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http://dx.doi.org/10.3740/MRSK.2013.23.9.477

Nitrogen Monoxide Gas Sensing Characteristics of Transparent p-type Semiconductor CuAlO2 Thin Films  

Park, Soo-Jeong (Graduate School of Advanced Electronic Circuit Substrate Engineering, Chungnam National University)
Kim, Hyojin (Graduate School of Advanced Electronic Circuit Substrate Engineering, Chungnam National University)
Kim, Dojin (Graduate School of Advanced Electronic Circuit Substrate Engineering, Chungnam National University)
Publication Information
Korean Journal of Materials Research / v.23, no.9, 2013 , pp. 477-482 More about this Journal
Abstract
We investigated the detection properties of nitrogen monoxide (NO) gas using transparent p-type $CuAlO_2$ thin film gas sensors. The $CuAlO_2$ film was fabricated on an indium tin oxide (ITO)/glass substrate by pulsed laser deposition (PLD), and then the transparent p-type $CuAlO_2$ active layer was formed by annealing. Structural and optical characterizations revealed that the transparent p-type $CuAlO_2$ layer with a thickness of around 200 nm had a non-crystalline structure, showing a quite flat surface and a high transparency above 65 % in the range of visible light. From the NO gas sensing measurements, it was found that the transparent p-type $CuAlO_2$ thin film gas sensors exhibited the maximum sensitivity to NO gas in dry air at an operating temperature of $180^{\circ}C$. We also found that these $CuAlO_2$ thin film gas sensors showed reversible and reliable electrical resistance-response to NO gas in the operating temperature range. These results indicate that the transparent p-type semiconductor $CuAlO_2$ thin films are very promising for application as sensing materials for gas sensors, in particular, various types of transparent p-n junction gas sensors. Also, these transparent p-type semiconductor $CuAlO_2$ thin films could be combined with an n-type oxide semiconductor to fabricate p-n heterojunction oxide semiconductor gas sensors.
Keywords
oxide gas sensor; copper aluminum oxide; NO gas; transparent oxide;
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