• Transactions of the Korean hydrogen and new energy society
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• v.16 no.2
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• pp.111-121
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• 2005

이 연구는 광화학적 물분해 수소제소 기술의 일환으로 수행 중인 광촉매와 바이오촉매를 복합한 시스템 활용 기술에서 광촉매가 갖는 물리적 특성의 영향을 파악하고자 진행되었다. 다양한 물리적 특성을 갖는 광촉매 얻기 위하여 상용광촉매, 수열화법(HT-TiON), 리고 저온합성법(LT-TiON) 등을 이용하여 샘플을 준비하였다. 가시광 감응을 위하여 암모니아나 triethylamine 처리를 하여 질소를 도핑도 시도하였다. 시도된 복합시스템은 인위적인 전자주개 없이 수소를 발생시키는 결과를 보여주었으나, 광촉매로부터 엔자임으로의 전자전달 부분이 율속단계로 확인되었다. 사용된 광촉매 샘플에 따라 수소발생량에 차이가 나타난 결과로 광촉매의 미세구조 (결정상, 결정도, 기공 크기 및 비표면적 등)이 중요한 역할을 하는 것으로 판단되었다. 얻어진 결과들을 활용하여 재료들이 고정화된 새로운 시스템 구성을 제안하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.384.1-384.1
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• 2014

대면적 그래핀을 합성하는 방법으로 주로 화학기상증작법, SiC 기판을 고온 열처리하는 방법 그리고 최근에는 고체소스를 활용하여 그래핀을 합성하는 방법 등이 보고되고 있다. 이에, 본 연구에서는 폴리머 용액들을 원하는 기판에 스핀코팅하여 건조시킨 후, 후 열처리 공정을 통해 그래핀을 합성하고 물성을 평가해보았다. 그래핀 합성을 위해서 사용된 폴리머 탄소원은 Vinyl계 폴리머 용액으로, polystyrene (PS), polyacrylonitrile (PAN), 그리고 polymethylmetacrylate (PMMA) 등으로 2wt%의 폴리머 용액을 $SiO_2$기판에 스핀 코팅을 하고, 그 위에 Nickel이나 Copper와 같은 catalytic metal을 capping layer로 증착하고, 고진공에서 후열처리 공정에 의해 그래핀을 성장하였다. 이때, 탄소원으로 쓰인 PS, PMMA 폴리머는 pristine graphene 합성을 위해, PAN 폴리머는 질소가 도핑된(n-type) 그래핀 합성을 위해 사용되었다. 그래핀의 물성은 폴리머 종류, 코팅된 두께, 촉매 금속층 종류와 두께, 그리고 후열처리 공정 온도와 시간에 따라서 조절이 가능하였다. 우리는 Raman spectroscopy, AFM, SEM 등을 활용하여 그래핀의 층수, 결함, 표면양상 등을 평가하였고, 또한 전사된 그래핀을 기반으로 제작된 FET의 게이트 전압에 따른 I-V 곡선을 측정하여 캐리어 종류 및 전하 이동도 등을 평가하였다. 더욱 상세한 내용은 프레젠테이션에서 논하겠다.

• Journal of the Korean institute of surface engineering
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• v.41 no.4
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• pp.129-133
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• 2008

Nitrogen and aluminum codoped ZnO(NAZO) thin films were grown on glass substrates with changing the nitrogen flow ratio by radio-frequency magnetron sputtering. The structural, optical, and electrical properties of the NAZO films were investigated. The surface morphologies and the structural properties of the thin films were analyzed by using the X-ray diffraction and scanning electron microscopy. The NAZO thin film, deposited at nitrogen flow ratio of 0%, showed a strongly c-axis preferred orientation and the lowest resistivity of $3.2{\times}10^{-3}{\Omega}cm$. The intensity of ZnO(002) diffraction peak was decreased gradually with increasing the nitrogen flow ratio. The optical properties of the films were measured by UV-VIS spectrophotometer and the optical transmittances for all the samples were found to be an average 90% in the visible range. Based on the transmittance value, the optical bandgap energy for the NAZO thin film deposited at nitrogen flow ratio of 0% was determined to be 3.46 eV. As for the electrical properties, the carrier concentration and the hall mobility were decreased, but the electrical resistivity was increased as the nitrogen flow ratio was increased.

