• Proceedings of the KIEE Conference
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• 2007.10a
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• pp.223-224
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• 2007

초정밀 위치 제어 시스템에서 미지의 상태변수를 관측하는 경우, 파라미터의 불확실성은 관측기 설계에 많은 어려움을 주게 된다. 슬라이딩 모드 관측기는 불확실성과 외란이 존재하는 시스템의 상태변수를 관측가능하게 하며 강인한 성능을 보여준다. 본 논문에서는 불확실성이 존재하는 시스템의 관측기를 설계하고 최적제어를 통하여 정밀 스테이지의 위치를 제어하며, 시뮬레이션을 통해 개선된 성능을 입증한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.648-651
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• 2003

This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stae are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.989-992
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• 2002

This paper presents a procedure far design, modeling and analysis of a fine positioning stage. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs (the flexure hinges). An experimental design procedure is applied to determine optimum design variables for flexure hinges. The optimum variables are validated through a numerical test. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.147-154
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• 2004

This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.156.2-156.2
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.413-414
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• 2010

• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.585-586
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• 2006

본 논문에서는 MEMS 용량형 변위 센서의 제작과 함께, 미세 변위 측정을 위한 테스트 샘플을 제작하였다. 아래의 그림 1, 2는 각각 스테이지에 장착할 MEMS 용량형 변위 센서 및 미세 변위 측정을 위한 테스트 샘플의 개념도를 보여주고 있다. 테스트 샘플의 감지 부분은 스테이지에 장착할 센서와 정확히 일치를 시켰으며, 미세 변위를 주기 위해서 comb-drive actuator 형태의 운동부를 두었다. 운동부에서는 DC 및 AC 전압을 인가함으로써 미세 변위를 얻을 수 있었으며, 사용된 DC 전압은 20V였으며, 1.4kHz의 AC 전압을 크기를 변화시키며 인가하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.9-10
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• 2008