• The Journal of the Acoustical Society of Korea
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• v.30 no.1
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• pp.33-41
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• 2011

To substitute TLS in the hybrid system which is combined with Sagnac interferometer and fiber bragg grating (FBG) it is necessary to investigate how the laser source (TLS and CW) and sensor material variate the response of fiber optic sensor. Two different hollow cylinder type mandrel materials are proposed which are PTFE and PTFE+carbon and 18 m optical fiber is wounded at the mandrel surface. CW laser source experiments had been done in the oil tank which is filled with transformer oil in the 1 kHz~20 kHz frequency range. Also Sagnac interferometer fiber optic sensor is combined with FBG called hybrid system and TLS used as a light source. Based on the experimental results PTFE sensor showed more higher magnitude of detection signal rather than carbon sensor and this result is agreement with the McMahon's theoretical results. Phase variation is inversely proportional to the elastic modulus of the mandrel material. In PTFE fiber sensor, tunable laser source showed more higher performance rather than CW case. Therefore, TLS fiber optic sensor can be applied to the hybrid system which is combined with Sagnac and FBG.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.1
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• pp.53-58
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• 2011

Ultra-precision miniaturized machine tools essential for manufacturing accurate machine components in micro/meso-scale have been developed. To realize high accuracy using mMTs, geometric errors, which are considered as the main sources of inaccuracy should be identified and compensated. The conventional systems for measuring geometric errors, such as a laser interferometer, can measure only one geometric error in a single setup and they involve complicated measurement procedures. A measurement system using PSDs is a promising alternative but the measurable range of such systems is limited to the active range of the PSDs. The proposed measurement system using PSDs can overcome the limit of small measurable range. Further, the mounting errors that could occur during set-up process can be avoided. In this paper, an algorithm corresponding to the system was analyzed and experiments were carried out.

• Korean Journal of Optics and Photonics
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• v.17 no.1
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• pp.54-59
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• 2006

Biophotonic sensors based on polymer waveguide with Bragg reflection grating are demonstrated in this work. Waveguide Bragg reflectors were designed by using the effective index method and the transmission matrix method. The grating pattern was formed by exposing the laser interference pattern on a photoresist. On top of the inverted rib waveguide, the Bragg reflection grating was inscribed by the O2 plasma etching. In order to perform the bio-molecule detection experiment, a calixarene molecule was self-assembled on top of thin Au film deposited on the waveguide Bragg reflector. To measure the response of the sensor, several PBS solutions with different concentrations of potassium ion from 1 pM to $100\;{\mu}M$ were dropped on the sensor surface. The shift of Bragg reflection wavelength was observed from the fabricated sensor device, which was proportional to the concentration of potassium ion ranging from 1 pM to 108 pM.

• Korean Journal of Optics and Photonics
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• v.21 no.1
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• pp.6-11
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• 2010

Fluorescent photopolymer film was prepared with composition containing acrylate monomer, binder, a visible light sensitive photo initiator, and fluorescent anthracene polymer. A fluorescent grating pattern was inscribed on the photopolymer film using a 2-beam coupling method. A 514 nm laser was coupled to generate a beam-interference pattern. A highly fluorescent diffractive line pattern was formed on the fluorescent photopolymer within 30 sec. of exposure. The fluorescence intensity was highly enhanced in the patterned area, possibly due to the change in the environment of the fluorescent polymers by the photo-polymerization of monomers. Under a photo-mask, a gap electrode pattern was formed of fluorescent gratings with a sub-micron scale, which was matched well to the calculated value ($2.5\;{\mu}m$ and $0.6\;{\mu}m$) based on the refractive index of the photopolymer and beam incident angle ($3.4^{\circ}$, $15^{\circ}$) to the photopolymer surface.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.6
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• pp.483-489
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• 2017

An ultrasonic technique was developed to characterize the resonance behavior of a microcantilever operating in a megahertz regime. A high-power ultrasonic pulser and a contact transducer were employed to excite the silicon microcantilever, and a Michelson interferometer was used to obtain the time domain waveform. The natural frequency of the microcantilever was evaluated through the fast Fourier transform of the signal, and a numerical analysis using the finite element method confirmed the measurement data. The present study proposes a novel and facile method to evaluate nanoscale materials and structures with high sensitivity compared to conventional approaches.

