Decomposition efficiency, power consumption, and applied voltage of CFC(Chlorofluorocatbon) were investigated by SPCP(surface induced discharge plasma chemical processing) reactor to obtain optimum process variables and maximum decomposition efficiencies. Decomposition efficiency of CFC-12 with various electric frequencies(5~50kHz). flow rates (100~1,000mL/min), initial concentrations(100~1,000ppm), electrode materials(W, Cu, Al). electrode thickness(1, 2, 3mm) and reference gases($N_2$, $O_2$, air) were measured and the products were analyzed with FT-IR. Experimental results showed that at the frequency of 10kHz, the highest decomposition efficiency of 92.7% for CFC-12 were observed at the power consumptions of 29.6W. respectively, and that decomposition efficiency decreased with increasing frequency above 20kHz and decomposition efficiency per unit power were 3.13%/W for CFC-12. Decomposition efficiency was increased with increasing residence times and with decreasing initial concentration of pollutants. Decomposition efficiency was increased with increasing thickness of discharge electrode and the highest decomposition efficiency was obtained for the electrode diameter of 3m. As the electrode material, decomposition efficiency was in order that tungsten(W), copper(Cu), aluminum (Al). Decomposition of CFC-12 in the reference gas of $N_2$ showed the highest efficiency among three reference gases, and then the effect of reference gas on the decomposition efficiency decreased in order of air and $O_2$. The optimum power for the maximum decomposition efficiency was 25.3W for CFC.