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Characteristics of Electomigration & Surface Hardness about Tungsten-Carbon-Nitrogen(W-C-N) Related Diffusion Barrier/
[Kim, Soo-In;Hwang, Young-Joo;Ham, Dong-Shik;Nho, Jae-Kue;Lee, Jae-Yun;Park, Jun;Ahn, Chan-Goen;Kim, Chang-Seong;Oh, Chan-Woo;Yoo, Kyeng-Hwan;Lee, Chang-Woo;]
/ Journal of the Korean Vacuum Society
/ 2009
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4
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