Browse > Article
http://dx.doi.org/10.3795/KSME-A.2008.32.9.754

Improvement of Metallic Micro-Structure Precision Employing Two-photon Induced Photoreduction Process  

Son, Yong (한국과학기술원 기계항공시스템학부)
Lim, Tae-Woo (한국과학기술원 기계항공시스템학부)
Yang, Dong-Yol (한국과학기술원 기계항공시스템학부)
Prem, Prabhakaran (한남대학교 생명정보신소재공학과)
Lee, Kwang-Sup (한남대학교 생명정보신소재공학과)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.32, no.9, 2008 , pp. 754-760 More about this Journal
Abstract
A two-photon induced photoreduction process suggests a possibility for fabricating complicated metallic microstructures which can be applied to 3-D micro-circuits and optical devices, etc. The process employs the photoreduction of silver ions in a metallic solution which is composed of metallic salt ($AgNO_3$) and watersoluble polymer ((poly(4-styrenesulfonique acid) 18wt. % in $H_2O$, $(C_8H_8O_3S)_n$)). In this process, the improvement of the resolution and the uniformity of fabricated metallic structures are important issues. To address these problems, continuous forming window (CFW) is obtained from a parametric study on the conditions of laser power and scanning velocity and the direct seed generation (DSG) method is proposed. Silver nano particles are uniformly generated in a metallic solution through the DSG method, which enables the decrease of a laser power to trigger the photoreduction of silver ions as well as the increase of metal contents in a metallic solution. So the two-photon induced photoreduction property of a metallic solution is improved. Through this work, precise silver patterns are fabricated with a minimum line width of 400 nm.
Keywords
Two-photon Induced Photoreduction; Femtosecond Laser; Metallic Microstructures;
Citations & Related Records

Times Cited By SCOPUS : 0
연도 인용수 순위
  • Reference
1 Stellacci, F., Bauer, C.A., Friedrichsen, T.M., Wenseleers, W., Alain, V., Kuebler, S.M., Pond, S.J.K., Zhang, Y., Marder, S.R., Perry, J.W., 2002, “Laser and Electron-Beam Induced Growth of Nanoparticles for 2D and 3D Metal Patterning,” Adv. Mater., Vol. 14, No. 3, pp. 194-198   DOI   ScienceOn
2 Genack, A.Z., Garcia, N., 1991, “Observation of Photon Localization in a Three-Dimensional Disordered System,” Phys. Rev. Lett., Vol. 66, No. 16, pp. 2064-2067   DOI   ScienceOn
3 Serbin, J., Egbert, A., Ostendorf, A., and Chichkov, B.N., 2003, “Femtosecond Laser-Induced Two-Photon Polymerization of Inorganic Organic Hybrid Materials for Applications in Photonics,” Opt. Lett., Vol. 28, No. 5, pp. 301-303   DOI   ScienceOn
4 Salkar, R.A., Jeevanandam, P., Aruna, S.T., Koltypin, Y., Gedanken, A., 1999, “The Sonochemical Preparation of Amorphous Silver Nanoparticles,” J. Mater. Chem., Vol. 9, No. 6, pp. 1333-1335   DOI   ScienceOn
5 Yin, Y., Li, Z.Y., Zhong, Z. Gates, B., Xia, Y., Venkateswaran, S., 2002, “Synthesis and Characterization of Stable Aqueous Dispersions of Silver Nanoparticles Through the Tollens Process,” J. Mater. Chem., Vol. 12, No. 3, pp. 522-527   DOI   ScienceOn
6 Kaneko, K., Sun, H.B., Duan, X.M., Kawata, S., 2003, “Two-Photon Photoreduction of Metallic Nanoparticle Gratings in a Polymer Matrix,” Appl. Phys. Lett., Vol.83, No. 7, pp. 1426-1428   DOI   ScienceOn
7 Kawata, S., Sun, H.B., Tanaka , T., and Takada, K., 2001, “Finer Features for Functional Microdevices,” Nature, Vol. 412, No. 16, pp. 697-698   DOI   ScienceOn
8 Yang, D.Y., Park, S.H., Lim, T.W., Kong, H.J., Yi, S.W., Yang, H.K., Lee, K.S., 2007, “Ultraprecise Micro-Reproduction of a Three-Dimensional Artistic Sculpture by Multipath Scanning Method in Two-photon Photopolymerization,” Appl. Phys. Lett., Vol. 90, No. 1, pp. 013113   DOI   ScienceOn
9 Pham, A.T., Kim, D.P., Lim, T.W., Park, S.H., Yang, D.Y., and Lee, K.S., 2006, “Three-Dimensional SiCN Ceramic Microstructures via Nano-Stereolithography of Inorganic Polymer Photoresists,” Adv. Func. Mater. Vol. 16, No. 9, pp. 1235-1241   DOI   ScienceOn
10 Baldacchini, T., Pons, A.C., Pons, J., LaFratta, C., Fourkas, J., Sun, Y., Naughton, M., 2005, “Multiphoton Laser Direct Writing of Two-Dimensional Silver Structures,” Optics Express, Vol. 13, No. 4, pp.1275-1280   DOI
11 Tanaka, T., Ishikawa, A., Kawata, S., 2006, “Two-Photon-Induced Reduction of Metal Ions for Fabricating Three-Dimensional Electrically Conductive Metallic Microstructure,” Appl. Phys. Lett., Vol. 88, No. 8, pp. 081107-1-081107-3   DOI   ScienceOn
12 Ishikawa, A., Tanaka, T., Kawata, S., 2006, “Improvement in the Reduction of Silver Ions in Aqueous Solution Using Two-Photon Sensitive Dye,” Appl. Phys. Lett., Vol. 89, No. 11, pp. 113102-1-113102-3   DOI   ScienceOn
13 Tosa, N., Bosson, J., Pierre, M., Rambaud, C., Bouriau, M., Vitrant, G., Stephan, O., Astilean, S., Baldeck, P.L., 2006, “Optical Properties of Metallic Nanostructures Fabricated by Two-Photon Induced Photoreduction,” Proc. of SPIE, Vol. 6195, pp. 619501-1-619501-8   DOI
14 Vitrant, G., Bosson, J., Tosa, N., Rosenzveig, T., Stephan, O., Astilean, S., Baldeck, P.L., 2007, “Observation of Optical Dispersion Effects in Metallic Nanostructures Fabricated by Laser Illumination of an Organic Polymer Matrix Doped with Metallic Salts,” Proc. of SPIE, Vol. 6470, pp. 647000-1-647000-9
15 Sigalas, M.M., Chan, C.T., Ho, K.M., Soukoulis, C. M., 1995, “Metallic Photonic Band-Gap Materials,” Phys. Rev. B, Vol. 52, No. 16, pp. 11744-11751   DOI   ScienceOn
16 Pendry, J.B., 2000, “Negative Refraction Makes a Perfect Lens,” Phys. Rev. Lett., Vol. 85, No. 18, pp. 3966-3969   DOI   ScienceOn
17 Wu, P.W., Cheng, W., Martini, I.B., Dunn, B., Schwartz, B.J., Yablonovitch, E., 2000, “Two-Photon Photographic Production of Three Dimensional Metallic Structures Within a Dielectric Matrix,” Adv. Mater., Vol. 12, No. 19, pp. 1438-1441   DOI   ScienceOn