• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.244-244
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• 2003

나노인덴테이션은 시편에 압자를 침투시켜 재료의 기계적 특성을 파악할 수 있는 경도시험법이다. 압입범위를 나노미터범위로 조절할 수 있어 기존에 접근할 수 없었던 극 미소부분에로 응용이 넓어지고 있다. 경도시험시 재료의 탄성 및 소성 작용에 의해 재료는 변형되고, 표면변화 관찰을 통해 표면아래 부분에서 이루어지고 있는 거동을 예측할 수 있다. 이러한 관점에서 나노인덴테이션 시험시에도 발생하는 파일업과 싱크인 현상에서 재료가 나노미터 범위에서 어떠한 양상으로 변형을 하는지를 고찰하는 것은 의미가 있을 것이다. 본 연구에서 파일업과 싱크인의 양상을 파악하고 그 양을 정량화하기 위하여 가공경화양에 따른 표면변화와 압입하중 변화에 따른 표면변화를 관찰하였다. 어닐링한 봉상 알루미늄을 압축변형을 0%, 5%, 20%, 40%, 50% 로 변형시켜 가공경화를 일으켰고, 표면은 전해연마하여 나노압입시험이 가능하도록 하였다. 각각의 시편을 나노인덴테이션 압입하중을 변화시켜 재료에서 하중 변화에 따라 나타나는 표면변화를 관찰하였고, 위의 각 조건에서 파일업양을 정량화 하였다. 연구결과에 대해 ANSYS 유한요소분석 프로그램을 사용하여 재료의 변형양상을 시뮬레이션 하였고, 실제 실험데이터와 비교 분석하였다.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.2
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• pp.129-137
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• 2013

A force calibration of a nanoindenter and a 3D morphology observation of indenters were carried out in this study. A microbalance calibrated with standard weights was used for measuring the loads generated by a nanoindenter. The indentation load could be calibrated from the ratio of measured and generated loads and the first contact load also could be detected from the microbalance data. By analyzing atomic force microscopy images of two indenters, curvature radii of apexes were determined by $19.71{\pm}3.03$ and $1043.94{\pm}50.91$ nm, respectively, for the nearly new indenter A and the severly worn indenter B. Corresponding bluntness depths were estimated by 1.22 and 64.56 nm for the both indenters by overlapping their profiles on the perfect pyramidal shape. In addition, nanoindentation curves obtained from a fused silica reference material with the both indenters showed a depth difference corresponding to the bluntness depth difference along the indentation depth axis. By shifting amounts of the bluntness depths along the horizontal axis, whole nanoindentation curves overlapped on themselves and resulted in nanohardness values consistent within 1.11 % without considering the complex indenter area function of each indenter.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.12
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• pp.98-106
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• 2016

Measurements of the elastic modulus and hardness using a nano indentation machine rely on the equation for the fitted contact area, which is valid for only sink-in materials. For most soft engineering materials that involve pile-up behavior rather than sink-in, the contact area equation underestimates the contact area and thus overestimates the elastic modulus and hardness. This study proposes a correction method to amend erroneous hardness measurements in pile-up situations. The method is a supplemental derivation to the original hardness measurement with the known value of the elastic modulus. The method was examined for soft engineering metals, Al 6061 T6 and C 12200, via tensile tests, nano indentation tests, impression observations, and finite element analysis. The proposed technique shows reasonable agreement with the analytical results accounting for strain gradient plasticity from a previous study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.273-273
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• 2003

나노인덴테이션은 압자를 수 $\mu\textrm{N}$의 힘으로 시편에 압입을 시켜 재료의 경도나 탄성계수와 같은 기계적 특성을 평가하는 압입경도 시험법이다. 압입 변위를 나노미터범위로 조절할 수 있어 기존에 접근할 수 없었던 박막의 기계적 특성을 평가하는데 응용이 넓어지고 있다. 본 연구에서는 나노인덴테이션에서 제공되는 하중-변위곡선과 유한요소해석의 결과를 비교하여 유한요소해석의 신뢰성을 검증하고, 유한요소해석에서 여러 가지 재료의 특성에 따른 파일업과 싱크인 현상을 규명 하고자 한다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.9
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• pp.943-951
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• 2014

