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Improved 3D Shape Measurement Scheme for White Light Phase Shifting Interferometry  

Kim, Kyoung-Il (EO/IR R&D Lab, LIG Nex1)
Lee, Dong-Yeol (Department of Mechatronics Engineering, Chungnam National University)
Ko, Yun-Ho (Department of Mechatronics Engineering, Chungnam National University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SP / v.47, no.2, 2010 , pp. 51-60 More about this Journal
Abstract
This paper proposes a new scheme to obtain enhanced 3D shape information rapidly for WLPSI(White Light Phase Shifting Interferometry). WLPSI is a convenient method to measure the height of the micro products. First we propose an effective method of limiting search interval for detecting the peak of the visibility function in order to obtain 3D shpae information rapidly. Second we propose an automatic base level decision method basad on image processing and a correction algorithm using the least square approximation method to overcome the global tilt problem of the conventional WLPSI algorithms. Third we propose an adaptive filtering method to remove the distortion known as bat-wing effect which appears near the step discontinuity. Experimental results show that the proposed overall technique is fast and provides more enhanced 3D shape information compared with the conventional WLPSI algorithms.
Keywords
WLPSI; Interferometry; peak of the visibility; bat-wing effect;
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