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Directly Nano-precision Feature Patterning on Thin Metal Layer using Top-down Building Approach in nRP Process  

박상후 (한국과학기술원 기계공학과 대학원)
임태우 (한국과학기술원 기계공학과 대학)
양동열 (한국과학기술원 기계공학)
공홍진 (한국과학기술원 물리학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.6, 2004 , pp. 153-159 More about this Journal
Abstract
In this study, a new process to pattern directly on a thin metal layer using improved nano replication printing (nRP) process is suggested to evaluate the possibilities of fabricating a stamp for nano-imprinting. In the nRP process, any figure can be replicated from a bitmap figure file in the range of several micrometers with nano-scaled details. In the process, liquid-state resins are polymerized by two-photon absorption which is induced by femto-second laser. A thin gold layer was sputtered on a glass plate and then, designed patterns or figures were developed on the gold layer by newly developed top-down building approach. Generally, stamps fur nano-imprinting have been fabricated by using the costly electron-beam lithography process combined with a reactive ion-etching process. Through this study, the effectiveness of the improved nRP process is evaluated to make a stamp with the resolution of around 200nm with reduced cost.
Keywords
Femto-second Laser; Two-photon Polymerization; Nano Replication Printing Process; Stamp; Top-down Building;
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Times Cited By KSCI : 1  (Citation Analysis)
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1 Loo, Y.L., Lang, D.V., Rogers, J.A., Hsu, J.W.P., 'Electrical contacts to molecular layers by nanotransfer printing,' Vol.3, No.7, pp.913-917, 2003   DOI   ScienceOn
2 Kim, C.S., Shtein, M., Forrest, S.R., 'Nanolithography based on patterned metal transfer and its application to organic electronic devices,' Appl. Phy. Letters, Vol. 80, No. 21, pp. 4051-4053, 2002   DOI   ScienceOn
3 Odem, T.W., Love,J .C., Wolfe, D.B., Paul, K.E., Whitesides, G.M., 'Improved pattern transfer in soft lithography using composite stamps,' Langmuir, Vol.18, pp. 5314-5320, 2002   DOI   ScienceOn
4 Schmid, H., Wolf, H., Allenspach, R., Riel, H., Karg, S., Michel, B., Delamarche, E., 'Preparation of metallic films on elastomeric stamps and their application for contact processing and contact printing,' Adv. Funct. Mater., Vol.13, No.2, pp.145-153, 2003   DOI   ScienceOn
5 Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W., Kong, H.J., 'Development of a nano replication printing(nRP) process using a voxel matrix scanning scheme,' The KSPE Autumn Meeting, pp. 424-427, 2003
6 Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B.N., 'Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,' Optics letters, Vol.28, No.5, pp.301-303, 2003   DOI   ScienceOn
7 Maruo, S., Kawata, S., 'Two-photon-absorbed mearinfrared photopolymerization for three-dimensional microfabrication,' J. of Microelectromechanical Systems, Vol.7, No.4, pp.411-415, 1998   DOI   ScienceOn
8 Sun, H.B., Tanaka, T., Kawata, S., 'Three-dimensional focal spots related to two-photon excitation,' App. Physics letters, Vol.80, No.20, pp.3673-3675, 2002   DOI   ScienceOn
9 Yi, S.W., Lee, S.K., Kong, H.J., Park, S.H., Jeong, C.G., Lim, T.W., Yang, D.Y., 'Three-dimensional microfabrication with nano resolution using two-photon absorption of femto-second laser,' Optical Society of Korea Summer Meeting, pp.64-65, 2003   과학기술학회마을
10 Chou, S.Y., Keimel, C., Gu, J., 'Ultrafast and direct imprint of nanostructures in silicon,' Nature, Vol.417, No.20, pp.835-837, 2002   DOI   ScienceOn
11 Xia, Y., Whitesides, G.M., 'Soft lithography,' Angew. Chem. Int. Ed., Vol.37, pp.550-575, 1998   DOI   ScienceOn
12 Sun, H.B., Maeda, M., Takada, K., Chon, J.W.M., Gu, M., Kawata, S., 'Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization,' Vol.83, No.5, pp.819-821, 2003   DOI   ScienceOn
13 Kawata, S., Sun, H.B., Tanaka, T., Takada, T., 'Finer features for functional microdevices,' Nature, Vol.412, No.16, pp. 697-698, 2001   DOI   ScienceOn