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http://dx.doi.org/10.7736/KSPE.2016.33.4.265

Recent Progress in the Nanoscale Additive Layer Manufacturing Process Using Two-Photon Polymerization for Fabrication of 3D Polymeric, Ceramic, and Metallic Structures  

Ha, Cheol-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Lim, Tae-Woo (Divison of LCD, Samsung Display)
Son, Yong (Micro/Nanoscale manufacturing R&D Group, Korea Institute of Industrial Technology)
Park, Suk-Hee (Micro/Nanoscale manufacturing R&D Group, Korea Institute of Industrial Technology)
Park, Sang-Hu (School of Mechanical Engineering, ERC/NSDM, Pusan National University)
Yang, Dong-Yol (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
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Abstract
Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.
Keywords
Nano-Stereolithography; Two-Photon polymerization; Femtosecond laser; 3D micro-structure;
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