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http://dx.doi.org/10.3795/KSME-A.2017.41.6.483

Ultrasonic Characterization of a Resonating High-Speed Microcantilever  

Kim, Yun Young (Division of Mechanical, Automotive, and Robot Component Engineering, Dong-eui Univ.)
Lee, Seonwook (School of Mechanical Engineering, Pusan Nat'l Univ.)
Park, Jiwon (School of Mechanical Engineering, Pusan Nat'l Univ.)
Cho, Younho (School of Mechanical Engineering, Pusan Nat'l Univ.)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.41, no.6, 2017 , pp. 483-489 More about this Journal
Abstract
An ultrasonic technique was developed to characterize the resonance behavior of a microcantilever operating in a megahertz regime. A high-power ultrasonic pulser and a contact transducer were employed to excite the silicon microcantilever, and a Michelson interferometer was used to obtain the time domain waveform. The natural frequency of the microcantilever was evaluated through the fast Fourier transform of the signal, and a numerical analysis using the finite element method confirmed the measurement data. The present study proposes a novel and facile method to evaluate nanoscale materials and structures with high sensitivity compared to conventional approaches.
Keywords
Microcantilever; Natural Frequency; Ultrasonic Technique; Microscale Characterization;
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