' J. of Microelectromechanical Systems, vol.7, no.4, pp.411-415   DOI   ScienceOn
8 Sun, H.B., Tanaka, T. and Kawata, S., 2002, 'Three-Dimensional Focal Spots Related to Two-Photon Excitation,' Appl. Physics letters, vol.80, no.20, pp.3673-3675   DOI   ScienceOn
9 Odem, T.W., Love, J.C., Wolfe, D.B., Paul, K.E. and Whitesides, G.M., 2002, 'Improved Pattern Transfer in Soft Lithography Using Composite Stamps,' Langmuir vol.18, pp.5314-5320   DOI   ScienceOn
10 Park, S.H., Lim, T.W., Jeong, C.G., Yang, D.Y., Yi, S.W., Lee, S.K. and Kong, H.J., 'Fundamental Process Development of a Ultramicro-Stereolithography Using a Femto-Second Laser for Manufacturing Nano-Scaled Features,' J. of KSPE, vol.21, no.3, pp.180-187, 2004   과학기술학회마을
11 Sun, H.B., Maeda, M., Takada, K., Chon, J.W.M., Gu, M. and Kawata, S., 2003, 'Experimental Investigation of Single Voxels for Laser Nanofabrication Via Two-Photon Photopolymerization,' Appl. Phys. Letters, vol.83, no.5, pp.819-821   DOI   ScienceOn
12 Yi, S.W., Lee, S.K., Kong, H.J., Yang, D.Y., Park, S.H. and Lim, T.W., 'Three-Dimensional Micro-Fabrication Using Two-Photon Absorption by Femtosecond Laser,' Proceedings of SPIE, vo1.5342, pp.137-145, 2004   DOI
13 Kawata, S., Sun, H.B., Tanaka, T. and Takada, K., 2001, 'Finer Features for Functional Microdevices,' Nature, vol.412, no.16, pp.697-698   DOI   ScienceOn
14 Serbin, J., Egbert, A., Ostendorf, A. and Chichkov, B.N., 2003, 'Femtosecond Laser-Induced Two-Photon Polymerization of Inorganic-Organic Hybrid Materials for Applications in Photonics,' Optics letters, vol.28, no.5, pp.301-303   DOI   ScienceOn