• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.423-426
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• 1998

Piezoresistive pressure sensors have fabricated using electrochemical etch-stop technique. Si diaphragm having thickness of n-epi. layer was fabricated and used to detect pressure range from 0 to 1 kg/$\textrm{cm}^2$. Piezoresistors were diffused 3${\times}$10$\^$18/ cm$\^$-3/ and placed at diaphragm edge for maximum pressure detection. The characteristics of electrochemical etch-stop in TMAH/lPA/pyrazine solution were also discussed. I-V curves of n and p-type Si in TMAH/lPA/pyrazine solution were obtained. Etching rate is highest at optimum etching condition, TMAH 25wt.%/IPA 17vo1.%/pyrazine 0.1/100m1, thus the elapsed time of etch-stop was reduced.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1375-1376
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• 2007

A synthesized 21-mer single-stranded DNA(ss DNA) was covalently immobilized onto a self-assembled aminoethanethiol monolayer modified gold electrode onto QCM. The covalently immobilized ssDNA was hybridized with complementary ssDNA. The interaction between surface immobilized ssDNA and complementary 21-mer DNA in solution was also examined. Each step was followed by monitoring changes in the QCM frequency with time. Also, PBS with pH 7.0 was selected as a supporting electrolyte in order to get maximum sensitivity and good bioactivity.

• Journal of Sensor Science and Technology
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• v.21 no.4
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• pp.311-317
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• 2012

Disposable amperometric screen-printed biosensor strips have been fabricated by a sol-gel encapsulation for the analysis of glucose. The glucose oxidase(GOx) is entrapped in the gel matrix through sol-gel transition of tetraethoxysliane(TEOS). The biosensor is fabricated by GOx containing thin film of TEOS gel on the surface of screen-printed carbon electrode(SPCE). The GOx-containing thin film of TEOS gel offers a one-step modification process on the surface of SPCE. The optimum conditions for glucose determination have been characterized with respect to the applied potential, enzyme loading ratio, and pH. The linear range and detection limit of glucose detection were from 2.0 mM to 16.0 mM and 0.25 mM, respectively.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.1
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• pp.24-28
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• 2005

A micromachined biochip with a three dimensional silicon chamber was developed for the construction of biosensors. Anisotropic etching was used fur the formation of the chamber on the p-type silicon wafer(100) and then was glued to the Pyrex glass bottom-substrate with pre-deposited platinum electrode. The electrochemical characterization of its Pt electrode and Ag/AgCl reference electrode was investigated.

• Journal of Sensor Science and Technology
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• v.27 no.1
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• pp.36-39
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• 2018

Transparent olivine $LiNiPO_4$ thin films on sapphire substrates were fabricated by radio frequency (RF) magnetron sputtering. The X-ray diffraction patterns show these thin films have the phase of $LiNiPO_4$ with an ordered olivine structure indexed to the orthorhombic Pmna space group. $LiNiPO_4$ thin films deposited on sapphire substrates exhibit transmittance of about 83 %. It was confirmed that the $LiNiPO_4$ thin film exhibits a high potential of 5 V-class.

• Journal of Sensor Science and Technology
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• v.5 no.4
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• pp.35-40
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• 1996

The polymeric membrane pH sensor based on HDBA(hexyldibenzylamine) or HDPA(hexyldiphenylamine) as hydrogen ion carrier was prepared and electrochemical characterization for the variation of a temperature and membrane thickness were studied on. The sensor based on HDPA was not responded selectively to hydrogen ion. The sensor based on HDBA was responded linearly to hydrogen ion in the range of pH 2 - pH 10, it showed the fast response time of 30 - 50sec. and Nernstian slope of 53.6mV/pH. The interfering effect on alkali and alkaline earth metal ions of pH sensor were lower than glass pH sensor. There was shown a good reproducibility and stability with the precision of 2 - 4mV (${\pm}0.1mV$).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.106-107
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• 2008

