• Title/Summary/Keyword: 위상 측정형상 측정법

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The shape measurement of 3D object by using the method of interference pattern projection. (간섭무늬 투영 방식의 3차원 형상 측정)

  • 이연태;강영준;박낙규;황용선;백성훈
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.271-274
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    • 2002
  • The 3-D measurement using interference pattern projection is very attractive because of its high measuring speed and high sensitivity. When a sinusoidal amplitude grating was projected on an object, the surface-height distribution of the object is translated into a phase distribution of the deformed grating image. The patters was generated by a interferometer, and a PZT was used to shift the fringes on the target surface. The phase-acquisition algorithms are so sufficiently simple that high-resolution phase maps using a CCD camera can be generated in a short time. A working system requires a interferometer, a PZT, and a detector array interfaced to a microcomputer. Results of measurements on the diffused test objects are described.

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Measurement of three dimensional object shape by means of the phase-shifting shadow moire (위상이동 그림자 무아레법을 이용한 3차원 물체의 형상측정)

  • 유원재;노경완;강영준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.04a
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    • pp.96-100
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    • 1997
  • The shadow moire is one of the optical techniques which is able to give contour lines of an object with respect to a master grating plane. The moire patterns are issued from the superposition of a master grating and its shadow projected on the surface of an object. In case of the classical shadow moire method, the sensitivity was a few tenths millimeters. generally, it is difficult to use a phase shift method in shadow moire because it is impossible to obtain uniform phase shifts on the whole field. But in this study we use the fact that if the depth of object is much less than the distance between the observer and the master grating, and the object is displaced perpendicularly to the grating plane, phase shifts are almost uniform. Finally we obtained a better resolution by using a phase shift procedure and applied the phase shifting shadow moire to three dimensional shape measurement.

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A Study on the Measurement of 3-D object, make use of grid fringe generator (피치가변격자를 이용한 자유곡선 형상측정에 관한 연구)

  • 박윤창;정경민;박경근;장석준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.11a
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    • pp.19-22
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    • 2000
  • Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and its's high sensitivity. Especially, when projecting a grid pattern over the object the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, new method for grid pattern generation system by polygonal mirror and Laser Diode. This system is applied the projection moire and the PMP.

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A Study on the Calibration of Shape Measurement System Using Digital moire (Digital moire 형상측정 시스템의 보정에 관한 연구)

  • 유원재;김도훈;안재웅;강영준;노형민
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.199-202
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    • 2002
  • Moire topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement by moire topography has been required since the method was frequently applied to the engineering and medical fields. 3-D measurement using digital projection moire topography is very attractive because of its high measuring speed and high sensitivity. In this paper, using different N-bucket algorithm method of digital projection moire topography is tested to measuring object with the 2$\pi$-ambiguity problem. Experimental results prove that the proposed scheme is capable of finding measurement errors that decreased more by using the flour-three step algorithm method than the same step in the phase shifting of different pitchs.

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Improved 3D Shape Measurement Scheme for White Light Phase Shifting Interferometry (백색광 위상천이 간섭계를 위한 개선된 삼차원 형상 측정 방법)

  • Kim, Kyoung-Il;Lee, Dong-Yeol;Ko, Yun-Ho
    • Journal of the Institute of Electronics Engineers of Korea SP
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    • v.47 no.2
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    • pp.51-60
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    • 2010
  • This paper proposes a new scheme to obtain enhanced 3D shape information rapidly for WLPSI(White Light Phase Shifting Interferometry). WLPSI is a convenient method to measure the height of the micro products. First we propose an effective method of limiting search interval for detecting the peak of the visibility function in order to obtain 3D shpae information rapidly. Second we propose an automatic base level decision method basad on image processing and a correction algorithm using the least square approximation method to overcome the global tilt problem of the conventional WLPSI algorithms. Third we propose an adaptive filtering method to remove the distortion known as bat-wing effect which appears near the step discontinuity. Experimental results show that the proposed overall technique is fast and provides more enhanced 3D shape information compared with the conventional WLPSI algorithms.