• Journal of Powder Materials
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• v.23 no.6
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• pp.420-425
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• 2016

N-doped carbon nanofibers as catalysts for oxygen-reduction reactions are synthesized using electrospinning and carbonization. Their morphologies, structures, chemical bonding states, and electrochemical performance are characterized. The optimized N-doped carbon nanofibers exhibit graphitization of carbon nanofibers and an increased nitrogen doping as well as a uniform network structure. In particular, the optimized N-doped carbon nanofibers show outstanding catalytic activity for oxygen-reduction reactions, such as a half-wave potential ($E_{1/2}$) of 0.43 V, kinetic limiting current density of $6.2mAcm^{-2}$, electron reduction pathways (n = 3.1), and excellent long-term stability after 2000 cycles, resulting in a lower $E_{1/2}$ potential degradation of 13 mV. The improvement in the electrochemical performance results from the synergistic effect of the graphitization of carbon nanofibers and the increased amount of nitrogen doping.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.6
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• pp.1581-1584
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• 2008

In dual-polycide-gate structure with butting contact, net doping concentration of polysilicon was decreased due to overlap between $n^+$ and $p^+$ and lateral dopant diffusion in silicide/polysilicon layers. The generation of parasitic Schottky diode in butting contact region is attributed both to the $CoSi_2$-loss due to $CoSi_2$ agglomeration and to the decrease in net doping concentration of polysilicon layer. Parasitic Schottky diode reduces noise margin of sense amplifier in DDI DRAM, which causes column fail. The column fail could be reduced by physical isolation of $n^+/p^+$ polysilicon junction or suppressing $CoSi_2$ agglomeration by using nitrogen implantation into $p^+$ polysilicon before $CoSi_2$ formation.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.293.1-293.1
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• 2013

탄소나노튜브(carbon nanotubes; CNTs)는 우수한 물성으로 인하여 전자소자, 에너지 저장매체, 투명전도막, 복합재료 등 매우 다양한 분야에 응용이 가능할 것으로 예측되고 있으며, 더욱이 이러한 특성은 구조변형, 화학적 도핑뿐만 아니라 표면처리를 통해서 제어가 가능하다고 알려져 있다. 이를 위해 기존에는 열처리를 통하여 CNTs를 표면처리한 결과들이 보고되었으나, 고온에서 장시간의 공정이 요구되는 열처리 공정의 단점을 보완하기 위하여 플라즈마 처리를 통해 상온에서 단시간의 공정으로 CNTs를 표면처리하는 방법이 제시되었다. 특히 최근에는, 향후 산업적 응용을 목적으로 종래의 진공 환경에서 벗어나 대기압 연속공정 개발을 위한 대기압 플라즈마 기반의 표면처리 공정에 대하여 관심이 집중되고 있는 상황이다. 본 연구에서는 대기압에서 플라즈마를 안정적으로 방전 및 유지 할 수 있는 플라즈마 토치 시스템을 구축하였고, 이를 이용하여 수직배향 CNTs를 표면 처리함으로써 그 영향을 살펴보았다. CNTs는 $SiO_2$ 웨이퍼 위에 증착한 철 촉매를 이용하여 $750^{\circ}C$에서 수직배향 합성하였으며, 원료가스로는 아세틸렌을 사용하였다. 대기압 플라즈마 장치의 경우 고전압 교류 전원장치를 이용하여 토치타입으로 제작하였다. 플라즈마는 아르곤과 질소가스를 시용하여 방전하고, 기판과의 거리 및 처리시간을 변수로 CNTs를 표면처리하였다. 플라즈마 처리 전후 접촉각 측정을 통하여 소수성이었던 CNTs 표면이 친수성으로 변화하는 것을 확인하였다. 또한 Raman 분석을 통하여 대기압 플라즈마의 처리조건에 따른 CNTs 의 구조적 결함 발생 정도를 정량화 시킬 수 있었다. 이를 통하여 대기압 플라즈마를 이용할 경우, CNTs의 구조적 손상을 최소화 하면서 효율적으로 표면특성을 변화시킬 수 있는 처리조건을 도출하였다.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.348-356
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• 2021

