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Finite Element Analysis of Nano Deformation for Hyper-fine Pattern Fabrication by Application of Nano-scratch Process  

이정우 (부산대학교 대학원 정밀기계공학과)
강충길 (부산대학교 기계공학부, 정밀정형 및 금형가공연구소)
윤성원 (부산대학교 정밀기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.3, 2004 , pp. 139-146 More about this Journal
Abstract
In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation scratch test was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled as a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. Variables of the nanoindentation scratch test analysis are scratching speed, scratching load, tip radius and tip geometry. The nano-indentation scratch tests were performed by using the Berkovich pyramidal diamond indenter. Comparison between the experimental data and numerical result demonstrated that the FEM approach can be a good model of the nanoindentation scratch test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.
Keywords
Nanoindentation; Scratch test; Pile-up; Hyper-fine pattern; Elastic recovery;
Citations & Related Records
Times Cited By KSCI : 6  (Citation Analysis)
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