• 멤브레인
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• 제23권6호
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• pp.432-438
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• 2013

본 연구에서는 metal organic frameworks (MOFs)의 한 종류인 MIL-100(Fe)을 이용하여 혼합기질막(mixed matrix membranes, MMMs)을 제조하였다. MIL-100(Fe)의 함량을 고분자 대비 0~30 wt%까지 변화시키면서 첨가된 MOF의 함량에 따른 기체의 투과 특성을 살펴보았다. $H_2$, $CO_2$, $O_2$, $N_2$, $CH_4$의 기체 투과도는 MIL-100(Fe) 첨가량이 증가함에 따라 투과도가 증가하는 경향을 보여주었으며, 상대적으로 큰 입자크기를 가진 $SF_6$의 투과도는 MIL-100(Fe)의 첨가량이 증가함에 따라 투과도가 감소하였다. 이상 선택도는 $N_2/SF_6$의 경우 폴리이미드막 대비 약 40% 증가하였으며, 이를 통해 $N_2/SF_6$ 분리에 적합한 분리막임을 확인할 수 있었다.

• 한국대기환경학회지
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• 제23권2호
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• pp.225-241
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• 2007

A closed flux chamber system was used for measuring major greenhouse gas (GHG) emission from tideland and/or wetland soils in estuarine area at Saemankum, Kunsan in southwestern Korea during from months of February to June 2006. Hourly averaged GHG soil emissions were measured two to three times a day during the ebb tide hours only. Site soils were analyzed for soil parameters (temperature, pH, total organic contents, N and C contents in soil) in the laboratory. Soil GHG fluxes were calculated based on the GHG concentration rate of change measured inside a closed chamber The analysis of GHG was conducted by using a Gas Chromatography (equipped with ECD/FID) at laboratory. Changes of daily, monthly GHGs' fluxes were examined. The relationships between the GHG emissions and soil chemical contents were also scrutinized with respect to gas production and consumption mechanism in the soil. Soil pH was pH $7.47{\pm}0.49$ in average over the experimental period. Organic matter contents in sample soil was $6.64{\pm}4.98\;g/kg$, and it shows relatively lower contents than those in agricultural soils in Kunsan area. Resulting from the soil chemistry data, soil nitrogen contents seem to affect GHG emission from the tidal land surface. The tidal soil was found to be either source or sink for the major GHG during the experimental periods. The annual average of $CH_{4}\;and\;CO_{2}$ fluxes were $0.13{\pm}0.86\;mg\;m^{-2}h^{-1}\;and\;5.83{\pm}138.73\;mg\;m^{-2}h^{-1}$, respectively, which will be as a source of these gases. However, $N_{2}O$ emission showed in negative flux, and the value was $-0.02{\pm}0.66\;mg\;m^{-2}h^{-1}$, and it implies tidal land surface act as a sink of $N_{2}O$. Over the experimental period, the absolute values of gas fluxes increased with soil temperature in general. Averages of the ambient gas concentration were $86.8{\pm}6.\;ppm$ in $CO_{2},\;1.63{\pm}0.34\;ppm\;in\;CH_{4},\;and\;0.59{\pm}0.15\;ppm\;in\;N_{2}O$, respectively. Generally, under the presence of gas emission from agricultural soils, decrease of gas emission will be observed as increase in ambient gas concentration. We, however, could not found significant correlation between the ambient concentrations and their emissions over the experimental period. There was no GHG compensation points existed in tide flat soil.

• 조명전기설비학회논문지
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• 제27권1호
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• pp.85-91
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• 2013

This paper studied surface discharge characteristics by a dielectric constant and diameter of solid dielectrics in $N_2/O_2$ mixture gas. Applied electric field strength at $N_2/O_2$ mixture gas was changed from the dielectric constant and diameter of the solid dielectrics, and insulation performance of the $N_2/O_2$ mixture gas determined surface discharge voltage. In each of the diameter at the solid dielectrics, the surface discharge voltage was increased by lengthening surface distance, whereas increasing rate of the surface discharge voltage was different from gas pressure. Thus, In this paper, main factors of surface discharge are as follows. 1) Insulation performance of $N_2/O_2$ mixture gas, 2) Dielectric constant of solid dielectrics, 3) Surface discharge path. It was clear that the surface discharge voltage depend on the main factors. These results will be applied to useful data for an eco-friendly composite insulation design.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 추계학술발표강연 및 논문개요집
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• pp.36-36
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• 1998

• 한국가스학회지
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• 제4권2호
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• pp.1-6
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• 2000

가스중에 포함되어 있는 NOx를 안전하게 처리하기 위하여 침상전극을 취부한 플라즈마 반응기를 제작하여 장치의 특성을 실험적으로 조사하여 유효성을 검정하였다. 반응가스는 $NO/N_2$ 혼합가스와 $N_2/O_2$ 혼합가스를 이용하여 초기 NO농도를 설정하고, 유속을 2${\iota}$/min으로 공급하였다. NOx의 반응특성은 방전주입전력이 높을때는 NO의 농도가 감소하였으며, 산소의 농도 증가시에 NO의 분해가 용이하고 NO의 분해에너지 효율이 높았다. 또한 NO의 농도가 증가할 수록 NO의 분해에너지 효율은 높으나 분해율은 낮았다. 오존의 특성은 방전주입전력이 높을수록 오존의 생성이 증가하고, $NO/N_2$의 농도가 증가할 수록 오존의 생성량이 감소하였다.

