Ultrasonic Characterization of a Resonating High-Speed Microcantilever |
Kim, Yun Young
(Division of Mechanical, Automotive, and Robot Component Engineering, Dong-eui Univ.)
Lee, Seonwook (School of Mechanical Engineering, Pusan Nat'l Univ.) Park, Jiwon (School of Mechanical Engineering, Pusan Nat'l Univ.) Cho, Younho (School of Mechanical Engineering, Pusan Nat'l Univ.) |
1 | Waggoner, P. S. and Craighead, H. G., 2007, "Micro- and Nanomechanical Sensors for Environmental, Chemical, and Biological Detection," Lab on a chip, Vol. 7, No. 10, pp. 1238-1255. DOI |
2 | Kim, H. J. and Seo, Y. H., 2015, "Biosensing Platforms Based on Micro and Nanoscale Structures," Polymer Science and Technology, Vol. 26, No. 2, pp. 126-139. |
3 | Faegh, S., Jalili, N. and Sridhar, S., 2013, "A Self-Sensing Piezoelectric MicroCantilever Biosensor for Detection of Ultrasmall Absorbed Masses: Theory and Experiments," Sensors, Vol. 13, No. 5, pp. 6089-6108. DOI |
4 | Chou, S. S., Kim, Y. Y., Srivastana, A., Murphy, B., Balogun, O., Tark, S. -H., Shekhawat, G. and Dravid, V. P., 2009, "Microcantilever Array with Embedded Metal Oxide Semiconductor Field Effect Transistor Actuators for Deflection Control, Deflection Sensing, and High Frequency Oscillation," Applied Physics Letters, Vol. 94, No. 22, p. 224103. DOI |
5 | Ghatkesar, M. K., Barwich, V., Braun, T., Ramseyer, J. -P., Gerber, C., Hegner, M., Lang, H. P., Drechsler, U. and Despont, M., 2007, "Higher Modes of Vibration Increase Mass Sensitivity in Nanomechanical Microcantilevers," Nanotechnology, Vol. 18, No. 44, p. 445502. DOI |
6 | Burg, T. P., Mirza, A. R., Milovic, N., Tsai, C. H., Popescu, G. A., Foster, J. S. and Manalis, S. R., 2006, "Vacuum-packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection," Journal of Microelectromechanical Systems, Vol. 15, No. 6, pp. 1466-1476. DOI |