A Study on the Calibration of Shape Measurement System Using Digital moire (Digital moire 형상측정 시스템의 보정에 관한 연구)

  • 김도훈;유원재;박낙규;강영준
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2003.04a
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    • pp.255-259
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    • 2003
  • Moire topography method isa well-known non-contacting 3-D measurement method as afast non-contact test for three-dimension shape measuring method. Recently, it's important to study the automatic three-dimension measurement by moire topography because it is frequently applied to the reverse engineering , the medical , the entertainment fields. Three-dimension measurement using projection of moire topography is very attractive because of its high measuring speed and high sensitivity. In this paper, the classical moire method is computerized-so called digital moire when a virtual grating pattern is projected on a surface, the captured image by the CCD camera has three-dimension information of the objects. The moire image can be obtained through a simple image processing and a reference grating pattern. and it provides similar results without physical grating pattern. digital projection moire topography turn out to be very effective for the three-dimension measurement of objects. Using different N-bucket algorithm method of digital projection moire topography is tested to measuring object with the 2-ambiguity problem. Experimental results prove that the proposed scheme is capable of finding measurement errors that decreased more by using the four-three step algorithm method instead of the same step in the phase shifting of different pitch.

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Strain Analysis using Fourier Transform Grid Method and Its Image Processing (퓨리에 변환 격자법과 화상 처리를 이용한 스트레인 해석)

  • Yang, In-Hong
    • Journal of the Korean Society for Precision Engineering
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    • v.9 no.3
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    • pp.165-171
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    • 1992
  • 진동하는 구조물을 설계할 때에는 그 구조물 중의 Strain이나 응력이 최대가 되는 장소나 시각을 알 필요가 있다. 지금까지의 Strain 해석에는 Strain gauge 등과 같은 접촉법이 많이 이용되고 있다. 더우기, 접촉법으로 대변형 진동을 하는 물체의 Strain을 해석하는 것은 곤란하다. 최근에는 비접촉법으로 Strain 분포를 해석하기 위해 화상처리를 이용한 계측이 행하여지고 있다. 이들의 Strain 분포를 측정하는 광학적인 방법으로는 격자법, Moire법, 홀로 그랩픽 간섭법 등이 있다. 특히 대변형이나 대Strain을 해석하는 데에는 격자법이 많이 이용되고 있는데, 종래의 격자법은 Data를 처리하는 데에 많은 시간과 노력이 소요되고 작업도 매우 복잡하며, Data의 수도 제한이 되어서 구조물의 분포의 해석 정도에 큰 영향을 미치게 된다. 본 논문 에서는 스테레오법을 이용해서 2차원 격자를 붙인 시료표면의 각 점의 3차원 좌표를 계측하고, 또 Fourier 변환 격자법을 적용하여 촬영된 2차원 격자의 화상에서 위상치를 구한다. 그리고 물체의 변형 전후의 대응 관계의 화상에서 3차원 형상과 Strain 분포를 해석하는 방법을 제안한다. 이 방법을 이용하면 진동하는 구조 물의 3차원 변위분포, Strain 분포를 정도 좋게 해석할 수가 있다.

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3-D Measurement of LED Packages Using Phase Measurement Profilometry (위상측정법을 이용한 LED Package의 3차원 형상 측정)

  • Koo, Ja-Myoung;Cho, Tai-Hoon
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.1
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    • pp.17-22
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    • 2011
  • LEDs(Light Emitting Diodes) are becoming widely used and increasingly in demand. Quality inspection of the LEDs has become more important. Two-dimensional inspection systems are limited in inspection capability, so threedimensional(3-D) inspection systems are needed. In this paper, a cost-effective and simple 3-D measurement system of LED packages using phase measuring profilometry(PMP) is proposed. The proposed system uses a pico projector to project sinusoidal fringe patterns and to shift phases instead of piezocrystal. It was evaluated using extremely accurate gauge blocks, yielding excellent repeatability of about 12 um(3-sigma). 3-D measurements of various LED packages were performed to demonstrate the applicability and efficiency of the proposed system.

A Study on Elecctronic Speckle Contouring for 3-D Shape Measurement (3차원 형상측정을 위한 전자 스페클 등고선 추출법에 관한 연구)

  • 김계성
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1998.03a
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    • pp.239-244
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    • 1998
  • ESP(Electronic Speckle Pattern Interferometry) is an optical technique to measure deforamtion of engineering components and materials in industrial areas. ESPI, a non-contact and non-destructive measuring method, is capable of providing full-field results with high spatial resolution and high speed. One of important application aspects using electronic speckle pattern interferometry is to generate contours of a diffuse object in order to provide data for 3-D shape analysis and topography measurement. The electronic speckle contouring is suitable for providing measurement range from millimeters to several centimeters. In this study, we introduce the contouring method by modified dual-beam speckle pattern interferometer and a shift of the two illumination beams through optical fiber in order to obtain the contour fringe patterns. Before the experiments, we performed the geometric analysis for dual-beam-shifted ESPI contouring. And by this geometric analysis, we performed the electronic speckle contouring experiment. We used 4-frame phase shifting method with PZT for quantitative analysis of contour fringes. Finally, we showed good agreements between the geometric analysis and experimental results.

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