• 센서학회지
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• 제18권6호
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• pp.456-461
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• 2009

Perovskite-structure $Sr(Ti_{1-x}Fe_x)O_3$ thick films, in which x is 0.4 or 0.6, were prepared by normal ceramic process on alumina substrate. Electrical resistance was measured as a function of thermal treatment condition including atmosphere, time, and temperature. The resistance of $Sr(Ti_{1-x}Fe_x)O_3$ films is lower than those of $SrTiO_3$ or $SrFeO_3$ films. The temperature coefficient of resistance over $550^{\circ}C$ was measured to be 0 for the $Sr(Ti_{1-x}Fe_x)O_3$ films after thermal treatment at $1100^{\circ}C$ in air. The sensing property of the films was also measured as a function of temperature and gas such as $O_2$, CO, $CO_2$, NO and $NO_2$. $Sr(Ti_{1-x}Fe_x)O_3$ films showed a good sensing property for $O_2$, but no sensing signal for CO, $CO_2$, NO and $NO_2$.

• ETRI Journal
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• 제31권6호
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• pp.636-641
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• 2009

ZnO nanofibers were electro-spun from a solution containing poly 4-vinyl phenol and Zn acetate dihydrate. The calcination process of the ZnO/PVP composite nanofibers brought forth a random network of polycrystalline wurtzite ZnO nanofibers of 30 nm to 70 nm in diameter. The electrical properties of the ZnO nanofibers were governed by the grain boundaries. To investigate possible applications of the ZnO nanofibers, their CO and $NO_2$ gas sensing responses are demonstrated. In particular, the $SnO_2$-deposited ZnO nanofibers exhibit a remarkable gas sensing response to $NO_2$ gas as low as 400 ppb. Oxide nanofibers emerge as a new proposition for oxide-based gas sensors.

• 한국전기전자재료학회논문지
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• 제24권3호
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• pp.215-218
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• 2011

A novel design of gas sensor using Ga-doped ZnO (GZO) thin films which are deposited on low temperature co-fired ceramic (LTCC) substrates is presented. The LTCC substrates with thickness of 400 ${\mu}m$ are fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The GZO thin films with different thickness are deposited on LTCC substrates, by RF magnetron sputtering method. The microstructure and sensing properties of GZO gas sensing films are analyzed as a function of the film thickness. The films are well crystallized in the hexagonal (wurzite) structure with increasing thickness. The maximum sensitivity of 3.49 is obtained at 100 nm film thickness and the fastest 90% response time of 27.2 sec is obtained at 50 nm film thickness for the operating temperature of $400^{\circ}C$ to the $NO_2$ gas.

• 한국재료학회지
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• 제23권9호
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• pp.477-482
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• 2013

We investigated the detection properties of nitrogen monoxide (NO) gas using transparent p-type $CuAlO_2$ thin film gas sensors. The $CuAlO_2$ film was fabricated on an indium tin oxide (ITO)/glass substrate by pulsed laser deposition (PLD), and then the transparent p-type $CuAlO_2$ active layer was formed by annealing. Structural and optical characterizations revealed that the transparent p-type $CuAlO_2$ layer with a thickness of around 200 nm had a non-crystalline structure, showing a quite flat surface and a high transparency above 65 % in the range of visible light. From the NO gas sensing measurements, it was found that the transparent p-type $CuAlO_2$ thin film gas sensors exhibited the maximum sensitivity to NO gas in dry air at an operating temperature of $180^{\circ}C$. We also found that these $CuAlO_2$ thin film gas sensors showed reversible and reliable electrical resistance-response to NO gas in the operating temperature range. These results indicate that the transparent p-type semiconductor $CuAlO_2$ thin films are very promising for application as sensing materials for gas sensors, in particular, various types of transparent p-n junction gas sensors. Also, these transparent p-type semiconductor $CuAlO_2$ thin films could be combined with an n-type oxide semiconductor to fabricate p-n heterojunction oxide semiconductor gas sensors.

• 한국수소및신에너지학회논문집
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• 제16권2호
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• pp.136-141
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• 2005

Li-doped NiO was synthesized by molten salt method. $LiNO_3$-LiOH flux was used as a source for Li doping. $NiCl_2$ was added to the molten Li flux and then processed to make the Li-doped NiO material. Li:Ni ratios were maintained from 5:1 to 30:1 during the synthetic procedure and the Li doping amount of synthesized materials were found between 0.086-0.190 as a Li ion to Ni ion ratio. Li doping did not change the basic cubic structural characteristics of NiO as evidenced by XRD studies, however the lattice parameter decreased from 0.41769nm in pure NiO to 0.41271nm as Li doping amount increased. Hydrogen gas sensors were fabricated using these materials as thick films on alumina substrates. The half surface of each sensor was coated with the Pt catalyst. The sensor when exposed to the hydrogen gas blended in air, heated up the catalytic surface leaving rest half surface (without catalyst) cold. The thermoelectric voltage thus built up along the hot and cold surface of the Li-doped NiO made the basis for detecting hydrogen gas. The linearity of the voltage signal vs $H_2$ concentration was checked up to 4% of $H_2$ in air (as higher concentrations above 4.65% are explosive in air) using Li doped NiO of Li ion/Ni ion=0.111 as the sensor material. The response time T90 and the recovery time RT90 were less than 25 sec. There was minimum interference of other gases and hence $H_2$ gas can easily be detected.