The tip geometries of the pyramidal and conical indenters used for micro/nano-indentation tests are not sharp. They are inevitably rounded because of their manufacturability and wear. In many indentation studies, the tip geometries of the pyramidal indenters are simply assumed to be spherical, and the theoretical solution for spherical indentation is simply applied to the geometry at a shallow indentation depth. This assumption, however, has two problems. First, the accuracy of the theoretical solution depends on the material properties and indenter shape. Second, the actual shapes of pyramidal indenter tips are not perfectly spherical. Hence, we consider the effects of these two problems on indentation tests via finite element analysis. We first show the relationship between the Poisson's ratio and load-displacement curve for spherical indentation, and suggest improved solutions. Then, using a possible geometry for a Berkovich indenter tip, we analyze the characteristics of the load-displacement curve with respect to the indentation depth.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.7
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• pp.1270-1279
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• 2002

Residual stress is a dominant obstacle to efficient production and safe usage of device by deteriorating the mechanical strength and failure properties. Therefore, we proposed a new thin film stress-analyzing technique using a nanoindentation method. For this aim, the shape change in the indentation load-depth curve during the stress-relief in film was theoretically modeled. The change in indentation depth by load-controlled stress relaxation process was related to the increase or decrease in the applied load using the elastic flat punch theory. Finally, the residual stress in thin film was calculated from the changed applied load based on the equivalent stress interaction model. The evaluated stresses for diamond-like carbon films from this nanoindentation analysis were consistent with the results from the conventional curvature method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.5
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• pp.8-15
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• 2018

Films with special properties (e.g., water-repellent films, optical films, anti-reflection films, and flexible films) are referred to as functional films. Recently, there has been interest in fine patterning methods for film fabrication. In particular there have been many studies that use a UV nanoimprint process involving a UV curing method. In this paper, a polymer film was fabricated by the UV nanoimprint process with a micro-pattern, and its durability was evaluated by a wear test and a nano-indentation test. The film mechanical properties (such as coefficient of friction, hardness, and modulus of elasticity) were measured. Moreover, the choice of PUA type resin used in the UV nanoimprint process was confirmed to impact the durability of the thin film. Despite making the polymer film samples using the same method and PUA type resin, different coefficient of friction, hardness, and modulus of elasticity values were obtained. PUA 4 resin had the most favorable coefficient of friction, hardness, and modulus of elasticity. This material is predicted to produce a high durability functional film.

• Journal of the KSME
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• v.49 no.5
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• pp.45-48
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• 2009

• Journal of the Microelectronics and Packaging Society
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• v.27 no.3
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• pp.83-88
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• 2020

The evolution of smartphones has led to numerous researches in the mechanical behavior of flexible devices. Due to the nano-size of the thin flexible film, nanoindentation is widely used to evaluate its mechanical behaviors, such as elastic modulus, and hardness. However, the commonly used Oliver-Pharr method is not suited for analyzing the indentation force-depth curves of hard films on soft substrates, as the effects of soft substrate is not considered theoretically. In this study, the elastic modulus of the thin film was evaluated with references to other reported models which include the substrate effect, and with calibration of the indentation depth for the pile-ups between the indenter and test surface. We fabricated test samples by deposition of amorphous metal film on polyimide and silicon wafers for verification of modified models.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.4
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• pp.95-100
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• 2019

Nanoindentation has been widely used for evaluating mechanical properties of nano-devices, from MEMS to packaging modules. Residual stress is also estimated from indentation tests, especially the Knoop indenter which is used for the determination of residual stress directionality. According to previous researches, the ratio of the two stress conversion factors of Knoop indentation is a constant at approximately 0.34. However, the ratio is supported by insufficient quantitative analyses, and only a few experimental results with indentation depth variation. Hence, a barrier for in-field application exists. In this research, the ratio of two conversion factors with variation in indentation depth using finite elements method has been attempted at. The magnitudes of each conversion factors were computed at uniaxial stress state from the modelled theoretical Knoop indenter and specimen. A model to estimate two stress conversion factor of the long and short axis of Knoop indenter at various indentation depths is proposed and analyzed.