• 한국재료학회지
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• 제23권9호
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• pp.477-482
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• 2013

We investigated the detection properties of nitrogen monoxide (NO) gas using transparent p-type $CuAlO_2$ thin film gas sensors. The $CuAlO_2$ film was fabricated on an indium tin oxide (ITO)/glass substrate by pulsed laser deposition (PLD), and then the transparent p-type $CuAlO_2$ active layer was formed by annealing. Structural and optical characterizations revealed that the transparent p-type $CuAlO_2$ layer with a thickness of around 200 nm had a non-crystalline structure, showing a quite flat surface and a high transparency above 65 % in the range of visible light. From the NO gas sensing measurements, it was found that the transparent p-type $CuAlO_2$ thin film gas sensors exhibited the maximum sensitivity to NO gas in dry air at an operating temperature of $180^{\circ}C$. We also found that these $CuAlO_2$ thin film gas sensors showed reversible and reliable electrical resistance-response to NO gas in the operating temperature range. These results indicate that the transparent p-type semiconductor $CuAlO_2$ thin films are very promising for application as sensing materials for gas sensors, in particular, various types of transparent p-n junction gas sensors. Also, these transparent p-type semiconductor $CuAlO_2$ thin films could be combined with an n-type oxide semiconductor to fabricate p-n heterojunction oxide semiconductor gas sensors.

• 한국안광학회지
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• 제15권4호
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• pp.361-366
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• 2010

목적: Hollow Cathode Discharge방법을 이용한 HCD 이온플레이팅 장비를 제작하였고, 이 장비를 이용하여 stainless steel 위에 TiN 박막을 질소 가스양을 변화하면서 코팅하였으며, 이때 TiN 박막의 미세색상변화를 분석하였다. 방법: 질소 가스에 대한 TiN박막의 미세색상변화를 광학적으로 관찰하기 위해 분광복사계와 분광광도계를 사용하였고, 질소 가스에 대한 TiN 박막의 성분 변화를 알기위해 XPS로 분석하였다. 결과: 질소가스 120 sccm의 TiN 박막의 CIE 색좌표는 (0.382, 0.372)로 은색과 금색의 혼합색으로 나타나고 질소 가스양이 증가함에 따라 x, y값 둘다 조금씩 커져 금색이 점점 진해지는 것을 알 수 있었다. 또한 분광광도계에 의한 TiN 박막의 반사율에 있어서 질소 가스양이 증가함에 따라 550 nm 파장근처에서의 반사율의 기울기가 대체적으로 점점 커지는 것을 알 수 있었다. 그리고 XPS를 사용하여 Ti scan 한 결과, $N_2$ 성분에서 유래된 458 eV의 조그마한 피크는 조금씩 더 들어가며 TiN 성분에서 유래된 455 eV의 큰 피크는 약간씩 커지는 것을 볼 수 있었다. 결론: 질소 가스양이 120 sccm인 TiN 박막에서는 표면에 있는 TiC 성분과 표면과 내부에 존재하는 $N_2$, TiN 성분으로 인해 은색과 금색의 혼합색으로 나타났으나, 질소 가스양이 증가함에 따라 TiN 성분이 다른 성분에 비해 점점 많아져 금색이 점점 진해진 것으로 유추할 수 있었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.14-14
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• 2014

STT-MRAM의 구성물질인 magnetic tunnel junction의 효과적인 식각을 위하여 다양한 가스 조합을 연구하였다. 그 결과 $CH_4/N_2O$ gas 조합보다는 $CH_3OH$ gas 가 보다 향상된 식각 특성을 나타내었고 pulse duty ratio 변화와 기판온도 변화가 식각특성 향상에 영향을 주었음을 알 수 있었다.

• 한국전기전자재료학회논문지
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• 제13권10호
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• pp.812-816
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• 2000

It is very important to understand the correlation of between inter dielectric(ILD) CMP process and various facility factors supplied to equipment to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD-CMP process was studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyze various facilities supplied at supply system. With facility shortage of D.I water(DIW) pressure, we introduced an adding purified $N_2$(P$N_2$)gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and P$N_2$gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and P$N_2$gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• 한국레이저가공학회지
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• 제1권1호
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• pp.30-38
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• 1998

This study includes the efface of shielding gas types on $CO_2$ laser weldability of low carbon automotive galvanized steel. The types of shielding gas evaluated are He, $CO_2$, Ar, $N_2$, 50%Ar＋50%$N_2$. The weld penetration, strength, formability(Erichsen test) of Laser weld are found to be strongly dependent upon the types of shielding gas used. Further, the maximum travel speed and flow rate to form a keyhole weld is also dependent upon types of shielding gas. The ability of shielding gas in removing plasma plume and thus increasing weld penetration is believed to be closely related with ionization/dissociation potential, which determine the period of plasma formation and disappearance. Further, thermal conductivity and reactivity of gas with molten pool also give strong effect on penetration and porosity formation which in turn affect on the formability and strength.