• 한국정밀공학회지
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• 제22권12호
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• pp.198-204
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• 2005

For precise micro V-grooving, ultrasonic elliptical vibration cutting (UEVC) is proposed using two parallel piezoelectric actuators, which are energized by sinusoidal voltages with a phase difference of 90 degrees. Experimental setup is composed of stacked PZT actuators, a single crystal diamond cutting tool, and a precision motorized xyz stage. It is found that the chip formed in the process of UEVC is discontinuous because of the periodic contacts and non-contacts occurring between the tool and workpiece. It is experimentally observed that the cutting force in the process of UEVC significantly reduces compared to the ordinary non-vibration cutting. In addition, the creation of burr during UEVC is significantly suppressed, which is attributable to the decrease in the specific cutting energy.

• 한국음향학회:학술대회논문집
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• 한국음향학회 2004년도 춘계학술발표대회 논문집 제23권 1호
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• pp.319-322
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• 2004

본 연구에서는 DNA의 상보적인 결합을 이용하여 DNA 혼성화 반응을 감지할 수 있는 SH형 SAW 센서를 개발하였다. 측정에 사용된 DNA는 15개의 염기를 가진 올리고 뉴클레오티드를 사용하였으며 이에 대해 상보적 결합이 가능한 염기서열을 가진 것과 그렇지 않은 미스매치 형태의 DNA 올리고뉴클레오티드를 이용하여 DNA 혼성화 반응 특성을 측정하였다. SH형 SAW 센서는 압전 단결정 $LiTaO_{3}$를 사용하여 100 MHz 발진되는 형태로 제작하였으며, 센서의 지연선 위에 Ti/Au 층을 증착하여 SH기가 수식된 탐침 DNA의 고정화가 가능하게 하였다. 제작된 센서는 Au가 증착된 박막위에 탐침 DNA를 SAM 방법으로 고정화 시켰을 경우와 고정화된 탐침 DNA와 표적 DNA와의 혼성화 반응을 시키고 난 후의 센서의 주파수 변화를 각각 측정하였다. 개발된 DNA 혼성화 반응 측정용 SH형 SAW센서는 DNA 혼성화 특성에 기인한 질량하중 효과에 따른 안정적인 주파수 변화를 나타내었다.

• 한국세라믹학회지
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• 제33권3호
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• pp.362-370
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• 1996

Kalsilite (KAlSiO4) system undergoes a displacive phase transition from hexagonal phase with p63 space group to the phase with P63mc at 886$^{\circ}C$. The flux composition having kalsilite :K2O:B2O3=1:2:2 has enabled the growth of hexagonal kalsilite with the size of 0.5~1 mm at a slow cooling rate (0.3$^{\circ}C$/hr). On decreasing the cooling rate the size has increased and pyramidal (1011) faces are newly developed with the shape of (0001) and (1010) faces. Upon stirring (1011) faces are degraded. The space group of O1 and O2 are P21221 and C2221 respectively. Their orthorombic modification O1 and O2 are synthesized at relatively low and high temperature respectively.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.88-88
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• 2000

AlN는 약 6.2eV 정도의 큰 에너지 밴드폭을 가지고 있어서 S, GaAs에 비해 높은 항복전압과 물리적인 강도를 가지고 있어서 고온 고전력 전자소자로 응용이 되어지며, 또한 압전특성이 우수하기 때문에 SAW 소자에 응용이 되어진다. 또한 최근 광소자 재료로 연구가 되어지고 있는 GaN의 Buffer Layer로도 사용이 되어지고 있다. 본 실험은 Plasma Source를 사용한 PaMBE 장비를 사용하여 Si 기판위에 AlN 박막을 성장시키고자 하였다. AlN 박막을 성장 온도를 변화시켜가며 Si(100) 과 Si(111)기판위에 성장을 수행하였으며 성장온도의 변화에 따른 AlN 박막의 결정성을 살펴보았다. AlN/Si(100)은 XRD와 DCD 분석에 의해 AlN 박막이 (0001) 방향으로 우선배향되었음을 알 수 있었고, AlN/Si(111)은 XRD, DCD 그리고 TEM분석에 의해서 단결정 AlN 박막임을 확인 할 수 있었다.

• 한국기계가공학회지
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• 제12권4호
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• pp.75-80
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• 2013

Single crystal sapphire being used in high technology industry is a brittle material with a high hardness and excellent physical properties. ELID(Electrolytic In-Process Dressing) grinding technology was applied to material removal machining process of single crystal sapphire wafer. Ultrasonic vibration which added to material using ultrasonic table was adopted to efficient ELID grinding of sapphire materials. The evaluation of the ground surface of single crystal sapphire wafer was carried out by means of surface measuring by using AFM(Atomic Force Microscope), surface roughness tester and optical microscope device. As the results of experiment, it was shown that more efficient grinding was conducted when using ultrasonic table. In case of using #170 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was superior to ELID ground specimen without ultrasonic table. However, In case of using #2000 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was inferior to ELID ground specimen without ultrasonic table.

