• 제목/요약/키워드: 나노 기술

검색결과 2,818건 처리시간 0.03초

기계적 가공과 무전해 선택적 증착기술을 이용한 나노/마이크로 금속패턴 제작에 관한 연구 (A Study on Nano/micro Pattern Fabrication of Metals by Using Mechanical Machining and Selective Deposition Technique)

  • 조상현;윤성원;강충길
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1507-1510
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    • 2005
  • This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

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초정밀 평면 X-Y 스테이지의 최적제어기 설계 (Optimal Design of Controller for Ultra-Precision Plane X-Y Stage)

  • 곽이구;김재열;양동조;고명수;유신;김기태
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.342-347
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    • 2002
  • After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

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이광자 광중합 공정을 이용한 3차원 미세구조물 제작기술 동향 (Recent Progress in the Nanoscale Additive Layer Manufacturing Process Using Two-Photon Polymerization for Fabrication of 3D Polymeric, Ceramic, and Metallic Structures)

  • 하철우;임태우;손용;박석희;박상후;양동열
    • 한국정밀공학회지
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    • 제33권4호
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    • pp.265-270
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    • 2016
  • Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.

나노구조 TiO$_2$용사코팅의 미세조직 제어 공정기술 개발과 광촉매 특성평가 - Part II: TiO$_2$- WO$_3$ 코팅 - (Photocatalytic Property of Nano-Structured TiO$_2$ Thermal Sprayed Coating - Part II: TiO$_2$ -WO$_3$ Coating -)

  • 이창훈;최한신;이창희;김형준;신동우
    • Journal of Welding and Joining
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    • 제21권4호
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    • pp.46-55
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    • 2003
  • TiO$_2$-WO$_3$(8.2wt%) coatings were prepared by the APS (Atmospheric Plasma Spraying) process to clarify the relationship between the process parameters(H$_2$ gas flow rate of plasma 2nd gas and spraying distance) of the APS coating and photo-decomposition efficiency kinetics of the MB(methylene blue) aqueous solution decomposition and to understand the effect of addition of WO$_3$ on photocatalytic properties of TiO$_2$ sprayed coating. Further, the temperature and velocity of flying particles were measured by DPV-2000 to investigate the relationship between microstructure of coatings and process parameters. Properties of coatins were investigated by XRD, SEM, XPS, RAMAN, UV/VIS spectrometer. In case of the TiO$_2$-WO$_3$(8.2wt%) coating, it had a lower anatase fraction than that of pure-TiO$_2$ coatings because of flying in the higher temperature plasma plume by the heavy weight of TiO$_2$, WO$_3$. And, when WO$_3$ added powders were spayed, the doping effects of W ions substituted into the Ti ion sites was not occured during melting and solidification cycles of spraying. It was found that the addition of WO$_3$ was ineffective effective on increasing photo-decomposition efficiency of TiO$_2$ sprayed coating.

LbL 다층흡착에 의한 나노피브릴화 셀룰로오스의 표면 개질과 현탁액의 탈수성에 미치는 영향 (Surface Modification of Nanofibrillated Cellulose by LbL (Layer-by-Layer) Multilayering and its Effect on the Dewatering Ability of Suspension)

  • 심규정;윤혜정;안정언;이제곤;이혜윤;조연희
    • 펄프종이기술
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    • 제46권1호
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    • pp.46-55
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    • 2014
  • In this study, we modified the surface of nanofibrillated cellulose (NFC) through LbL (Layer-by-Layer) multilayering process with polyelectrolytes and investigated the effects of the NFC modification on the charge of NFC surface and the dewatering ability of NFC suspension. The multilayering process was done onto NFC fibers using polydiallyldimethylammonium chloride (PDADMAC) and poly-sodium 4-styrene sulfonate (PSS) under different dosage and washing conditions. When the washing was carried out in every adsorption stage, the modified NFC had strong cationic or anionic charge depending on the type of polyelectrolyte in the outermost layer and the dewatering ability was not affected. In the case of no washing treatment or washing in the final adsorption stage, however, the zeta potential of NFC was close to an isoelectric point so that the dewatering ability increased remarkably. Low addition level of polyelectrolytes also showed the similar results. The mixing of NFC suspensions with opposite charge resulted in higher network strength and improved dewatering ability due to the flocculation.

고분자 복합재료의 계면특성 (Interfacial Characteristics of Polymeric Composite Materials)

  • 박수진;서민강
    • 폴리머
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    • 제29권3호
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    • pp.221-230
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    • 2005
  • 복합재료에 있어서 계면상호작용과 상계면은 이를 구성하고 있는 성분의 함량이나 형태 또는 구조와는 관계없이 입자가 충전된 고분자 또는 고분자 블렌드, 섬유강화 복합재료, 나노복합재료 그리고 생체재료 등의 기본적 물성에 매우 중요한 역할을 한다 계면접착에 영향을 미치는 주요 성분들의 역할에 대한 인식과 이에 따른 적절한 표면처리는 관련기술로의 적용뿐만 아니라 다른 여러 연구 및 개발 분야에도 중요한 기술적 진보를 가져다준다. 그러나 모든 복합재료에서 계면과 상계면의 역할이 중요할지라도 이러한 표면처리 방법은 특정 시스템의 특성뿐만 아니라 그 목적에 맞게 적절하게 선택되어야 한다. 본 연구에서는 복합재료 시스템의 두 성분간의 계면상호작용을 향상시켜 최종 복합재료의 요구 물성을 증가시키기 위하여 여러 종류의 표면처리를 행하였으며, 그 결과들에 대하여 고찰하였다.

