• Korean Journal of Materials Research
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• v.7 no.7
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• pp.576-581
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• 1997

TDEAT(TI[N(C$_{2}$H$_{5}$)$_{2}$]$_{4}$)와 NH$_{3}$반응기체를 이용하여 MOCVD(Metal Organic Chemical Vapor Deposition)TiN 박막을 형성하였다. 반응기체들은 chamber내에 주입하기 전에 적절한 기상반응을 유도시켜 주었으며, TiN박막 형성에 미치는 예비혼합 효과를 관찰하였다. 두 반응기체의 예비혼합을 이용하여 낮은 탄소의 함유와 함께 -800$\mu$Ωㆍcm의 비교적 낮은 비저항을 나타내었다. 또한 NH$_{3}$의 유량 증가에 따라 도포성이 상당히 증가되고 있는데 이같은 도포성 향상 효과는 기상반응에 의하여 형성되는 중간상의 낮은 흡\ulcorner계수에 기인하는 것으로 여겨진다. QMS(Quadruple Mass Spectrometer)분석을 이용하여 두가지 경쟁적 반응을 포함한 전체 반응식을 제시하였다. TDEAT/NH$_{3}$혼합증착원의 경우 particle이 관찰\ulcorner지 않았으며 이것은 기상반응의 정도를 효과적으로 조절한데 기인하는 것으로 여겨진다. 결과적으로 반응기체의 예비혼합은 막질 및 도포성 개선과 함께 particle생성억제에 매우 효율적인 방법임을 알 수 있었다.다.

• Membrane Journal
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• v.27 no.1
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• pp.43-52
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• 2017

The air injection nozzle tube was inserted inside of the tubular membrane module to reduce membrane fouling and improve the permeate flux. The average pore size of membrane was $0.1\;{\mu}m$ and the yeast was used as a foulant. All of permeate experiments were started without air injection for the module equipped with the nozzle tube, then carried out continuously with air injection. Finally, the nozzle tube was removed from the module and the permeate was measured without air injection. The measured permeate fluxes were compared to examine the effect of air injection. The fluxes for air injection were consistently maintained or increased. The fluxes of no-air injection with the nozzle tube were greater than those of the empty tubular module. As operating pressure decreased to 0.4 bar, the flux enhancement of air injection based on no-nozzle case increased to 21%. Flux enhancements of air injection were above 30% as the gas/liquid two-phase flow was changed from the stratified-smooth to the intermittent pattern due to increase of gas flowrate.

• Tunnel and Underground Space
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• v.31 no.5
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• pp.333-359
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• 2021

Gases such as hydrogen and radon can be generated around the canister in high-level radioactive waste disposal systems due to several reasons including the corrosion of metal materials. When the gas generation rate exceeds the gas diffusion rate in the low-permeability bentonite buffer, the gas phase will form and accumulate in the engineered barrier system. If the gas pressure exceeds the gas entry pressure, gas can migrate into the bentonite buffer, resulting in pathway dilation flow and advective flow. Because a sudden occurrence of dilation flow can cause radionuclide leakage out of the engineered barrier of the radioactive waste disposal system, it is necessary to understand the gas migration behavior in the bentonite buffer to quantitatively evaluate the long-term safety of the engineered barrier. Experimental research investigating the characteristics of gas migration in saturated bentonite and research developing numerical models capable of simulating such behaviors are being actively conducted worldwide. In this technical note, previous gas injection experiments and the numerical models proposed to verify such behaviors are introduced, and the future challenges necessary for the investigation of gas migration are summarized.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.27 no.3
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• pp.144-157
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• 2022

Noble gases, which are chemically inert and behave conservatively in marine environments, have been used as tracers of physical processes such as air-sea gas exchange, mixing of water masses, and distribution of glacial meltwater in the ocean. For precise measurements of Ne, Ar, and Kr, we developed a mass spectrometric system consisting of a quadrupole mass spectrometer (QMS), a high vacuum preparation line, an activated charcoal cryogenic trap (ACC), and a set of isotope standard gases. The high vacuum line consists of three sections: (1) a sample extraction section that extracts the dissolved gases in the sample and mixes them with the standard gases, (2) a gas preparation section that removes reactive gases using getters and separates the noble gases according to their evaporation points with the ACC, and (3) a gas analysis section that measures concentrations of each noble gas. The ACC attached to the gas preparation section markedly lowered the partial pressures of Ar and CO₂ in the QMS, which resulted in a reduced uncertainty of Ne isotope analysis. The isotope standard gases were prepared by mixing ²²Ne, ³⁶Ar, and ⁸⁶Kr. The amounts of each element in the mixed standard gases were determined by the reverse isotope dilution method with repeated measurements of the atmosphere. The analytical system achieved precisions for Ne, Ar, and Kr concentrations of 0.7%, 0.7%, and 0.4%, respectively. The accuracies confirmed by the analyses of air-equilibrated water were 0.5%, 1.0%, and 1.7% for Ne, Ar, and Kr, respectively.

