• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.18-18
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• 2008

3차원 패키징 System In Package (SIP)구조에서 Chip to Chip 단위 Interconnection 역할을 하는 Through Silicon Via(TSV)를 형성하기 위하여 Pulsating RF bias가 장착된 Inductively Coupled Plasma Etcher 장비를 이용하였다. 이 Pulsating 플라즈마 공정 방법은 주기적인 펄스($50{\sim}500Hz$)와 듀티($20{\sim}99%$) cycle 조절이 가능하며, 플라즈마 에칭특성에 영향을 주는 플라즈마즈마 발생 On/Off타임을 조절할 수 있다. 예를 들면, 플라즈마 발생 Off일 경우에는 이온(SFx+, O+)과 래디컬(SF*, F*, O*)의 농도 및 활성도를 급격하게 줄이는 효과를 얻을 수가 있는데, 이러한 효과는 식각 에칭시, 이온폭격의 손상을 급격하게 줄일 수 있으며, 실리콘 표면과 래디컬의 화학적 반응을 조절하여 에칭 측벽 식각 보호막 (SiOxFy : Silicon- Oxy- Fluoride)을 형성하는데 영향을 미친다. 그리고, TSV 형성에 있어서 큰 문제점으로 지적되고 있는 언더컷과 수평에칭 (Horizontal etching)을 개선하기 위한 방법으로, Black-Siphenomenon을 이번 실험에 적용하였다. 이 Black-Si phenomenon은 Bare Si샘플을 이용하여, 언더컷(Undercut) 및 수평 에칭 (Horizontal etching)이 최소화 되는 공정 조건을 간편하게 평가 할 수 있는 방법으로써, 에칭 조건 및 비율을 최적화하는 데 효율적이었다. 결과적으로, Pulsating RF bias가 장착된 Inductively Coupled Plasma Etcher 장비를 이용한 에칭실험은 펄스 주파수($50{\sim}500Hz$)와 듀티($20{\sim}99%$) cycle 조절이 가능하여, 이온(SFx+, O+)과 래디컬(SF*, F*, O*)의 농도와 활성화를 조절 하는데 효과적이었으며, Through Silicon Via (TSV)를 형성 하는데 있어서 Black-Si phenomenon 적용은 기존의 Continuous 플라즈마 식각 결과보다 향상된 에칭 조건 및 에칭 프로파일 결과를 얻는데 효과적이었다.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.5
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• pp.40-47
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• 1998

This paper report sthe design, fabrication and characterization of an AlGaAs/GaAs HBT (heterojunction bipolar transistor) with an air-bridge isolation structure which is made to improve high frequency characteristics for the application to the mobile communication system in the next genration. We found that the size, shape and structure of HBT have an effect on the high frequency operation. The measured dc and ac characteristics of the four type HBTs were compared and analyzed. An E-type HBT with an air-bridge structure by undercut etching exhibited .beta.=56, $V_{off-set}$ = 0.3 V, B $V_{CEO}$=7.0V with $f_{T}$=40 GHz and $f_{max}$=45GHz at a collector current density of 7.1*10$^{4}$ A/c $m^{2}$.>.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.4
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• pp.7-14
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• 1998

Noncircular gears have been used for obtaining the modified anglualr velocity ratio between parallel axes. The elliptical gear, which is a kind of noncircular gears, makes use of ellipse as a pitch curve, and is applied for the measurement of the discharge of liquid. The applications of an elliptical gear are more advantageous than any other mechanism as like a crank-slider linkage or a cam mechanism in view of the accuracy and the reliability to transmit the prescribed motion. In this paper, acceding to the theoretical involute tooth profile, two pairs of the elliptical gears were manufactured by using CNC wire electronic discharge machine. The proper ranges of the operating pressure angle and of module not to generate under cutting are studied on the change of the eccentricity, because it is the eccentricity of the pitch curve that determines most of the characteristics of the elliptical gear and then the vibration analysis is executed for the verification of harmonious rotating.

• Transactions of the Korean Society of Automotive Engineers
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• v.12 no.4
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• pp.65-73
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• 2004

Fatigue crack growth from surface defects is one of the most important subjects for the evaluation and the assurance of safety in pressure vessels, piping systems, LPG/LNG fuel tank and other various structures. This paper attempts to analysis some practical or general problems such as the estimation of crack growth life to penetrate the plate thickness, based on fatigue crack growth a single surface flaw and the interaction of multiple flaws. An experiment on the coalescence of multiple undercuts was carried out under cyclic tension condition as a attempt to the analysis of multiple crack problems. It is noted that the fracture strength is characterized by the analogy to that in a single crack growth.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.1
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• pp.91-97
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• 1996

