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A Study on Determination of the Area Function of Nano Indenter Tip with AFM  

박성조 (부산대학교 대학원 기계설계공학과)
이현우 (부산대학교 기계공학)
한승우 (한국기계연구원)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.6, 2004 , pp. 145-152 More about this Journal
Abstract
Depth-sensing indentation is wifely used for evaluation of mechanical properties of thin films. It is generally accepted that the most significant source of uncertainty in nanoindentation measurement is the geometry of the indenter tip. Therefore the successful application of the technique requires accurate calibration of the indenter tip geometry. The direct measurement of geometry of a Berkovich indenter was determined using a atomic force microscope. The indentation geometrical calibration of contact area was performed by analyzing the indenter tip profile. The equations of area functions were proposed for nanoscale thin films..
Keywords
Nanoindentation; Indenter tip; Atomic Force Microscope; Area function;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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