Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2005.11a
- /
- Pages.156.2-156.2
- /
- 2005
Design and Control of High-precision Decoupled Dual-stage
초정밀 Decoupled 이중 스테이지의 설계 및 제어
-
Choi Young-Man
(KAIST) ;
- Kim Kihyun (KAIST) ;
- Kim Jungiae (KAIST) ;
-
Gweon Dae-Gab
(KAIST) ;
-
Lee Moon G.
;
-
Lee Sukwon
;
- Park Jungwoo ;
- Kim Hyuk
- Published : 2005.11.01