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Finite Element Analysis of Nano Deformation for the Hyper-Fine Pattern Fabrication by using Nanoindentation  

이정우 (부산대학교 대학원 정밀기계공학과)
윤성원 (부산대학교 정밀기계공학과)
강충길 (부산대학교 기계공학부, 정밀정형 및 금형가공연구소)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.5, 2003 , pp. 210-217 More about this Journal
Abstract
In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and pile-up was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0mm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.
Keywords
Hyper-fine pattern; pile-up; Elastic restoration; Nanoindentation; Tip design;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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