Development of a Metrological Atomic Force Microscope for the Length Measurements of Nanometer Range |
김종안
(한국표준과학연구원 광기술표준부 길이그룹)
김재완 (한국표준과학연구원 광기술표준부 길이그룹) 박병천 (한국표준과학연구원 광기술표준부 길이그룹) 엄태봉 (한국표준과학연구원 광기술표준부 길이그룹) 홍재완 (시엔아이) |
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