• Journal of the Korean GEO-environmental Society
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• v.9 no.2
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• pp.31-37
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• 2008

Diffused Aeration System (DAS) is one of the remediation methods used for removing contaminants in groundwater and this method brings air bubbles in contact with contaminated water, afterwards transferring contaminants in liquid phase into air phase. In this study, three applicability tests using DAS were conducted in two highly contaminated sites. For these tests, diffused air bubbles are generated with a in-flow rate of 17.1, 44.8 and 76.5 (1/min), respectively. The concentrations of TCE in grounwater and air phase were measured during the tests. The measured results showed that TCE concentration hit the highest value after 6~8 min and afterwards decreased gradually. Also, it was observed that the TCE concentration in air phase changed depending on the rate of diffused aeration. In addition, $K_La$ values from liquid to air phase were calculated based on the test results and those of three tests (test 1, 2 3) were 0.444, 1.158 and 1.836(1/hr), respectively. From the comparison of $K_La$ values, the faster air in-flow rate is, the higher the efficiency of the DAS is.

• Korean Journal of Materials Research
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• v.8 no.10
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• pp.945-949
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• 1998

Ta(OC2H5)5와 NH3를 이용하여 Cycle-CVD법으로 산화탄탈륨 막을 증착하였다. Cycle-CVD법에서는 Ta(OC2H5)5와 NH3사이에 불활성 기체를 주입한다. 하나의 cycle은 Ta(OC2H5)5주입, Ar주입, NH3 주입, Ar 주입의 네 단계로 이루어진다. Cycle-CVD법으로 산화탄탈륨 막을 증착할 때, 온도 $250-280^{\circ}C$에서 박막의 증착 기구는 원자층 증착(Atomic Layer Deposition:ALD)이었다. $265^{\circ}C$에서 Ta(OC2H5)5:Ar:NH3:Ar:NH3:Ar의 한 cycle에서 각 단계의 주입 시간을 1-60초:5초:5초:5초로 Ta(OC2H5)5 주입 시간을 변화시키면서 산화탄탈륨 막을 Cycle-CVD법으로 증착하였다. Ta(OC2H5)5주입시간이 증가하여도 cycle 당 두께가 $1.5\AA$/cycle로 일정하였다. $265^{\circ}C$에서 증착된 박막의 누설 전류는 2MV/cm에서 2x10-2A/$\textrm{cm}^2$이었고 열처리후의 산화탄탈륨 막의 누설 전류값은 $10-4A\textrm{cm}^2$ 이하고 감소하였다. 증착한 산화탄탈륨 막의 성분을 Auger 전자 분광법으로 분석하였다. 2$65^{\circ}C$에서 증착한 막의 성분은 탄탈륨 33at%, 산소 50at%, 탄소 5at%, 질소 12at% 이었으며 90$0^{\circ}C$, O2300torr에서 10분 동안 열처리한 박막은 탄탈륨 33at%, 산소 60wt%, 탄소 4at%, 질소 3at%이었다. 박막의 열처리 온도가 높을수록 불순물인 탄소와 질소의 박막 내 잔류량이 감소하였다. 열처리 후의 박막은 O/Ta 화학정량비가 증가하였으며 Ta의 4f7/5와 4f 5/2의 결합 강도가 열처리 전 박막보다 증가하였다. 열처리 후 누설 전류가 감소하는 것은 불순물 감소와 화학정량비 개선 및 Ta-O 결합 강도의증가에 의한 것으로 생각된다.

• Journal of the Korean GEO-environmental Society
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• v.24 no.6
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• pp.5-11
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• 2023

The engineering industry heavily relies on fossil fuels such as coal and petroleum to generate energy through combustion. However, this process emits carbon dioxide into the atmosphere, leading to global warming. To mitigate this issue, researchers have explored various methods to reduce carbon dioxide emissions, one of which is carbon dioxide underground storage technology. This innovative technology involves capturing carbon dioxide from industrial plants and injecting it into the saturated ground layer beneath the earth's surface, storing it securely underground. Despite its potential benefits, carbon dioxide underground storage efficiency needs improvement to optimize storage in a limited space. To address this challenge, our research team has focused on improving storage efficiency by utilizing surfactants. Furthermore, we evaluated how different carbon dioxide states, including gaseous, liquid, and supercritical, impact storage efficiency based on their respective pressures and temperatures within the underground reservoir. Our findings indicate that using surfactants and optimizing the injection rate can effectively enhance storage efficiency across all carbon dioxide states. This research will pave the way for more efficient carbon dioxide underground storage, contributing to mitigating the environmental impact of fossil fuels on the planet.

