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http://dx.doi.org/10.5757/JKVS.2009.18.3.151

The Present Status of Development of Inductively Coupled Plasma Simulator based on Fluid Model  

Kwon, D.C. (Department of Electrical Engineering, Chungbuk National University)
Yoon, N.S. (Department of Electrical Engineering, Chungbuk National University)
Publication Information
Journal of the Korean Vacuum Society / v.18, no.3, 2009 , pp. 151-163 More about this Journal
Abstract
The domestic development status of Inductively Coupled Plasma (ICP) simulator which is based on fluid model is explained. As each part which composes the unified simulator, electron heating module, charged and neutral particle transport module, surface reaction module including a sheath model, and GUI (Graphic User Interface) with pre- and post-processors are described in order. Also, we present data base status of chemical reaction and physical collision, which has been applied to the recently developed simulator until now. Lastly, some future plans of development are suggested.
Keywords
Inductively coupled plasma; Fluid model; Simulation;
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