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http://dx.doi.org/10.5762/KAIS.2020.21.11.554

Ripple Compensation of Air Bearing Stage upon Gantry Control of Yaw motion  

Ahn, Dahoon (Division of Mechanical and Automotive Engineering, Kongju National University)
Lee, Hakjun (Intelligent manufacturing R&D group, Korea Institute of Industrial Technology)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.21, no.11, 2020 , pp. 554-560 More about this Journal
Abstract
In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.
Keywords
Air Bearing Stage; Compensation; Flexure; Gantry Control; Mutual Ripple; Yaw Motion;
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