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Development of Calibration System of Helium Permeation Type Standard Leaks  

Hong S.S. (Vacuum Laboratory, Korea Research Institute of Standards and Science)
Lim I.T. (Vacuum Laboratory, Korea Research Institute of Standards and Science)
Shin Y.H. (Vacuum Laboratory, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.15, no.4, 2006 , pp. 347-353 More about this Journal
Abstract
A helium permeation type standard leak calibration system has newly developed by using dynamic gas expansion method. The measurement range was extended lower to $10^{-6}$ Pa L/s for participating CCM (Consultative Committee for Mass and Related Quantities) standard leak key comparison. For the system, pressure ratios of high and ultra-high vacuum chamber and porous plug conductance for helium gas were determined. By using the system, a permeation type standard leak of $5.6{\times}10^{-4}$ Pa L/s range was calibrated. The calibration result showed that the difference between standard commercial leak was 11.1 %.
Keywords
Standard leak; Permeation type; Constant pressure method; Direct calibration; Porous plug conductance;
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