• 한국응용과학기술학회지
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• 제12권1호
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• pp.125-131
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• 1995

Ultra thin films of Tetra-3-hexadecylsulphamoylcopperphthalocyanine(HDSM-CuPc) were formed on various substrates by Langmuir-Blodgett method, where HDSM-CuPc was synthesized by attaching long-chain alkylamine(hexa-decylamine) to CuPc. The reaction product was identified with FT-IR, UV-visible absorption spectroscopies, elemental analysis and thin layer chromatography. The formation of Ultrathin Langmuir-Blodgett(LB) films of HDSM-CuPc was confirmed by FT-IR and UV-visible spectroscopies. A quartz piezoelectric crystal coated with LB films of HDSM-CuPc was examined as a gas sensor for $N0_2$ gas. HDSM-CuPc LB films were transferred to a quartz crystal microbalance(QCM) in the form of Z-type multilayers. Response characteristics of film-coated QCM to $NO_2$ gas concentrations over a range of $100{\sim}600ppm$ have been tested with a thickness of $5{\sim}20$ layers of HDSM-CuPc. Changes in frequency by adsorption of $NO_2$ were increased With the number of LB layers and $NO_2$ concentration, but the response time was slow.

• Journal of the Korean Physical Society
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• 제73권10호
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• pp.1444-1451
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• 2018

The surface-to-volume ratio of one-dimensional (1D) semiconductor metal-oxide sensors is an important factor for achieving good gas sensing properties because it offers a wide response area. To exploit this effect, in this study, we determined the optimal calcination temperature to maximize the specific surface area and thereby the sensitivity of the sensor. The $In_2O_3$ nanorods were synthesized by using vapor-liquid-solid growth of $In_2O_3$ powders and were decorated with the Pt nanoparticles by using a sol-gel method. Subsequently, the Pt nanoparticle-decorated $In_2O_3$ nanorods were calcined at different temperatures to determine the optimal calcination temperature. The $NO_2$ gas sensing properties of five different samples (pristine uncalcined $In_2O_3$ nanorods, Pt-decorated uncalcined $In_2O_3$ nanorods, and Pt-decorated $In_2O_3$ nanorods calcined at 400, 600, and $800^{\circ}C$) were determined and compared. The Pt-decorated $In_2O_3$ nanorods calcined at $600^{\circ}C$ showed the highest surface-to-volume ratio and the strongest response to $NO_2$ gas. Moreover, these nanorods showed the shortest response/recovery times toward $NO_2$. These enhanced sensing properties are attributed to a combination of increased surface-to-volume ratio (achieved through the optimal calcination) and increased electrical/chemical sensitization (provided by the noble-metal decoration).

• 센서학회지
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• 제15권6호
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• pp.406-410
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• 2006

The films of indium oxide $In_{2}O_{3}$) were deposited onto $SiO_{2}$ coated Si wafers by a thermal evaporation method. Substrate temperature was varied from $25^{\circ}C$ to $300^{\circ}C$. Deposition rate increased to $250^{\circ}C$ and then decreased rapidly. The crystallographic properties and surface morphologies of the films were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The films deposited at $250^{\circ}C$ were found to have a nanobelt structure. Resistor-type gas-sensors were fabricated with $In_{2}O_{3}$ films using Pt as electrodes. The resistance variation of $In_{2}O_{3}$ films with the concentration of NO gas was measured. The $In_{2}O_{3}$ films deposited at $250^{\circ}C$ showed the highest sensitivity to the NO gas.

• 센서학회지
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• 제23권3호
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• pp.211-215
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• 2014

The Pt-, Ni- and Cr-decorated tubular $SnO_2$ nanofibers for gas sensors were prepared by the electrospinning of polyvinylpyrrolidone (PVP) nanofibers containing Pt, Ni, and Cr precursors, the sputtering of $SnO_2$ on the electrospun PVP nanofibers, and the removal of sacrificial PVP parts by heat treatment at $600^{\circ}C$ for 2 h. Pt-decorated tubular $SnO_2$ nanofibers showed high response ($R_a/R_g=210.5$, $R_g$: resistance in gas, $R_a$: resistance in air) to 5 ppm $C_2H_5OH$ at $350^{\circ}C$ with negligible cross-responses to other interference gases (5 ppm trimethylamine, $NH_3$, HCHO, p-xylene, toluene and benzene). Cr-decorated tubular $SnO_2$nanofibers showed the selective detection of p-xylene at $400^{\circ}C$. In contrast, no significant selectivity to a specific gas was found in Ni-decorated tubular $SnO_2$ nanofibers. The selective and sensitive detection of gases using Pt-decorated and Cr-decorated tubular $SnO_2$ nanofibers were discussed in relation to the catalytic promotion of gas sensing reaction.

• 한국분무공학회지
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• 제24권4호
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• pp.163-170
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• 2019

In this study, feedback logic using dual O₂ sensor values were developed to increase the purification capability of a three-way catalyst (TWC) in a compressed natural gas (CNG) engine. A heavy-duty inline 6-cylinder engine was used and the CNG was supplied to the engine through a mixer. This study consists of two main parts, namely, the proportional integral (PI) control with a front O₂ sensor and the feedback control with dual O₂ sensors. In the PI control experiment, effects of various parameters, such as P gain, I gain, and lean delay, on the TWC capability were identified. Based on the results of the PI control experiment, the feedback logic using dual O₂ sensor values were developed. In both cases, the nitrogen oxides (NO_X) emissions were nearly zero. However, the carbon monoxide (CO) emissions were reduced significant in the feedback logic with dual O₂ sensors than in the PI control with the front O₂ sensor.