• Journal of the Korean Society for Nondestructive Testing
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• v.28 no.2
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• pp.151-156
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• 2008

Many kinds of mass spectrometer type leak detectors have been widely used for detecting leak of vacuum processes in semiconductor and display industries etc. The leak detectors should be often calibrated by the permeation type standard leak in order to ensure accurate and reproducible leak measurement. We have developed a comparative calibration system for permeation type standard leak by using mass spectrometer type leak detector and specification of the calibration method. Following this technique the reliable calibration for leak standard ran be performed even in fields.

• Journal of IKEEE
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• v.20 no.4
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• pp.439-448
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• 2016

RTDs and thermocouple sensors are broadly used to measure its temperature in industry and research. The contents of this standard calibration procedure(SCP) describe procedures related to the calculation of Electrical Temperature Calibrator and show different ways to indicate the calibration results like the uncertainty in measurement. As of current, SCP of electrical temperature calibrator has not been established yet and we have some inconveniences and difficulties in the standard calibration work. To solve these problems, we have studied the calibration technique for RTD and thermocouple of temperature calibrator. In this paper, we present the mathematic model of its data and variations of measurement with the results of calibration data.

• The Journal of the Acoustical Society of Korea
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• v.22 no.6
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• pp.463-471
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• 2003

The results of the APMP (Asia Pacific Metrology Programme) regional intercomparison of acoustic calibrators were reviewed and analyzed. The artefacts used in intercomparison are a sound level calibrator and a pistonphone. The microphones used to measure the output pressure level are 1" and 1/2" standard microphones (LS1P, LS2P) as well as 1" and 1/2" reference microphones (WS1P/F, WS2P/F). The results obtained using standard microphones are satisfactory, but those obtained by the reference microphones, even though E/sub n/ values are within ±1.0, showed great deviations. Such results had come from the inaccurate calibration of reference microphones. By using the correct calibration results which were obtained by the recently established international standards, the new results were very similar to those of the foreign standard institutes.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1214-1217
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• 2004

현재 전기용량의 국가표준은 1 kHz, 1592 Hz에서만 유지 및 보급이 되고 있다. 그러나 전기용량 및 임피던스를 측정하는 브리지와 LCR meter들은 비교적 넓은 주파수 범위에서 측정이 가능하도록 생산이 되고 있다. 따라서 이러한 기기들의 교정은 실제적으로 사용되고 있는 주파수 전 영역이 아닌 1 kHz 만 되고 있어서 완전한 교정이라고 할 수 없다. 본 논문에서는 이를 해결하기위하여 임피던스 analyzer의 one-port 측정기술을 사용하여 4-terminal-pair(이하 4TP) 전기용량 표준기 각각의 terminal에서 임피던스를 필요 주파수에서 측정하고, 측정된 임피던스 matrix를 이용하여 4TP의 transfer 어드미턴스와 출력임피던스를 계산 하였다.

• The Journal of the Acoustical Society of Korea
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• v.8 no.5
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• pp.23-32
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• 1989

The calibration of 1 inch standard condenser microphone is done by the reciprocity calibration method. There are two kinds of reciprocity calibration, free-field calibration and pressure calibration. The pressure sensitivities of the three 1 inch condenser microphones are determined by pressure calibration. The accuracy of the pressure sensitivity of the microphone depends on the accuracies of the voltage and dimension measurements as well as the various corrections for the coupler. If the individual accuracies for the measurements and corrections are achieved, it is estimated that the over-all accuracy is approximately 0.05dB at low and middle frequencies decreasing to about 0.ldB over 10kHz.

• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.828-830
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• 2001

잘 교정된 유도성 전압 분할기는 다른 교류 전압 분할기들을 비교 교정하기 위한 전압비의 표준기로서 사용되어질 뿐 만 아니라 각종 임피던스 정밀측정용 브리지의 비례 arm으로서 사용이 되어진다. 이러한 유도성 전압 분할기를 비교교정 하기 위한 교정시스템이 연구제작이 되었다. 본 연구 논문에서는 제작방법, 교정방법, 그리고 오차 등에 대하여 관하여 논의하고 실제교정결과와 분석된 결과를 비교한다.

• Journal of Radiation Protection and Research
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• v.22 no.1
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• pp.29-33
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• 1997

Neutron room scattering corrections that should be made when neutron detectors are calibrated with a $D_2O$ moderated $^{252}Cf$ neutron source in the center of a calibration room are considered. Such room scattering corrections are dependent on specific neutron source type, detector type, calibration distance, and calibration room configuration. Room scattering corrections for the responses of a thermoluminescence dosimeter and two different types of spherical detectors to neutron source in the Radiation Calibration Laboratory(RCL) neutron calibration facility at the Korea Atomic Energy Research Institute(KAERI) were experimentally determined and are presented. The measured room scattering results are then compared with theoretical results calculated by predicting room scattering effects in terms of parameters related to the specific configuration. Agreement between measured and calculated scattering correction is generally about 10% for three kinds of detectors in the calibration facility.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.347-353
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• 2006

A helium permeation type standard leak calibration system has newly developed by using dynamic gas expansion method. The measurement range was extended lower to $10^{-6}$ Pa L/s for participating CCM (Consultative Committee for Mass and Related Quantities) standard leak key comparison. For the system, pressure ratios of high and ultra-high vacuum chamber and porous plug conductance for helium gas were determined. By using the system, a permeation type standard leak of $5.6{\times}10^{-4}$ Pa L/s range was calibrated. The calibration result showed that the difference between standard commercial leak was 11.1 %.

• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.186-194
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• 2005

A Spinning Rotor Gauge was calibrated between $4.04\times10^{-3}$ Pa and $1.11\times10^{-2}$ Pa at the high vacuum standard by static expansion method. The results were analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The expanded uncertainty was $3.0035\times10^{-3}$ Pa at $7.5448\times10^{-3}$ Pa. $95\%$ confidence level, and coverage factor of k = 1.

• Journal of the Korean Vacuum Society
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• v.4 no.2
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• pp.135-141
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• 1995

Spinning Rotor Gauge(SRG)를 전달표준기(transfer standard gauge)로 사용하여 한국표준과학연구원(KRISS)의 고진공표준과 이태리 표준연구소인 IMGC(Istituto 야 Metrologia Gustavo Colonnetti)고진공표준의 국제비교를 실시하였다. 그 방법은 SRG의 accommodation coefficient(s)를 각 연구실의 고진공표준기로 측정하여 그 결과를 비교하였다. 이 결과 두 기관에서 교정한 SRG 볼의 $\sigma$값의 평균차이는 0.696%로서 양국의 고진공표준은 오차범위내에서 일치하는 것으로 나타났다.