• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.350-350
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• 2012

TCO 물질로 널리 사용되는 ITO 박막은 우수한 특성에도 불구하고 투과도와 전기적 특성 사이에 trade-off 현상이 존재하여 상온에서 증착시 두 가지 특성을 향상시키는데 큰 어려움이 있다 [1]. 본 실험에서는 ITO와 Ag embedded ITO (ITO-Ag) 샘플의 Ag의 증착 시간과 열처리에 따른 전기적 및 광학적 특성 변화를 연구하였다. 열처리 전에는 ITO-Ag 샘플들의 비저항이 ITO 보다 향상 되는 것을 확인 하였다. 하지만 ITO-Ag 샘플의 Ag 증착 시간이 증가 할수록 투과도는 예상한 바와 같이 계속 저하됨을 확인하였다. 열처리 이후에는 Figure 1에서와 같이 ITO와 ITO-Ag 샘플 모두 비저항과 투과도가 향상 되는 것을 알 수 있는데, 비저항의 경우 ITO-Ag 샘플 보다 ITO 샘플이 더욱 큰 향상을 나타내었다. 이러한 결과는 열처리 과정에서 일어나는 ITO의 결정화, 산소공공의 형성 등을 Ag가 방해하기 때문으로 사료된다. 하지만 투과도의 경우 Ag가 금속임에도 불구하고 박막을 형성하지 않을 정도로 매우 얇게 증착 되었기 때문에 열처리 이후 투과도가 향상되어 ITO와 ITO-Ag 샘플 모두 비슷한 향상을 나타내었다고 사료된다. 즉, embedded된 Ag는 열처리에 의해 전기적으로는 나쁜 영향을 주지만, as-deposit 상태에서는 순수 ITO 보다 좋은 전기적 특성을 나타냄을 알 수 있었으며, 이러한 결과는 유기물 반도체 소자에 적용 가능 할 것으로 사료된다.

• Journal of the Korean Ceramic Society
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• v.34 no.8
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• pp.803-810
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• 1997

Ba0.5Sr0.5TiO3 thin films were deposited by RF magnetron sputliring method in order to clarify the anneal condition and doping effect on loakage current Nb and Al were selected as electron donor and acceptor dopants respectively, in the BST films because they have been known to have nearly same ionic radii as Ti and thought to substitute Ti sites to influence the charge carrier and the acceptor state adjacent to the gram boundary. BST thin films prepared in-situ at elevated temperature showed selatively high leakage current density and low breakdown voltage. In order to achieve smooth surface and to improve electrical properties, BST thin films were deposited at room temperature and annealed at elevated temperature. Post-annealed BST thin films showed smoother surface morphology and lower leakage current density than in-situ prepared thin films. The leakage current density of Al doped thin films was measured to be around 10-8A/cm2, which is much lower than those of undoped and Nb doped BST films. The result clearly demonstrates that higher Schottky barrier and lower mobile charge carrier concentration achieved by annealing in the oxygen atmosphere and by Al doping are desirable for reducing leakage current density in BST thin films.

• Journal of the Korean Vacuum Society
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• v.19 no.3
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• pp.206-210
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• 2010

Al-doped ZnO thin films were deposited with various Ar flow rate by RF magnetron sputtering, and theire properties were studied. A high-quality thin film was obtained by controlling the Ar flow rate, and the influence of the Ar flow rate on the Al-doped ZnO thin film was confirmed. In all Al-doped ZnO thin films, light transmittance had above 80%. Through Hall measurement and X-ray photoelectron spectrometer, the sample of 60 sccm, which had the lowest resistivity, showed the lower Al concentration. This result was attributed to oxygen vacancy rather than Al concentration.

• Journal of the Korean Ceramic Society
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• v.39 no.4
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• pp.367-376
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• 2002

Electrical conduction in $SrZr_{1-x}Y_xO_{3-\delta}$((x=0.05, 0.10)-metal electrode system was investigated by impedance spectroscopy and two-probe d.c. conductivity measurement. Electrode conductivity in anodic direction varies with $P_W^{1/2}$( and that in cathodic direction with $P_{O2}^{1/4}$ in oxidizing atmosphere. In hydrogen atmosphere, the addition of water vapor increased the electrode conductivity both in anodic and cathodic direction. Increasing dopant concentration from 5 to 10% showed a more than four times increase in anodic conduction as well as bulk conduction of the solid electrolyte. This observation implies that unfilled oxygen vacancy concentration increases rapidly as the dopant content increases in humid atmosphere. The activation energy of cathodic conduction in Pt and Ag electrode was nearly same below $800^{\circ}C$ which means the rate of cathodic reaction is determined by the reaction in the electrolyte surface rather than on the metal electrodes.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.5 s.248
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• pp.405-412
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• 2006

In order to realize a stably propagating flame in a narrow channel, flame instabilities resulting from flame-wall interaction should be avoided. In particular flame quenching is a significant issue in micro combustion devices; quenching is caused either by excessive heat loss or by active radical adsorptions at the wall. In this paper, the relative significance of thermal and chemical effects on flame quenching is examined by means of quenching distance measurement. Emphasis is placed on the effects of surface defect density on flame quenching. To investigate chemical quenching phenomenon, thermally grown silicon oxide plates with well-defined defect distribution were prepared. ion implantation technique was used to control defect density, i.e. the number of oxygen vacancies. It has been found that when the surface temperature is under $300^{\circ}C$, the quenching distance is decreased on account of reduced heat loss; as the surface temperature is increased over $300^{\circ}C$, however, quenching distance is increased despite reduced heat loss effect. Such abberant behavior is caused by heterogeneous surface reactions between active radicals and surface defects. The higher defect density, the larger quenching distance. This result means that chemical quenching is governed by radical adsorption that can be parameterized by oxygen vacancy density on the surface.