Ti-6Al-4V재의 UNSM처리에 의한 축인장압축피로특성변화 (Variation of Axial Tension-Compression Fatigue Characteristics by UNSM on Ti-6Al-4V)

  • 서창민;조성암;편영식;서민수
    • 한국해양공학회지
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    • 제25권6호
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    • pp.42-48
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    • 2011
  • The present study makes three original contributions to nanoskinned Ti-6Al-4V materials. The nanoskins were fabricated on Ti-6Al-4V material using various surface treatments: deep rolling (DR), laser shot peening (LSP), and ultrasonic nanocrystal surface modification (UNSM). These surface treatments are newly developed techniques and are becoming more popular in industrial fields. A fatigue strength comparison at up to 106 cycles was conducted on these nanoskinned Ti-6Al-4V materials. Fatigue tests were carried out using MTS under axial loading tension-compression fatigue (R = -1, RT, 5 Hz, sinusoidal wave). The analysis of the crack initiation patterns in the nanoskinned Ti-6Al-4V materials found an interior originating crack pattern and surface originating crack type. Microscopic observation was mainly used to investigate the fatigue fractured sites. These surface modification techniques have been widely adopted, primarily because of the robust grade of their mechanical properties. These are mainly the result of the formation of a large-scale, deep, and useful compressive residual stress, the formation of nanocrystals by the severe plastic deformation (SPD) at the subsurface layer, and the increase in surface hardness.

Ti-6Al-4V재의 UNSM처리에 의한 회전굽힘피로특성변화 (Variation of Rotating Bending Fatigue Characteristics by UNSM on Ti-6Al-4V)

  • 서창민;편영식;서민수
    • 한국해양공학회지
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    • 제25권6호
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    • pp.49-55
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    • 2011
  • In order to analyze feasibility of replacing a conventional 6-mm Ti bar with a 5-mm bar, a series of rotating bending fatigue tests were carried out on Ti-6Al-4V bars by strengthening the fatigue performance using a special technique called UNSM (Ultrasonic Nanocrystal Surface Modification). The results of S-N curves clearly showed that the performance of the 5-mm titanium specimen was similar to that of the 6-mm specimen when the UNSM treatment was applied. The 5-mm treated specimen converged with small scattering band into the linear line of the non-treated 6-mm one. Below the fatigue life of $10^5$ cycles, the UNSM treatment did not show any significant superiority in the bending stress and fatigue life. However, over the fatigue life of $10^5$ cycles, the effect of UNSM was superior for each fatigue life, and the bending stress became longer and higher than that of the untreated one. In the case of 6-mm Ti-bar with UNSM, the fatigue limit was about 592 MPa, and there was fatigue strength increase of about 30.7% at the fatigue life of $10^4$ cycles compared to the untreated 6-mm bar. Therefore, the compressive residual stress made by the UNSM in Ti-6Al-4V increased the fatigue strength by more than 30%.

저전력 OTP Memory IP 설계 및 측정 (Design of low-power OTP memory IP and its measurement)

  • 김정호;장지혜;김려연;하판봉;김영희
    • 한국정보통신학회논문지
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    • 제14권11호
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    • pp.2541-2547
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    • 2010
  • 본 논문에서는 대기 상태에서 저전력 eFuse OTP 메모리 IP틀 구현하기 위해 속도가 문제가 되지 않는 반복되는 블록 회로에서 1.2V 로직 트랜지스터 대신 누설 (off-leakage) 전류가작은 3.3V의 MV (Medium Voltage) 트랜지스터로 대체하는 설계기술을 제안하였다. 그리고 읽기 모드에서 RWL (Read Word-Line)과 BL의 기생하는 커패시턴스를 줄여 동작전류 소모를 줄이는 듀얼 포트 (Dual-Port) eFuse 셀을 사용하였다. 프로그램 전압에 대한 eFuse에 인가되는 프로그램 파워를 모의실험하기 위한 등가회로를 제안하였다. 하이닉스 90나노 CMOS 이미지 센서 공정을 이용하여 설계된 512비트 eFuse OTP 메모리 IP의 레이아웃 크기는 $342{\mu}m{\times}236{\mu}m$이며, 5V의 프로그램 전압에서 42개의 샘플을 측정한 결과 프로그램 수율은 97.6%로 양호한 특성을 얻었다. 그리고 최소 동작 전원 전압은 0.9V로 양호하게 측정되었다.

초정밀 가공기용 마이크로 스테이지의 힌지 형상과 재질 변화에 따른 안정성 해석 (Stability Analysis of a Micro Stage for Micro Cutting Machine with Various Hinge Type and Material Transformation)

  • 김재열;곽이구;유신
    • 한국정밀공학회지
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    • 제20권7호
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    • pp.233-240
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    • 2003
  • Recently, the world are preparing for new revolution, called as If (Information Technology), NT (Nano-Technology), and BT (Bio-Technology). NT can be applied to various fields such as semiconductor-micro technology. Ultra precision processing is required for NT in the field of mechanical engineering. Recently, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts. Therefore, in this paper, stability of ultra precision cutting unit is investigated, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed. In this paper, hinge shapes of micro stage in UPCU(Ultra Precision Cutting Unit) are designed as two types, where, hinge shapes are composed of round and rectangularity. Elasticity and strength are analyzed about micro stage, according to hinge shapes, by FE analysis. Micro stage in ultra precision processing machine has to keep hinge shape under cutting condition with 3-component force (cutting component, axial component, radial component) and to reduce modification against cutting force. Then we investigated its elasticity and its strength against these conditions. Material of micro stage is generally used to duralumin with small thermal deformation. But, stability of micro stage is investigated, according to elasticity and strength due to various materials, by FE analysis. Where, Used materials are composed of aluminum of low strength and cooper of medium strength and spring steel of high strength. Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.