Browse > Article
http://dx.doi.org/10.5757/JKVS.2009.18.3.164

Computational Fluid Dynamic Modeling for Internal Antenna Type Inductively Coupled Plasma Systems  

Joo, Jung-Hoon (Department of Materials Science and Engineering & Plasma Materials Research Center, Kunsan National University)
Publication Information
Journal of the Korean Vacuum Society / v.18, no.3, 2009 , pp. 164-175 More about this Journal
Abstract
CFD is used to analyze gas flow characteristics, power absorption, electron temperature, electron density and chemical species profile of an internal antenna type inductively coupled plasma system. An optimized grid generation technology is used for a complex real-scale models for industry. A bare metal antenna shows concentrated power absorption around rf a feeding line. Skin depth of power absorption for a system is modeled to 50 mm, which is reported 53 mm by experiments. For an application of bipolar plates for hydrogen fuel cells, multi-sheet loading ICP nitriding system is proposed using an internal ICP antenna. It shows higher atomic nitrogen density than reported simple pulsed dc nitriding systems. Minimum gap between sheets for uniform nitriding is modeled to be 39 mm.
Keywords
Numerical modeling; Inductively coupled plasma; Nitriding; Bipolar plate; Fuel cell;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Yang Yang and Mark J. Kushner, J. Vac. Sci. Technol A, 25, 1420 (2008)   DOI   ScienceOn
2 A. Mayo, S. Hamaguchi, J. Joo, and S. Rossnagel, J. Vac. Sci. Technol B, 15, 1788 (1997)   DOI   ScienceOn
3 Junghoon Joo, J. Vac. Sci. Technol A, 17, 2368 (1999)   DOI
4 Ju-Wan Lim, Heung-Sik Park, Tae-Hyeong Park, Jung-Joong Lee, and Junghoon Joo, J. Vac. Sci. Technol A, 18, 524 (2000)   DOI   ScienceOn
5 Dong-Kak Lee, Jung-Joong Lee, and Junghoon Joo, Surf. Coat. Technol., 171, 24 (2003)   DOI   ScienceOn
6 D. H. Jung, H. Kim, G. R. Lee, B. Park, J. J. Lee, and J. H. Joo, Surf. Coat. Technol., 174-175, 638 (2003)   DOI   ScienceOn
7 Yeonghun Han, S. J. Jung, J.-J. Lee, and J. H. Joo, Surf. Coat. Technol., 174-175, 235 (2003)   DOI   ScienceOn
8 Paul A. Miller and Merle E. Riley, J. Appl. Phys. 82, 3689 (1997)   DOI   ScienceOn
9 Dong-Kak Lee, Jung-Joong Lee, and Junghoon Joo, Surf. Coat. Technol. 173-174, 1234 (2003)
10 Bong-Yong Jung and Myung-Ho Kim, J. Kor. Inst. Met. Mater., 37, 1522 (1999)
11 Peter Kaestner, Thorsten Michler, Hans Weidner, Kyong-Tschong Rie, and Gunter Brauer, Surf. Coat. Technol. 203, 897 (2008)   DOI   ScienceOn
12 Wonkyun Yang and Junghoon Joo, J. Kor. Phys. Soc. 54, 971 (2009)   DOI   ScienceOn
13 Yuichi Setsuhara, Shoji Miyake, Yochi Sakawa, and Tatsuo Shoji, Surf. Coat. Technol 136, 60 (2001)   DOI   ScienceOn
14 Junghoon Joo, J. Vac. Sci. Technol A, 18, 2006 (2000)   DOI   ScienceOn
15 H. Kim, D. H. Jung, B. Park, K. C. Yoo, J. J. Lee, and J. H. Joo, Surf. Coat. Technol., 193, 255 (2005)   DOI   ScienceOn
16 H. D. Na, H. S. Park, D. H. Jung, G. R. Lee, J. H. Joo, and J. J. Lee, Surf. Coat. Technol., 169-170, 41 (2003)   DOI   ScienceOn
17 Bohwan Park, Dong-Ha Jung, Hoon Kim, Keun-Cheol Yoo, Jung-Joong Lee, and Junghoon Joo, Surf. Coat. Technol., 200, 726 (2005)   DOI   ScienceOn
18 S. J. Jung, K. H. Lee, J. J. Lee, and J. H. Joo, Surf. Coat. Technol., 169-170, 363 (2003)   DOI   ScienceOn
19 Bohwan Park, Dong-Ha Jung, Girak Lee, Jung- Joong Lee, and Jung-Hoon Joo, Surf. Coat. Technol., 174-175, 643 (2003)   DOI   ScienceOn
20 손채화, 한국전기학회논문지 55C, 601 (2006)
21 배상현, 권득철, 윤남식 한국진공학회지 17, 426 (2008)   과학기술학회마을   DOI
22 Dong-Kak Lee, Jung-Joong Lee, and Junghoon Joo, Surf. Coat. Technol., 173-174, 1234 (2003)
23 H. S. Park, D. H. Jung, H. D. Na, J. H. Joo, and J. J. Lee, Surf. Coat. Technol., 142-144, 999 (2001)   DOI   ScienceOn
24 D. H. Jung, H. S. Park, H. D. Na, J. W. Lim, J. J. Lee, and J. H. Joo, Surf. Coat. Technol., 169-170, 424 (2003)   DOI   ScienceOn
25 Jungjoong Lee and Junghoon Joo, Surf. Coat. Technol., 169-170, 353 (2003)   DOI   ScienceOn
26 Dae-Hwan Kang, Dong-Kak Lee, Ki-Bum Kim, Jung-Joong Lee, and Junghoon Joo, Appl. Phys. Lett., 84, 3283 (2004)   DOI   ScienceOn
27 H. Y. Lee, D. K. Lee, D. H. Kang, J. J. Lee, and J. H. Joo, Surf. Coat. Technol., 193, 152 (2005)   DOI   ScienceOn
28 S. J. Jung, B. M. Koo, Y. H. Han, J. J. Lee, and J. H. Joo, Surf. Coat. Technol., 200, 862 (2005)   DOI   ScienceOn
29 S. Rossnagel and J. Hopwood, Appl. Phys. Lett. 63, 3285 (1993)   DOI   ScienceOn
30 Junghoon Joo, J. Vac. Sci. Technol A, 18, 23 (2000)   DOI   ScienceOn
31 김곤호, 양성채, 플라즈마 일렉트로닉스, (주)교학사, 2006, 150
32 K. H. Bai, D. S. Lee, and H. Y. Chang, Appl. Phys. Lett., 80, 3907 (2002)   DOI   ScienceOn
33 ESI CFD Inc, CFD-ACE+ V2006 User manual, ESI-CFD Inc, 2006, 361
34 K. H. Bai and H. Y. Chang., Appl. Phys. Lett., 87, 121502 (2005)   DOI   ScienceOn
35 S. J. Jung, Y. H. Han, B. M. Koo, J. J. Lee, and J. H. Joo, Thin Solid Films, 475, 275 (2005)   DOI   ScienceOn