과거 PCB 제조 공정의 주된 관심사는 한정된 시간안에 다량의 제품을 생산하기 위한 것에 초점이 맞추어져 있었으나, 최근 중국의 전자산업 시장진출에 따른 PCB 가격 하락 및 원자제 가격 상승으로 인하여 생산 단가를 낮출 수 있는 방법으로 시선을 돌리고 있다. 특히, PCB 제조 공정에서, 생산 가격을 낮출 수 있는 방법중 가장 큰 비중을 차지하고 있는 것은, 습식 에칭 시 사용되는 용액(에칭액)의 사용 양을 제어함으로써, 화학 약품의 구입에 따른 비용 및 사용된 약품을 처리하는 비용을 줄일 수 있는 방법을 찾으려 노력하고 있다. 그러나, 애칭액을 효율적으로 제어하기 위해서는 여러 센서에서 나오는 데이터를 통합하여 진단할 수 있는 시스템이 필요하다. 그러나, 센서에 의한 데이터가 다양함에 제어 알고리듬이 복잡함에 따라 효율적인 제어 시스템이 개발되기 힘들다는 문제점이 있다. 본 논문에서는 이점에 착안하여, 인공지능 알고리듬을 이용한 애칭액 신액 투입조건을 실시간으로 제어 할 수 있는 시스템을 제안한다. 제안된 시스템을 사용하여, 애칭액을 균일하게 유지함에 따라 애칭액의 사용량을 줄일 수 있을 뿐 아니라, 폐액을 일정하게 관리할 수 있음을 확인하였다.

• Journal of Sensor Science and Technology
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• v.7 no.6
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• pp.426-431
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• 1998

This paper describes electrochemical etch-stop characteristics in THAH/IPA/pyrazine solution. I-V curves of n- and p-type Si in THAH/IPA/pyrazine solution were obtained. OCP(Open Circuit Potential) and PP (Passivation Potential) of p-type Si were -1.2 V and 0.1 V, and of n-type Si were -1.3 V and -0.2 V, respectively. Both n- and p-type Si, etching rates were abruptly decreased at potentials anodic to the PP. The etch-stop characteristics in THAH/IPA/pyrazine solution were observed. Since accurate etching stop occurs at pn junction, Si diaphragms having thickness of epi-layer were fabricated. Etching rate is highest at optimum etching condition, TMAH 25wt.%/IPA 17vol.%/pyrazine 0.1g/100ml. thus the elapsed time of etch-stop was reduced.

• Korean Chemical Engineering Research
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• v.62 no.3
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• pp.238-245
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• 2024

The lactate electrode can be utilized either as an electrode for lactate sensor to monitor the patient's health status, stress level, and athlete's fatigue in real time or lactate fuel cell. In this study, we fabricated a high-performance electrode composed of lactate oxidase, catalase, and mitochondria, and investigated the surface analysis and electrochemical properties of this electrode. Carbon paper modified with single-walled carbon nanotubes (CP-SWCNT) had significantly improved electrical conductivity compared to before modification. The electrode to which lactate oxidase, catalase, and mitochondria were attached (CP-SWCNT-LOx-Cat-Mito) produced a higher current than the electrode to which lactate oxidase and catalase were attached. The amount of reduction current produced by the bilirubin oxidase (BOD)-attached electrode (CP-SWCNT-BOD) was greatly affected by the presence or absence of oxygen in the electrolyte. The fuel cell composed of CP-SWCNT-LOx-Cat-Mito (anode) and CP-SWCNT-BOD (cathode) produced maximum power (29 ㎼/cm²) at a discharge current density of 133 ㎂/cm². From this study, we had proved that mitochondria is essential for improving lactate sensor and fuel cell performance.

• Journal of Sensor Science and Technology
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• v.10 no.2
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• pp.125-133
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• 2001

Conducting polymer sensors show high sensitivity when exposed to volatile organic compounds gases at room temperature. The 8 sensor array using by polypyrrole and polyaniline has been fabricated by chemical polymerization for measuring sensing characteristics of VOCs gases. Conducting polymer was polymerized by using distilled pyrrole, aniline as a monomer and ammonium persulfate (APS) as an oxidant and dodecylbenzene sulfonic acid (DBSA) as a dopant. Dedoped film was synthesized by reverse voltage and redoped film was synthesized by using 1-octanesulfonic acid sodium salt as another dopant in electrochemical cell. The sensitivity and reversibility were influenced by doping, dedoping, redoping and thickness for the polypyrrole and polyaniline. We investigated the relation between the structure of conducting polymer and sensitivity of these sensors through the analysis of scanning electron microscope (SEM), scanning probe microscope (SPM) and $\alpha$-step.