• Journal of The Institute of Information and Telecommunication Facilities Engineering
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• v.3 no.2
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• pp.51-60
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• 2004

In this paper, 8-channel multiplexer with 100GHz channel spacing is fabricated. The 8-channel multiplexer is fabricated by connecting three cascaded Mach Zehnder Interferometer (MZI) of optical fiber type, and each interferometer has the wavelength interval of 100GHz, 200GHz and 400GHz, respectively. furthermore, to acquire uniform insertion loss, it is fabricated by using Wavelength Flatten Coupler (WFC) in which the variation of insertion loss is low. Especially, the variation of wavelength interval in the output is explicitly simulated as a function of optical path difference, and the wavelength coupling process along with cascaded connection is discussed. $CO_2$ laser to adjust precisely the wavelength. In summary, The prototype composed by eight cascaded MZI has an insertion loss of 2.1dB, the bandwidth of 0.8nm at 5.5dB point, and channel crosstalk of 25dB Furthermore, the loss dependent on polarization is measured as 0.06dB.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.11
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• pp.75-82
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• 2004

A metrological atomic force microscope (M-AFM) was developed fur the length measurements of nanometer range, through the modification of a commercial AFM. To eliminate nonlinearity and crosstalk of the PZT tube scanner of the commercial AFM, a two-axis flexure hinge scanner employing built-in capacitive sensors is used for X-Y motion instead of PZT tube scanner. Then two-dimensional displacement of the scanner is measured using two-axis heterodyne laser interferometer to ensure the meter-traceability. Through the measurements of several specimens, we could verify the elimination of nonlinearity and crosstalk. The uncertainty of length measurements was estimated according to the Guide to the Expression of Uncertainty in Measurement. Among several sources of uncertainty, the primary one is the drift of laser interferometer output, which occurs mainly from the variation of refractive index of air and the thermal stability. The Abbe error, which is proportional to the measured length, is another primary uncertainty source coming from the parasitic motion of the scanner. The expanded uncertainty (k =2) of length measurements using the M-AFM is √(4.26)$^2$+(2.84${\times}$10$^{-4}$ ${\times}$L)$^2$(nm), where f is the measured length in nm. We also measured the pitch of one-dimensional grating and compared the results with those obtained by optical diffractometry. The relative difference between these results is less than 0.01 %.

• The Journal of the Acoustical Society of Korea
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• v.33 no.1
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• pp.31-39
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• 2014

In this paper, two calibration methods for angular vibration pickups using a precision rotary encoder are proposed. The KRISS (Korea Research Institute of Standards and Science) primary angular vibration calibration system and the calibration procedures are briefly explained. The rotary encoder is shown to be calibrated in two methods: The one is to use the laser interferometer to calibrate the rotary encoder under test and the other is to exploit the certificate of the encoder supplied. Complex sensitivities measured from the first are shown to be less than 0.1 % difference in magnitude and $0.01^{\circ}$ difference in phase shift in reference to those of the primary calibration system. Their expanded uncertainties were observed to be less than 0.6 % in magnitude and $0.4^{\circ}$ in phase shift over the range of 0.4 to 200 Hz. Under the same calibration conditions, complex sensitivities evaluated by the second method are shown be 0.1 % difference in magnitude and $0.6^{\circ}$ difference in phase shift in reference to those of the primary calibration system. Their expanded uncertainties were seen to be less than 4.8 % in magnitude and $2.8^{\circ}$ in phase shift.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.30 no.8A
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• pp.697-704
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• 2005

In this paper, Passive Temperature Compensation Technology is apply to 8-channel Optical multiplexer with 1000Hz channel spacing. The 8-channel multiplexer is fabricated by connecting three cascaded Mach Zehnder Interferometer(MZI) of optical fiber type, and each interferometer has the wavelength interval of 100GHz, 2000Hz and 4000Hz, respectively. Furthermore, to acquire uniform insertion loss, it is fabricated by using Wavelength Flatten Coupler(WFC) in which the variation of insertion loss is low. $CO_2$ laser to adjust precisely the wavelength. The optical fiber is very sensitive in the thermal variation around. Thus, When fabrication the prototype, it is applied a technique to compensate the optical thermal effect because the center wavelength at the output is shifted according to the thermal variation around. In summary, The prototype composed by eight cascaded MZI has an insertion loss of 5.5 dB, the bandwidth of 0.8nm at 0.5 dB point, and channel crosstalk of 25 dB. Furthermore, the loss dependent on polarization is measured as 0.06dB. Consequently, the output wavelength is shifted within 0.05 m when the surrounding temperature varies until $60^{\circ}C$