한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)

한국정밀공학회 (Korean Society for Precision Engineering)
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Focus Ion Beam을 이용한 탄소나노튜브 팁의 조작

Using Focus Ion Beam Carbon Nanotube Tip Manipulation

  • Yoon Y.H. (Dept. of intelligent Precision Machine, KIMM) ;
  • Han C.S. (Dept. of intelligent Precision Machine, KIMM)
  • 발행 : 2006.05.01
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초록

This paper reports on the development of a scanning probe microscopy(SPM) tip with caborn nanotubes. We used an electric field which causes dielectrophoresis(DEP), to align and deposit CNTs on a metal-coated SPM tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip align toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for scanning probe microscopy.

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