• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• 한국정밀공학회지
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• 제20권5호
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• pp.210-217
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• 2003

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and pile-up was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0mm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

• 한국정밀공학회지
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• 제20권9호
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• pp.47-54
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• 2003

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic re cover and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1 -l0nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

• 한국정밀공학회지
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• 제21권3호
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• pp.139-146
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• 2004

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation scratch test was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled as a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. Variables of the nanoindentation scratch test analysis are scratching speed, scratching load, tip radius and tip geometry. The nano-indentation scratch tests were performed by using the Berkovich pyramidal diamond indenter. Comparison between the experimental data and numerical result demonstrated that the FEM approach can be a good model of the nanoindentation scratch test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

• 한국구조물진단유지관리공학회 논문집
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• 제18권3호
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• pp.167-177
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• 2014

최근 수질오염의 악화로 고도정수처리시설에 대한 수요가 커지고 있으며, 오존처리와 같은 밀폐형 고도정수처리시설의 설치가 늘고 있는 실정이다. 그러나 오존의 강력한 산화작용으로 인해 콘크리트 구조물의 침식이 우려됨에 따라 오존에 대응 가능한 에폭시 방수방식재가 콘크리트 표층부 보호 코팅재로 적용되고 있다. 그러나 이러한 에폭시가 오존에 대한 성능수준 및 장기적 내구성을 명확히 측정할 방법과 기준이 없어 정확한 품질관리가 이루어지지 않고 있는 실정이며, 이로 인해 수처리용 콘크리트 구조물의 장기내구성 확보에 대한 우려가 제기되고 있다. 이 연구에서는 AFM과 나노인덴테이션 기법이 기존에 사용하던 평가방법인 육안관찰, 중량변화, 표면관찰, 색차분석 등의 간접적 평가방법과 함께 에폭시 방수방식재 평가방법으로써의 적합한지를 판단하고자 하였으며, 이를 위해 오존용으로 개발된 6종의 다른 성분으로 구성된 에폭시계 방수방식재를 대상으로 열화특성을 분석하였다. 연구결과 AFM과 나노인덴테이션을 활용할 경우 기존 평가방법보다 직접적이고 정량적인 평가가 가능함을 확인하였으며, 일부 에폭시 코팅재료의 경우 오존에 대한 성능 한계치 (임계치)를 명확히 확인할 수 있었다.

• 한국정밀공학회지
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• 제22권12호
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.333-336
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• 2002

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numberical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and bur was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

• 한국정밀공학회지
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• 제22권10호
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• pp.167-173
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• 2005

The Berkovich nano-indentation is an indentation test method analyzing mechanical properties of materials such as hardness and elastic modulus. The length scale of the penetration is measured in nanometers. Therefore, this method becomes widely useful for analyzing the mechanical property of thin film which can not be measured before. In this paper, comparing two results of the load-displacement curve obtained by the Berkovich nano-indentation and the 3-D finite element analysis, it was confirmed that the 3-D finite element analysis is useful. The phenomenon of pile-up and sink-in due to material properties was discussed by the finite element analysis.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.246-251
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• 2004

Nano-indentation is used for measuring mechanical properties of thin films such as elastic modulus and hardness. For ductile materials, pile-up around the indenter causes the calculation of inaccurate projected contact area. This phenomenon was found by measurement of indentation shape using an atomic force microscope. In present study finite element analysis of nano-indentation was performed to compensate the effects of pile-up on the contact area. The result of finite element analysis was compared with that of nano-indentation for a ductile material. The analysis has demonstrated that the true contact area is greater than that calculated by nano-indentation. It is verified that the consideration of the effects of pile-up in nanoindentation for ductile materials using the finite element method is reasonable.

• 한국정밀공학회지
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• 제21권6호
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• pp.145-152
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• 2004

Depth-sensing indentation is wifely used for evaluation of mechanical properties of thin films. It is generally accepted that the most significant source of uncertainty in nanoindentation measurement is the geometry of the indenter tip. Therefore the successful application of the technique requires accurate calibration of the indenter tip geometry. The direct measurement of geometry of a Berkovich indenter was determined using a atomic force microscope. The indentation geometrical calibration of contact area was performed by analyzing the indenter tip profile. The equations of area functions were proposed for nanoscale thin films..