• Clean Technology
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• v.17 no.1
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• pp.62-68
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• 2011

Hydrodynamic characteristics in multistage annular type fluidized bed (riser: $0.01{\times}0.025{\times}2.8m^3$, J-valve: $0.009{\times}0.015m^2$)were investigated. Glass beads ($d_p=101{\mu}m$, ${\rho}_b=1,590kg/m^3$, $U_{mf}=1.25{\times}10^{-2}m/s$, Geldart classification B) was used as a bed material. Accumulated weight by the electronic balance was measured to determine the solid flow rate in batch-type. In circulation condition, we measured the accumulated weight of particle transported from riser. At the steady state condition, solid circulation rate was calculated from time interval of the heated bed material passing between two thermocouples. Solid flow rate increased with increasing inlet gas velocity ($1.2-2.6U_{mf}$) and the static bed height (z, 0.24-0.68 m) from 2.2 to 23.4 kg/s. However, mean residence time decreased with increasing inlet gas velocity ($1.2-2.6U_{mf}$) and the static bed height (z, 0.24-0.68 m) from 1,438 to 440 s. The solid holdup in the riser was determined by measuring pressure differences according to the riser height. These results showed a similar trend to that of simple exponential decay type except for the top section of the riser. To verify the gas bypassing from top bubbling beds to middle bubbling beds, $CO_2$ gas was injected by tracer gas in constant ratio, and then was measured $CO_2$ concentration in outlet gas by gas chromatography. Gas bypassing occurred below 2.6% which is negligible value.

• Geophysics and Geophysical Exploration
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• v.9 no.1
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• pp.10-18
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• 2006

We measured the changes in P-wave velocity that occur when injecting $CO_2$ in gaseous, liquid, and supercritical phases into water-saturated anisotropic sandstones. P-wave velocities were measured in two cylindrical samples of Tako Sandstone, drilled along directions normal and parallel to the bedding plane, using a piezo-electric transducer array system. The velocity changes caused by $CO_2$ injection are typically -6% on average, with maximum values about -16% for the case of supercritical $CO_2$ injection. P-wave velocity tomograms obtained by the differential arrival-time method clearly show that $CO_2$ migration behaviour is more complex when $CO_2$ flows normal to the bedding plane than when it flows parallel to bedding. We also found that the differences in P-wave velocity images were associated both with the $CO_2$ phases and with heterogeneity of pore distribution in the rocks. Seismic images showed that the highest velocity reduction occurred for supercritical $CO_2$ injection, compared with gaseous or liquid $CO_$ injection. This result may justify the use of the seismic method for $CO_2$ monitoring in geological sequestration.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.145.1-145.1
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• 2014

변형된 end-Hall type의 이온 소스를 사용하여 이온 소스의 형태에 따라 달라지는 이온 빔의 변화를 측정하였다. 이온 소스 cathode의 wehnelt mask를 세 가지 종류로 제작하였으며, 생성된 이온 빔을 이용하여 Al이 sputter 방식으로 증착된 유리 기판을 etching 하였다. 실험 결과 wehnelt mask의 모양에 따라 focus, broad, strate의 형태로 이온 빔이 생성되는 것을 확인하였다. Al이 증착된 유리 기판의 제작을 위하여 Al target을 사용하여 RF power로 150 W, 2분간 sputtering을 하였고, 이온 소스와 기판사이의 거리를 1 cm씩 증가시켜가며 이온 빔을 2,500 V로 3분간 유리 기판을 etching한 후, 유리 기판이 etching된 모양을 통해 이온 빔의 형태를 분석하였다. 본 연구를 위하여 sputtering과 이온 빔 처리가 가능한 챔버를 제작하였으며, scroll pump와 turbo molecular pump를 사용하였다. Base pressure $1.5{\times}10^{-6}Torr$에서 실험이 진행되었고, 불활성 기체 Ar을 사용하였다. Ar 기체를 주입시 pressure는 $2.6{\times}10^{-3}Torr$였다.