This paper deals with a cold forging design system by which designers can determine desirable plans of cold forging design even if they have little experience. In this system, neural networks are used to transform qualitative knowledges to quantitative knowledges. The neural network is learned with three parts which are most important in cold forging design - undercut, narrow hole, sharp corner. The capabilities of the system are illustrated through an example of forging design.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.21-22
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• 2008

$SF_6/O_2$ 플라즈마 에칭을 통한 반도체 칩의 3차원 집적에 응용되는 through-silicon-via (TSV) 구조형성 연구를 수행하였다. Si via 형상은 $SF_6$, $O_2$의 가스 비율과 에칭이 되는 Silicon 기판의 온도에 의존함을 알수 있었다. 또한 Si via 형상에서 최소의 언더컷 (undercut) 과 측벽에칭 (local bowing) 은 black Si이 나타나는 공정조건에서 나타남을 확인하였다. 더 나아가 저온을 이용한 via 형성시 via 측벽에 형성되는 passivation layer와 mask의 성질이 저온으로 인해 high-aspect-ratio를 갖는 via를 형성할 수 있음을 알 수 있었다.

• Design & Manufacturing
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• v.9 no.1
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• pp.1-4
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• 2015

Recently, the mold industry has been developed to high-quality and high-productivity with various demands of the high-tech industry. Also, geometry parts of injection mold are complex and diverse optimum design through the injection molding analysis has become a matter of course. The mold industry is trying to revitalize the industry with demand technology development and manufacturing process improvement. However, products that have undercut is the need for a separate processing mechanism and structure of the mold is getting more complex, the cost is expensive. Therefore, improving the structure of the mold through a study on the forced ejecting for injection molding without undercut processing unit and to improve the productivity.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.5
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• pp.85-92
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• 1998

This present paper describes a mathematical model of profile shifted elliptical gears, and this model is based on the concepts of envelope theory and conjugate geometry between the blank and the straight-sided rack cutter. The geometric model of the rack cutter includes working regions generating involute curves and fillets for trocoidal curves, and furthermore the addendum modified coeff. is considered for avoiding undercutting. The addendum modified coeff. is changed linearly along with pitch curves and must be the same absolute value at both major semi-axis and minor semi-axis. If undercutting is at all pronounced, the undercut tooth not only are weakened in strength, but lose a small portion of the involute adjacent to the base circle, then this loss of involute may cause a serious reduction in the length of contact. A very effective method of avoiding undercutting is to use the so-called profile shifted gearing. Non-undercutting condition is examined with the change of eccentricity and addendum modified coeff. in elliptical gears and then the minimum number of tooth is proposed not to gernerate undercutting phenomenon.

• Journal of Welding and Joining
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• v.15 no.6
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• pp.57-65
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• 1997

A study was undertaken to determine the influence of welding variables such as shielding and plasma gases, torch standoff, travel speed and heat input, etc. on the quality of plasma arc welds in Zircaloy-4 sheet, 2mm thick. Effect of shielding gases and their flow rates on the mechanical properties of Zircaloy-4 welds by plasma arc welding were determined in terms of tensile, bardness and bend tests. The microstructure and fracture surface of Zircaloy-4 welds were investigated by optical and scanning electron microscopies. In addition, the causes of porosity and undercut in plasma arc welds of Zircaloy-4 were also investigated. Zircaloy-4 weld bead width and depth by helium shielding gas showed a wider and deeper than those by argon. It was found that Zircaloy-4 welds with shielding gas of helium did dxhibit a little smoother and uniform weld beads than those with shielding gas of argon. It was also found that the optimum gas flow rates for Zircaloy-4 welding were 0.45l/min for plasma gas with Ar and 4.5 - 6 l/min for shielding gas with He. In addition, there was no big difference in the microstructure and fracture surface of the weld metals made by either Ar shielding gas or He shielding gas.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.10 s.241
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• pp.1353-1360
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• 2005

Injection-molded products serve a wide range of applications in our modem lives and their significance is ever increasing. However, difficulty of communication among related companies under the present system results in increase of lead time and decrease of production efficiency. The objective of this paper is the development of a web-based draft verification system in mold design processes. Although several commercial CAD systems offer draft verification functions, those systems are very expensive and inadequate to perform collaborative works. For collaborative work under the distributed environment, the proposed system uses native file transforming of CAD data into optimal format by using the ACIS kernel and InterOp. Functions of draft verification modules are constructed over the ActiveX control using the visual C++ and OpenGL. Therefore, collaborators related to the development of a new product are able to verify the draft and undercut over the Internet without commercial CAD systems. The system helps to reduce production cost, errors and lead-time to the market. Performance of the system is confirmed through various case studies.