• Journal of IKEEE
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• v.22 no.4
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• pp.1230-1233
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• 2018

$Al_2O_3$ films with the thickness of 50 nm were fabricated on 4H-SiC by aerosol deposition, and their electrical properties were characterized with different post annealing conditions. As a result, the $Al_2O_3$ film annealed in $N_2$ atmosphere showed decreased fixed charge density at the interface area between the $Al_2O_3$ and SiC, and increased leakage currents due to the generation of oxygen vacancies. From this result, it was confirmed that proper $N_2$ and $O_2$ ratio for the post annealing process is important.

• Journal of the Korea Society of Computer and Information
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• v.27 no.3
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• pp.239-249
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• 2022

This study aims to analyze and compare the activating factors of domestic and overseas scuba diving resorts. Our delphi survey was conducted three times in 30 experts who involved in operation and management including scuba diving resort management representative and training team leader. As a result of comparing the activating factors at domestic versus overseas, it was found that common important activating factors included expansion of convenient facilities at public diving places, installation of safety and medical facilities for divers, development of first aid system including AED and oxygen ventilator, requirement of convenient facilities such as water lift and toilet in diving boat, installation of diving boat screw safety system, local boat operation guideline, regular course training program for scuba diving, employment of professional scuba diving instructor and guide, communication and promotion through various SNS portals, promotion by divers' word of mouth, involvement in regional Diving Resort Association, involvement in Korean Diving Association, communication and mutual benefit with local fishing villages, and linkage policy with local tourism industry.

• Journal of the Semiconductor & Display Technology
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• v.22 no.1
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• pp.18-22
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• 2023

We have investigated the effect of the concentration of oxygen vacancies on the characteristics of Mo-doped ZnO (MZO) thin films for the TCO (transparent conducting oxide). For this purpose, MZO thin films were deposited by RF magnetron sputtering at different substrate temperature from room temperature to 300℃. The electrical resistivity of the MZO films decreases with increasing substrate temperature up to 100℃ and then gradually increases at higher temperatures. To investigate the influences of the ambient gases, the flow rate of oxygen and hydrogen in argon was varied from 0.1 sccm to 0.5 sccm. The MZO thin films were preferentially oriented to the (002) direction, regardless of the ambient gases used. The electrical resistivity of the MZO thin films increased with increasing O₂ flow rates, whereas the electrical resistivity decreased sharply under an Ar+H₂ atmosphere and was nearly the same, regardless of the H₂ flow rate used. As the oxygen vacancy concentration increases, the resistivity intended to decrease. In conclusion, Oxygen vacancy affects the MZO thin film's electrical characteristics. All the films showed an average transmittance of over 80% in the visible range.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.3
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• pp.231-240
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• 2024

Titanium dioxide (TiO₂) holds significant scientific and technological relevance as a key photocatalyst and resistive random-access memory, demonstrating unique physicochemical properties and serving as an n-type semiconductor. Understanding the density and arrangement of oxygen vacancies (VOs) is crucial for tailoring TiO₂'s properties to diverse technological needs, driving increased interest in exploring oxygen vacancy complexes and superstructures. In this mini review, we summarize the recent understandings of the fundamental properties of oxygen vacancies in bulk rutile (R-TiO₂) and anatase (A-TiO₂) based on DFT and beyond method. We specifically focus on the excess electrons and their spatial arrangement of disordered single VO in bulk R and A-TiO₂, aligned with the experimental findings. We also highlight the theoretical works on investigating the geometries and stabilities of ordered VOs complexes in bulk TiO₂. This comprehensive review provides insights into the fundamental properties of excess electrons in reduced TiO₂, offering valuable perspectives for future research and technological advancements in TiO₂-based devices.

• Korean Chemical Engineering Research
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• v.59 no.4
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• pp.557-564
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• 2021

Sr_0.92Y_0.08Ti_1-xV_xO_3-δ (SYTV) with perovskite structure was investigated as an alternative anode to utilize H₂S containing fuels in solid oxide fuel cells. To improve the electrochemical performance of Sr_0.92Y_0.08TiO_3-δ (SYT), vanadium(V) was substituted to titanium(Ti) at the B-site of the SYT perovskites. The SYTV synthesized by the Pechini method was chemically compatible with the YSZ electrolyte without additional by-products formation under the cell fabricating conditions. As increasing V substitution amounts, the oxygen vacancies increased, resulting to increasing ionic conductivity of the anode. The cell performance in pure H₂ at 850 ℃ is 19.30 mW/cm² and 34.87 mW/cm² for a 1 mol.% and 7 mol.% of V substituted anodes, respectively. The cell performance using H₂ fuel containing 1000 ppm of H₂S at 850 ℃ was 23.37 mW/cm² and 73.11 mW/cm² for a 1 mol.% and 7 mol.% of V substituted anodes, respectively.