• 한국음향학회지
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• 제23권1호
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• pp.1-7
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• 2004

본 연구에서는 항원-항체 결합반응을 통해 액상의 단백질 분자를 감지할 수 있는 SH형 SAW센서를 개발하였다. 측정하고자 하는 항원으로는 anti-Human-immune-globulin (anti-HigG) 단백질을, 이에 대응하는 항체로는 HigG를 채택하였다. 압전 단결정 LiTaO₃를 사용하여 100 MHz로 발진되는 센서를 제작하고, 센서의 지연선 위에 Ti/Au층을 증착하였다. 증착된 Au층 위에 SAM (self assembled monolayer)을 형성시켜서 추가되는 항원의 농도에 의한 센서의 주파수 변화를 측정하였다. 개발된 센서의 최소검출단위는 노이즈 레벨 400 Hz 이하 값에 10.8 ng/ml/Hz의 민감도를 가지며, anti-HigG 항원의 질량하중 효과에 대해 안정적인 반응을 보였다.

• 한국결정성장학회지
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• 제9권1호
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• pp.74-79
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• 1999

Langasite($La_3Ga_5SiO_14$)는 acoustic 특성에서 quartz, $LiTaO_3$ 와 $LiNbO_3$에 비교되는 새로운 압전재료이다. 본 연구에서는 새로운 Langasite 계열의 물질을 공기 중에서 고상반응법에 의해 합성하였고, 합성공정에서의 주요 확산종 을 조사하였다. 이때 합성된 물질의 소결체를 제조하여 각각의 유전적 성질을 비교평가하였다. 또한, Langasite 단결정 을 자체제작한 Czochralski 시스댐을 사용하여 성장시키는데 성공하였고, 성장된 결정의 물성을 평가하였다

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.85-92
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• 2007

This paper presents a design optimization of a new Advanced Active Blade Twist (AATR-II) blade incorporating single crystal Macro Fiber Composites (MFC) and conducts vibratory loads reduction analysis using an obtained optimal blade configuration. Due to the high actuation performance of the single crystal MFC, the AATR blade may reduce the helicopter vibration more efficiently even with a lower input-voltage as compared with the previous ATR blades. The design optimization provides the optimal cross-sectional configuration to maximize the tip twist actuation when a certain input-voltage is given. In order to maintain the properties of the original ATR blade, various constraints and bounds are considered for the design variables selected. After the design optimization is completed successfully, vibratory load reduction analysis of the optimized AATR-II blade in forward flight condition is conducted. The numerical result shows that the hub vibratory loads are reduced significantly although 20% input-voltage of the original ATR blade is used.

• 한국결정성장학회지
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• 제6권2호
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• pp.155-165
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• 1996

Growth of $LiNbO_3$ single crystal by Czochralski method was carried out to study the piezoelectric effects. Piezoelectric coefficients and elastic compliances of the $LiNbO_3$ single crystal were determined by the resonance method of length-extentional mode of bar resonator from the room temperature up to $100^{\circ}C$. Two dielectric constants of $LiNbO_3$ were also determined by measuring the capacitance of the plate specimen. Measured constants were piezoelectric coefficients $d_{15},d_{22},d_{31},d_{33}$ elastic compliances $s^E_{11},s^E_{33},2s^E_{13}+2s^E_{44},s^E_{14}$ and dielectric constants $K^T_{11},K^T_{33}$. As temperature increased, elastic compliances changed very slowly while piezoelectric coeffiecients and dielectric constant $K^T_{33}$ changed very rapidly. Electromechanical coupling constant of zyw ($45^{\circ}C$)-bar was as high as 0.51 in room temperature and nearly constant up to $1000^{\circ}C$. The increase of piezoelectric coefficients was mainly due to the increase of dielectric permittivity.

• 센서학회지
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• 제29권1호
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• pp.45-50
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• 2020

Magnetoelectric (ME) composites were designed using the PMN-PZT single crystal and Ni foils; the properties and magnetic-field sensitivities of ME composites with different piezoelectric vibration modes (i.e., 31, 32, and 36 modes that depend on the crystal orientation of the single crystal) were compared. In the off-resonance condition, the ME coupling properties of the ME composites with the 32 and 36 piezoelectric vibration modes were better than those of the ME composites with the 31 piezoelectric vibration mode. However, in the resonance condition, the ME coupling properties of the ME composites were almost similar, irrespective of the piezoelectric vibration mode. Additionally, in the off-resonance condition (at 1 kHz), the magnetic-field sensitivity of the ME composites with the 36 piezoelectric vibration mode was up to 2 nT and those of the ME composites with the 31 and 32 piezoelectric vibration modes were up to 5 nT. These magnetic-field sensitivities are similar to those offered by conventional high-sensitivity magnetic-field sensors; the potential of the proposed sensor to replace costly and bulky high-sensitivity magnetic field sensors is significant.