Characterization of Al-Doped ZnO Thin Film Grown on Buffer Layer with RF Magnetron Sputtering Method |
No, Young-Soo
(Thin Film Material Research Center, Korea Institute of Science and Technology)
Park, Dong-Hee (Thin Film Material Research Center, Korea Institute of Science and Technology) Kim, Tae-Whan (Department of Electronics and Computer Engineering, Hanyang University) Choi, Ji-Won (Thin Film Material Research Center, Korea Institute of Science and Technology) Choi, Won-Kook (Thin Film Material Research Center, Korea Institute of Science and Technology) |
1 | D. G. Hwang, G. H. Band, and J. M. Myung, Bulletin of Korea Institute of Electrical and Electronic Material Engineers, 15, 6, 35 (2002) 과학기술학회마을 ScienceOn |
2 | Ch. Sujatha, G. Mohan Rao, and S. Uthanna, Matter Sci. Engin. 94, 106 (2002) DOI ScienceOn |
3 | U. S. Choi, B. M. So, and J. W. Hong, J. Korean Institute of Electrical and Electronic Material Engineers, 9, 572 (1996) 과학기술학회마을 |
4 | H. Kim, A. Pique, and J. S. Horwitz, Appl. Phys. Lett. 74, 3444 (1999) DOI |
5 | K. Meyer, I. K. Schuller, and C. M. Falco, J. Appl. Phys. 52, 5803 (1981) DOI ScienceOn |
6 | 김희수, 한국진공학회지, 16, 3, 205 (2007) 과학기술학회마을 DOI ScienceOn |
7 | 이승환, 성영권, 김종관, 전기전자재료학회논문지 10, 2, 128 (1997) 과학기술학회마을 |
8 | W. J. Jeong and G. C. Park, Solar Energy Mater. Solar Cells 6538 (2001) |
9 | I. Broser, H. Nelkowski, and G. Nimitz, in Semiconductors, Group III, Vol. 17 of Landolt-Bornstein, edited by O. Madelung, M. Schultz, and H. Weiss (Springer-Verlag, Berlin, 1982) |
10 | A. Segm Uller and M. Murakami, in 'Analytical Techniques for Thin Films', editedby K. N. Tu and R. Rosenberg (Academic Press, Inc., Boston, 1988) p. 143 |
11 | D. R. Mckenzie, D. A. Muller, and B. A. Pailthrope, Phys. Rev. Lett. 67, 773 (1991) DOI ScienceOn |
12 | T. Minami, H. Sato, H. Nanto, and S. Takata, Jpn. J. Appl. Phys. 24, L781 (1985) DOI ScienceOn |
13 | T. Minami, Thin Solid Films 516, 5822 (2008) DOI ScienceOn |
14 | C. A. Davis, Thin Solid Films 226, 33 (1993) DOI ScienceOn |
15 | R. Cebulla, R. Wendt, and K. Ellmer, J. Appl. Phys. 83, 15 (1998) DOI ScienceOn |
16 | 유동근, 김명화, 정성훈, 부진효, 한국진공학회지, 17, 1, 73 (2008) 과학기술학회마을 DOI ScienceOn |
17 | Y. Igasaki and H. Kanma, Appl. Surf. Sci. 169, 508 (2001) DOI ScienceOn |
18 | 최우성, 소병문, 홍진웅, 전기전재재료학회논문지 9, 6, 573 (1996) 과학기술학회마을 |
19 | J. D. Lee and J. T. Song, 전기전자재료학회논문지 9, 2, 199 (1996) 과학기술학회마을 |
20 | D. Dir, J. Vac. Sci. Technol. A4, 2954 (1986) DOI |