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http://dx.doi.org/10.6117/kmeps.2019.26.4.095

Stress Conversion Factor on Penetration Depth of Knoop Indentation for Assessment of Nano Residual Stress  

Kim, Won Jun (School of Materials Science & Engineering, Research Center for Energy and Clean Technology, Andong National University)
Kim, Yeong Jin (School of Materials Science & Engineering, Research Center for Energy and Clean Technology, Andong National University)
Kim, Young-Cheon (School of Materials Science & Engineering, Research Center for Energy and Clean Technology, Andong National University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.26, no.4, 2019 , pp. 95-100 More about this Journal
Abstract
Nanoindentation has been widely used for evaluating mechanical properties of nano-devices, from MEMS to packaging modules. Residual stress is also estimated from indentation tests, especially the Knoop indenter which is used for the determination of residual stress directionality. According to previous researches, the ratio of the two stress conversion factors of Knoop indentation is a constant at approximately 0.34. However, the ratio is supported by insufficient quantitative analyses, and only a few experimental results with indentation depth variation. Hence, a barrier for in-field application exists. In this research, the ratio of two conversion factors with variation in indentation depth using finite elements method has been attempted at. The magnitudes of each conversion factors were computed at uniaxial stress state from the modelled theoretical Knoop indenter and specimen. A model to estimate two stress conversion factor of the long and short axis of Knoop indenter at various indentation depths is proposed and analyzed.
Keywords
Residual stress; Instrumented indentation; Anisotropy; Knoop indenter;
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Times Cited By KSCI : 6  (Citation Analysis)
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