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Development of Comparative Calibration System for Helium Leak Standard by Using Mass Spectrometer Type Leak Detector  

Hong, Seung-Soo (Korea Research Institute of Standards and Science)
Lim, In-Tae (Korea Research Institute of Standards and Science)
Kim, Jin-Tae (Korea Research Institute of Standards and Science)
Shin, Yong-Hyeon (Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.28, no.2, 2008 , pp. 151-156 More about this Journal
Abstract
Many kinds of mass spectrometer type leak detectors have been widely used for detecting leak of vacuum processes in semiconductor and display industries etc. The leak detectors should be often calibrated by the permeation type standard leak in order to ensure accurate and reproducible leak measurement. We have developed a comparative calibration system for permeation type standard leak by using mass spectrometer type leak detector and specification of the calibration method. Following this technique the reliable calibration for leak standard ran be performed even in fields.
Keywords
Standard Leak; Permeation Type; Mass Spectrometer; Leak Detector;
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  • Reference
1 N. G. Wilson and L. C. Beavis, Handbook of Vacuum Leak Detection, The Education Committee of American Vacuum Society,' AVS Monograph Series M-2, pp. 5-9, (1988)
2 임인태, 신용현, 홍승수, '질량 분석기형 누출검출기를 이용한 헬륨 표준 누출의 비교 교정절차', C-09-1000-2004, 한국표준과학연구원, pp. 1-13, (2004)
3 Operating Manual of Leak Detectors of the Mass Spectrometer Type, Alcatel, pp. 20, (2003)
4 Y. H. Shin, S. S. Hong, I. T. Lim and K. H. Chung, Leak Rate Calibration System, Key Engineering Materials, pp. 1674-1678, (2004)
5 Guide to the Expression of Uncertainty in Measurement, ISO, pp. 9-26, (1993)