In this study, optical diagnosis of plasma was performed for nitrogen doping in graphene using a horizontal inductively coupled plasma (ICP) system. Graphene was prepared by mechanical exfoliation and the ICP system using nitrogen gas was ignited for plasma-induced and defect-suppressed nitrogen doping. In order to derive the optimum condition for the doping, plasma power, working pressure, and treatment time were changed. Optical emission spectroscopy (OES) was used as plasma diagnosis method. The Boltzmann plot method was adopted to estimate the electron excitation temperature using obtained OES spectra. Ar ion peaks were interpreted as a reference peak. As a result, the change in the concentration of nitrogen active species and electron excitation temperature depending on process parameters were confirmed. Doping characteristics of graphene were quantitatively evaluated by comparison of intensity ratio of graphite (G)-band to 2-D band, peak position, and shape of G-band in Raman profiles. X-ray photoelectron spectroscopy also revealed the nitrogen doping in graphene.

• Korean Journal of Materials Research
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• v.31 no.5
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• pp.264-271
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• 2021

Porous carbons have been widely used as electrode material for supercapacitors. However, commercial porous carbons, such as activated carbons, have low electrochemical performance. Nitrogen-doping is one of the most promising strategies to improve electrochemical performance of porous carbons. In this study, nitrogen self-doped porous carbon (NPC) is prepared from melamine foam by carbonization to improve the supercapacitive performance. The prepared NPC is characterized in terms of the chemical structures and elements, morphology, pore structures, and electrochemical performance. The results of the N₂ physisorption measurement, X-ray diffraction, and Raman analyses reveal that the prepared NPC has bimodal pore structures and pseudo-graphite structures with nitrogen functionality. The NPC-based electrode exhibits a gravimetric capacitance of 153 F g^-1 at 1 A g^-1, a rate capability of 73.2 % at 10 A g^-1, and an outstanding cycling ability of 97.85 % after 10,000 cycles at 10 A g^-1. Thus, the NPC prepared in this study can be applied as electrode material for high-performance supercapacitors.

• Applied Chemistry for Engineering
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• v.20 no.4
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• pp.402-406
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• 2009

$TiO_2$ thin films were surface-modified with atmospheric plasma and their photocatalytic activities were evaluated. The films were deposited on glass plates by dip-coating in a $TiO_2$ sol-gel solution and sintered at various temperatures for various times. Nitrogen plasma was used for the modification and the experiments were carried out varying operational parameters such as discharge power and treatment time. Photocatalytic activity was evaluated based on the degradation efficiency of methylene blue (MB) under irradiation of UV-A and fluorescent light. According to XPS analysis, a little amount of nitrogen was found to be doped in the film surface after the modification. As a result, photocatalytic activity increased under irradiation of UV-A and fluorescent light, especially fluorescent light.

• Korean Chemical Engineering Research
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• v.54 no.6
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• pp.854-862
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• 2016

As the demand for a clean energy to replace fossil fuel being depleted increases, hydrogen energy is considered as a promising candidate for future energy source. Water electrolysis which produces hydrogen has high energy efficiency and stability but still has a large overpotential for oxygen evolution reaction (OER). In this study, $Co_3O_4$ catalysts with different morphology were prepared by spray pyrolysis from solutions which contain Co precursor and various organic additives (urea, sucrose, and citric acid), followed by post heat treatment. For the catalysts synthesized, X-ray diffraction (XRD) measurements were performed to identify their crystal structure. Morphology and surface shape of the catalysts were observed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Surface area and pore volume were examined by nitrogen adsortpion & desorption tests and X-ray photoelectron spectroscopy (XPS) was conducted to confirm nitrogen doping. Linear sweep voltammetry (LSV) was carried out to investigate OER activity of $Co_3O_4$ catalysts. As a result, bare-$Co_3O_4$ which has high surface area and small particle size determined by spray pyrolysis showed high activity toward OER.